EP2304769 - METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 03.10.2014 Database last updated on 02.09.2024 | Most recent event Tooltip | 22.06.2018 | Lapse of the patent in a contracting state New state(s): MK | published on 25.07.2018 [2018/30] | Applicant(s) | For all designated states Aes Motomation GmbH Nikolaus-Otto-Strasse 8 40670 Meerbusch / DE | [2011/14] | Inventor(s) | 01 /
HERTGENS, Andreas Antoniusstrasse 36 41352 Korschenbroich / DE | 02 /
MUELLER, Torsten Doulenweg 37 47647 Kerken / DE | 03 /
WALTNER, Paul Camesstrasse 4 40670 Meerbusch / DE | [2012/08] |
Former [2011/32] | 01 /
HERTGENS, Andreas Antoniusstrasse 36 41352 Korschenbroich / DE | ||
02 /
MUELLER, Torsten Eyllerstrasse 91a 47647 Kerken / DE | |||
03 /
WALTNER, Paul Camesstrasse 4 40670 Meerbusch / DE | |||
Former [2011/14] | 01 /
HERTGENS, Andreas Antoniusstrasse 36 41352 Korschenbroich / DE | ||
02 /
MUELLER, Torsten Eyllerstrasse 91a 47647 Kerken / DE | |||
03 /
WALTNER, Pau Camesstrasse 4 40670 Meerbusch / DE | Representative(s) | Cohausz Hannig Borkowski Wißgott Patent- und Rechtsanwaltskanzlei Schumannstrasse 97-99 40237 Düsseldorf / DE | [2013/48] |
Former [2011/14] | COHAUSZ DAWIDOWICZ HANNIG & SOZIEN Patent- und Rechtsanwaltskanzlei Schumannstraße 97-99 DE-40237 Düsseldorf / DE | Application number, filing date | 10714188.9 | 09.04.2010 | [2011/14] | WO2010EP02213 | Priority number, date | DE20091016811 | 09.04.2009 Original published format: DE102009016811 | [2011/14] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2010115632 | Date: | 14.10.2010 | Language: | EN | [2010/41] | Type: | A1 Application with search report | No.: | EP2304769 | Date: | 06.04.2011 | Language: | EN | The application published by WIPO in one of the EPO official languages on 14.10.2010 takes the place of the publication of the European patent application. | [2011/14] | Type: | B1 Patent specification | No.: | EP2304769 | Date: | 27.11.2013 | Language: | EN | [2013/48] | Search report(s) | International search report - published on: | EP | 14.10.2010 | Classification | IPC: | H01L21/67, H01L21/68 | [2013/28] | CPC: |
H01L21/67259 (EP,US);
H01L21/67265 (EP,US);
H01L21/681 (EP,US);
H01L21/67778 (US);
H01L21/68707 (US)
|
Former IPC [2011/14] | H01L21/00, H01L21/68 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2011/14] | Extension states | AL | Not yet paid | BA | Not yet paid | ME | Not yet paid | RS | Not yet paid | Title | German: | VERFAHREN ZUR AUTOMATISCHEN MESSUNG UND MELDUNG VON POSITIONSINFORMATIONEN ÜBER OBJEKTE IN EINEM SUBSTRATVERARBEITUNGSSYSTEM MITHILFE VON SENSORTRÄGERN SOWIE ENTSPRECHENDER SENSORTRÄGER | [2011/14] | English: | METHOD FOR AUTOMATIC MEASUREMENT AND FOR TEACHING-IN OF LOCATION POSITIONS OF OBJECTS WITHIN A SUBSTRATE PROCESSING SYSTEM BY MEANS OF SENSOR CARRIERS AND ASSOCIATED SENSOR CARRIER | [2011/14] | French: | PROCÉDÉ DE MESURE AUTOMATIQUE ET D'APPRENTISSAGE DE POSITIONS DE LOCALISATION D'OBJETS DANS UN SYSTÈME DE TRAITEMENT DE SUBSTRAT AU MOYEN DE SUPPORTS DE CAPTEURS ET D'UN SUPPORT DE CAPTEUR ASSOCIÉ | [2011/14] | Entry into regional phase | 30.12.2010 | National basic fee paid | 30.12.2010 | Designation fee(s) paid | 30.12.2010 | Examination fee paid | Examination procedure | 30.12.2010 | Examination requested [2011/14] | 29.07.2011 | Despatch of a communication from the examining division (Time limit: M04) | 07.12.2011 | Reply to a communication from the examining division | 12.07.2013 | Communication of intention to grant the patent | 15.10.2013 | Fee for grant paid | 15.10.2013 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 29.07.2011 | Opposition(s) | 28.08.2014 | No opposition filed within time limit [2014/45] | Fees paid | Renewal fee | 28.03.2012 | Renewal fee patent year 03 | 12.04.2013 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 09.04.2010 | BG | 27.11.2013 | CY | 27.11.2013 | CZ | 27.11.2013 | DK | 27.11.2013 | EE | 27.11.2013 | ES | 27.11.2013 | FI | 27.11.2013 | HR | 27.11.2013 | LT | 27.11.2013 | LV | 27.11.2013 | MC | 27.11.2013 | MK | 27.11.2013 | MT | 27.11.2013 | PL | 27.11.2013 | RO | 27.11.2013 | SE | 27.11.2013 | SI | 27.11.2013 | SK | 27.11.2013 | SM | 27.11.2013 | TR | 27.11.2013 | NO | 27.02.2014 | GR | 28.02.2014 | IS | 27.03.2014 | PT | 27.03.2014 | LU | 09.04.2014 | [2018/30] |
