Extract from the Register of European Patents

EP Citations: EP2462486

Cited inInternational search
Type:Patent literature
Publication No.:WO9811425  [XI]
 (BIO RAD MICROMEASUREMENTS LTD [GB], et al) [X] 1,2,5,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * abstract * * page 3 - page 11 * [I] 3,4,6-8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
Type:Patent literature
Publication No.:WO0229883  [XI]
 (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * claims 1,6,15 * * page 3, line 25 - page 6, line 28 * * page 10, line 7 - line 13 * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
Type:Patent literature
Publication No.:WO02077621  [XI]
 (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * page 4 - page 13 * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
Type:Patent literature
Publication No.:WO2004008125  [XI]
 (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * the whole document * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
Type:Patent literature
Publication No.:US2008084555  [XI]
 (YOO WOO SIK [US]) [X] 1,2,5,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * figures 7, 8A, 8B * * paragraph [0004] - paragraph [0019] * * paragraph [0069] - paragraph [0080] * [I] 3,4,6-8,20,21,23,24,34,38,39,41-43,55,56,58,59,69;
Type:Non-patent literature
Publication information:[A]  - WESTRATE S ET AL, "PHOTOLUMINESCENCE MAPPING DETECTS CU CONTAMINATION IN SI WAFERS", SOLID STATE TECHNOLOGY, PENNWELL CORPORATION, TULSA, OK, US, (20020201), vol. 45, no. 2, ISSN 0038-111X, page 57/58, XP001092608 [A] 1-70 * the whole document *
Cited inby applicant
Type:Patent literature
Publication No.:JPH11304717  
Type:Patent literature
Publication No.:JP2007258567