Cited in | International search | Type: | Patent literature | Publication No.: | WO9811425
[XI] (BIO RAD MICROMEASUREMENTS LTD [GB], et al) [X] 1,2,5,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * abstract * * page 3 - page 11 * [I] 3,4,6-8,20,21,23,24,34,38,39,41-43,55,56,58,59,69; | Type: | Patent literature | Publication No.: | WO0229883
[XI] (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * claims 1,6,15 * * page 3, line 25 - page 6, line 28 * * page 10, line 7 - line 13 * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69; | Type: | Patent literature | Publication No.: | WO02077621
[XI] (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * page 4 - page 13 * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69; | Type: | Patent literature | Publication No.: | WO2004008125
[XI] (AOTI OPERATING CO INC [US], et al) [X] 1,2,5,6,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * the whole document * [I] 3,4,7,8,20,21,23,24,34,38,39,41-43,55,56,58,59,69; | Type: | Patent literature | Publication No.: | US2008084555
[XI] (YOO WOO SIK [US]) [X] 1,2,5,10,18,19,22,26,35-37,40,45,53,54,57,61,70 * figures 7, 8A, 8B * * paragraph [0004] - paragraph [0019] * * paragraph [0069] - paragraph [0080] * [I] 3,4,6-8,20,21,23,24,34,38,39,41-43,55,56,58,59,69; | Type: | Non-patent literature | Publication information: | [A] - WESTRATE S ET AL, "PHOTOLUMINESCENCE MAPPING DETECTS CU CONTAMINATION IN SI WAFERS", SOLID STATE TECHNOLOGY, PENNWELL CORPORATION, TULSA, OK, US, (20020201), vol. 45, no. 2, ISSN 0038-111X, page 57/58, XP001092608 [A] 1-70 * the whole document * | Cited in | by applicant | Type: | Patent literature | Publication No.: | JPH11304717
| Type: | Patent literature | Publication No.: | JP2007258567
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