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EP2465971
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EP About this file: EP2465971
| EP2465971 - APPARATUS FOR FORMING LAYER [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 18.07.2014 Database last updated on 02.11.2024 | Most recent event Tooltip | 18.07.2014 | Application deemed to be withdrawn | published on 20.08.2014 [2014/34] | Applicant(s) | For all designated states Kim, Nam Jin 217-603 Jugong Newtown 861 Jowon-dong Jangan-gu Suwon-si Gyeonggi-do 440-716 / KR | [2012/25] | Inventor(s) | 01 /
see applicant ... | [2012/25] | Representative(s) | Zimmermann, Tankred Klaus Schoppe, Zimmermann, Stöckeler Zinkler, Schenk & Partner mbB Patentanwälte Radlkoferstrasse 2 81373 München / DE | [N/P] |
| Former [2012/25] | Zimmermann, Tankred Klaus Schoppe, Zimmermann, Stöckeler Zinkler & Partner P.O. Box 246 82043 Pullach / DE | Application number, filing date | 10808364.3 | 12.08.2010 | WO2010KR05289 | Priority number, date | KR20090074923 | 13.08.2009 Original published format: KR 20090074923 | [2012/25] | Filing language | KO | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2011019215 | Date: | 17.02.2011 | Language: | KO | [2011/07] | Type: | A2 Application without search report | No.: | EP2465971 | Date: | 20.06.2012 | Language: | EN | [2012/25] | Search report(s) | International search report - published on: | KR | 21.04.2011 | Classification | IPC: | C23C16/44, C23C16/54, H01L21/205 | [2012/25] | CPC: |
H01L21/67207 (EP,US);
C23C16/44 (KR);
C23C16/18 (EP,US);
C23C16/54 (EP,KR,US);
H01L21/205 (KR);
H01L21/67167 (EP,US);
H01L21/67184 (EP,US);
H01L21/67745 (EP,US);
H01L21/67748 (EP,US);
H01L21/0237 (EP,US);
H01L21/02458 (EP,US);
H01L21/0254 (EP,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2012/25] | Title | German: | VORRICHTUNG ZUR FORMUNG VON SCHICHTEN | [2012/25] | English: | APPARATUS FOR FORMING LAYER | [2012/25] | French: | APPAREIL DE FORMATION DE COUCHE | [2012/25] | Entry into regional phase | 24.01.2012 | Translation filed | 24.01.2012 | National basic fee paid | 24.01.2012 | Search fee paid | 24.01.2012 | Designation fee(s) paid | 24.01.2012 | Examination fee paid | Examination procedure | 24.01.2012 | Examination requested [2012/25] | 02.04.2012 | Amendment by applicant (claims and/or description) | 01.03.2014 | Application deemed to be withdrawn, date of legal effect [2014/34] | 03.04.2014 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2014/34] | Fees paid | Renewal fee | 30.07.2012 | Renewal fee patent year 03 | Penalty fee | Additional fee for renewal fee | 31.08.2013 | 04 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Cited in | International search | [A]KR20080100057 (JUSUNG ENG CO LTD [KR]); | [Y]KR20080112512 (JUSUNG ENG CO LTD [KR]); | [A]KR20090001353 (JUSUNG ENG CO LTD [KR]); | [X]KR20090035578 (APPLIED MATERIALS INC [US]) |