Former [2016/33] | HU | 09.04.2010 | |
BG | 27.11.2013 | ||
CY | 27.11.2013 | ||
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
MC | 27.11.2013 | ||
MT | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SI | 27.11.2013 | ||
SK | 27.11.2013 | ||
SM | 27.11.2013 | ||
TR | 27.11.2013 | ||
NO | 27.02.2014 | ||
GR | 28.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2016/32] | HU | 09.04.2010 | |
BG | 27.11.2013 | ||
CY | 27.11.2013 | ||
CZ | 27.11.2013 | ||
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EE | 27.11.2013 | ||
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SI | 27.11.2013 | ||
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SM | 27.11.2013 | ||
NO | 27.02.2014 | ||
GR | 28.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2016/28] | BG | 27.11.2013 | |
CY | 27.11.2013 | ||
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
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FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
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MC | 27.11.2013 | ||
MT | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SI | 27.11.2013 | ||
SK | 27.11.2013 | ||
SM | 27.11.2013 | ||
NO | 27.02.2014 | ||
GR | 28.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2016/22] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
MC | 27.11.2013 | ||
MT | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SI | 27.11.2013 | ||
SK | 27.11.2013 | ||
SM | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2016/16] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
MC | 27.11.2013 | ||
MT | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SI | 27.11.2013 | ||
SK | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2015/14] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
MC | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SI | 27.11.2013 | ||
SK | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2015/01] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
MC | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SK | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
LU | 09.04.2014 | ||
Former [2014/52] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
MC | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SK | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
Former [2014/41] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
DK | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SK | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
Former [2014/37] | CY | 27.11.2013 | |
CZ | 27.11.2013 | ||
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
PL | 27.11.2013 | ||
RO | 27.11.2013 | ||
SE | 27.11.2013 | ||
SK | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
Former [2014/36] | CY | 27.11.2013 | |
EE | 27.11.2013 | ||
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
Former [2014/28] | CY | 27.11.2013 | |
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
PT | 27.03.2014 | ||
Former [2014/26] | CY | 27.11.2013 | |
ES | 27.11.2013 | ||
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
Former [2014/25] | ES | 27.11.2013 | |
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
LV | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
Former [2014/24] | ES | 27.11.2013 | |
FI | 27.11.2013 | ||
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
Former [2014/23] | FI | 27.11.2013 | |
HR | 27.11.2013 | ||
LT | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
IS | 27.03.2014 | ||
Former [2014/22] | FI | 27.11.2013 | |
LT | 27.11.2013 | ||
SE | 27.11.2013 | ||
NO | 27.02.2014 | ||
Former [2014/20] | LT | 27.11.2013 | |
NO | 27.02.2014 | Cited in | International search | [Y]US2005034288 (ADACHI MASARU [JP], et al) [Y] 1-25 * paragraph [0047] - paragraph [0068]; figures 8-10 *; | [YD]WO03067183 (CYBEROPTICS SEMICONDUCTOR INC [US]) [YD] 1-25 * abstract *; | [A]JP2000232145 (DAINIPPON SCREEN MFG) [A] 1,12 * abstract *; | [A]JP2005032913 (DAINIPPON SCREEN MFG) [A] 1,12 * abstract *; | [A]US2007275486 (HIROKI TSUTOMU [JP]) [A] 1,12 * paragraph [0056] - paragraph [0057]; figures 5A,5B *; | [A]US5981966 (HONMA MANABU [JP]) [A] 1,12 * column 8, line 44 - column 9, line 30; figures 6-9 * | by applicant | WO03067183 |