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Extract from the Register of European Patents

EP About this file: EP2304769

EP2304769 - METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  03.10.2014
Database last updated on 02.09.2024
Most recent event   Tooltip22.06.2018Lapse of the patent in a contracting state
New state(s): MK		published on 25.07.2018  [2018/30]
Applicant(s)For all designated states
Aes Motomation GmbH
Nikolaus-Otto-Strasse 8
40670 Meerbusch / DE
[2011/14]
Inventor(s)01 / HERTGENS, Andreas
Antoniusstrasse 36
41352 Korschenbroich / DE
02 / MUELLER, Torsten
Doulenweg 37
47647 Kerken / DE
03 / WALTNER, Paul
Camesstrasse 4
40670 Meerbusch / DE
 [2012/08]
Former [2011/32]01 / HERTGENS, Andreas
Antoniusstrasse 36
41352 Korschenbroich / DE
02 / MUELLER, Torsten
Eyllerstrasse 91a
47647 Kerken / DE
03 / WALTNER, Paul
Camesstrasse 4
40670 Meerbusch / DE
Former [2011/14]01 / HERTGENS, Andreas
Antoniusstrasse 36
41352 Korschenbroich / DE
02 / MUELLER, Torsten
Eyllerstrasse 91a
47647 Kerken / DE
03 / WALTNER, Pau
Camesstrasse 4
40670 Meerbusch / DE
Representative(s)Cohausz Hannig Borkowski Wißgott
Patent- und Rechtsanwaltskanzlei
Schumannstrasse 97-99
40237 Düsseldorf / DE
[2013/48]
Former [2011/14]COHAUSZ DAWIDOWICZ HANNIG & SOZIEN
Patent- und Rechtsanwaltskanzlei Schumannstraße 97-99
DE-40237 Düsseldorf / DE
Application number, filing date10714188.909.04.2010
[2011/14]
WO2010EP02213
Priority number, dateDE2009101681109.04.2009         Original published format: DE102009016811
[2011/14]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2010115632
Date:14.10.2010
Language:EN
[2010/41]
Type: A1 Application with search report 
No.:EP2304769
Date:06.04.2011
Language:EN
The application published by WIPO in one of the EPO official languages on 14.10.2010 takes the place of the publication of the European patent application.
[2011/14]
Type: B1 Patent specification 
No.:EP2304769
Date:27.11.2013
Language:EN
[2013/48]
Search report(s)International search report - published on:EP14.10.2010
ClassificationIPC:H01L21/67, H01L21/68
[2013/28]
CPC:
H01L21/67259 (EP,US); H01L21/67265 (EP,US); H01L21/681 (EP,US);
H01L21/67778 (US); H01L21/68707 (US)
Former IPC [2011/14]H01L21/00, H01L21/68
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   SM,   TR [2011/14]
Extension statesALNot yet paid
BANot yet paid
MENot yet paid
RSNot yet paid
TitleGerman:VERFAHREN ZUR AUTOMATISCHEN MESSUNG UND MELDUNG VON POSITIONSINFORMATIONEN ÜBER OBJEKTE IN EINEM SUBSTRATVERARBEITUNGSSYSTEM MITHILFE VON SENSORTRÄGERN SOWIE ENTSPRECHENDER SENSORTRÄGER[2011/14]
English:METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER[2011/14]
French:PROCÉDÉ DE MESURE AUTOMATIQUE ET D'APPRENTISSAGE DE POSITIONS DE LOCALISATION D'OBJETS DANS UN SYSTÈME DE TRAITEMENT DE SUBSTRAT AU MOYEN DE SUPPORTS DE CAPTEURS ET D'UN SUPPORT DE CAPTEUR ASSOCIÉ[2011/14]
Entry into regional phase30.12.2010National basic fee paid 
30.12.2010Designation fee(s) paid 
30.12.2010Examination fee paid 
Examination procedure30.12.2010Examination requested  [2011/14]
29.07.2011Despatch of a communication from the examining division (Time limit: M04)
07.12.2011Reply to a communication from the examining division
12.07.2013Communication of intention to grant the patent
15.10.2013Fee for grant paid
15.10.2013Fee for publishing/printing paid
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  29.07.2011
Opposition(s)28.08.2014No opposition filed within time limit [2014/45]
Fees paidRenewal fee
28.03.2012Renewal fee patent year 03
12.04.2013Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU09.04.2010
BG27.11.2013
CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
MK27.11.2013
MT27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
SM27.11.2013
TR27.11.2013
NO27.02.2014
GR28.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
[2018/30]
Former [2016/33]HU09.04.2010
BG27.11.2013
CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
MT27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
SM27.11.2013
TR27.11.2013
NO27.02.2014
GR28.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2016/32]HU09.04.2010
BG27.11.2013
CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
MT27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
SM27.11.2013
NO27.02.2014
GR28.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2016/28]BG27.11.2013
CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
MT27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
SM27.11.2013
NO27.02.2014
GR28.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2016/22]CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
MT27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
SM27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2016/16]CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
MT27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2015/14]CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SI27.11.2013
SK27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2015/01]CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SK27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
LU09.04.2014
Former [2014/52]CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
MC27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SK27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
Former [2014/41]CY27.11.2013
CZ27.11.2013
DK27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SK27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
Former [2014/37]CY27.11.2013
CZ27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
PL27.11.2013
RO27.11.2013
SE27.11.2013
SK27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
Former [2014/36]CY27.11.2013
EE27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
SE27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
Former [2014/28]CY27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
SE27.11.2013
NO27.02.2014
IS27.03.2014
PT27.03.2014
Former [2014/26]CY27.11.2013
ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
SE27.11.2013
NO27.02.2014
IS27.03.2014
Former [2014/25]ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
LV27.11.2013
SE27.11.2013
NO27.02.2014
IS27.03.2014
Former [2014/24]ES27.11.2013
FI27.11.2013
HR27.11.2013
LT27.11.2013
SE27.11.2013
NO27.02.2014
IS27.03.2014
Former [2014/23]FI27.11.2013
HR27.11.2013
LT27.11.2013
SE27.11.2013
NO27.02.2014
IS27.03.2014
Former [2014/22]FI27.11.2013
LT27.11.2013
SE27.11.2013
NO27.02.2014
Former [2014/20]LT27.11.2013
NO27.02.2014
Cited inInternational search[Y]US2005034288  (ADACHI MASARU [JP], et al) [Y] 1-25 * paragraph [0047] - paragraph [0068]; figures 8-10 *;
 [YD]WO03067183  (CYBEROPTICS SEMICONDUCTOR INC [US]) [YD] 1-25 * abstract *;
 [A]JP2000232145  (DAINIPPON SCREEN MFG) [A] 1,12 * abstract *;
 [A]JP2005032913  (DAINIPPON SCREEN MFG) [A] 1,12 * abstract *;
 [A]US2007275486  (HIROKI TSUTOMU [JP]) [A] 1,12 * paragraph [0056] - paragraph [0057]; figures 5A,5B *;
 [A]US5981966  (HONMA MANABU [JP]) [A] 1,12 * column 8, line 44 - column 9, line 30; figures 6-9 *
by applicantWO03067183
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.