EP2455512 - MASKING JIG, SUBSTRATE HEATING APPARATUS, AND FILM FORMATION METHOD [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 26.09.2014 Database last updated on 23.12.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states TOYOTA JIDOSHA KABUSHIKI KAISHA 1, Toyota-cho Toyota-shi, Aichi-ken, 471-8571 / JP | [2013/47] |
Former [2013/09] | For all designated states TOYOTA JIDOSHA KABUSHIKI KAISHA 1, Toyota-cho Toyota-shi Aichi-ken, 471-8571 / JP | ||
Former [2012/21] | For all designated states Toyota Jidosha Kabushiki Kaisha 1 Toyota-cho Toyota-shi, Aichi 471-8571 / JP | Inventor(s) | 01 /
IKEJIRI Takashi c/o TOYOTA JIDOSHA KABUSHIKI KAISHA 1 Toyota-cho Toyota-shi, Aichi 471-8571 / JP | [2012/21] | Representative(s) | Albutt, Anthony John D Young & Co LLP 120 Holborn London EC1N 2DY / GB | [N/P] |
Former [2012/21] | Albutt, Anthony John D Young & Co LLP 120 Holborn London EC1N 2DY / GB | Application number, filing date | 10838380.3 | 10.05.2010 | WO2010JP57856 | Filing language | JA | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2011141979 | Date: | 17.11.2011 | Language: | JA | [2011/46] | Type: | A1 Application with search report | No.: | EP2455512 | Date: | 23.05.2012 | Language: | EN | [2012/21] | Type: | B1 Patent specification | No.: | EP2455512 | Date: | 20.11.2013 | Language: | EN | [2013/47] | Search report(s) | International search report - published on: | JP | 17.11.2011 | (Supplementary) European search report - dispatched on: | EP | 14.11.2012 | Classification | IPC: | C23C24/04, B05B15/04, B05D1/32, C23C4/02, C23C4/12, H01L23/36, H01L23/373, H01L21/48 | [2012/50] | CPC: |
H01L23/3735 (EP,KR,US);
C23C24/04 (EP,KR,US);
H01L23/36 (EP,KR,US);
B05B12/28 (EP,KR,US);
B05B7/1486 (EP,KR,US);
H01L23/473 (EP,KR,US);
H01L2924/0002 (EP,KR,US)
(-)
| C-Set: |
H01L2924/0002, H01L2924/00 (EP,US)
|
Former IPC [2012/21] | C23C24/04, B05B15/04, B05D1/32, C23C4/02, C23C4/12, H01L23/36 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, SE, SI, SK, SM, TR [2012/21] | Extension states | BA | Not yet paid | ME | Not yet paid | RS | Not yet paid | Title | German: | MASKIERUNGSVORRICHTUNG, SUBSTRATERHITZUNGSVORRICHTUNG UND FILMFORMUNGSVERFAHREN | [2012/21] | English: | MASKING JIG, SUBSTRATE HEATING APPARATUS, AND FILM FORMATION METHOD | [2012/21] | French: | GABARIT DE MASQUAGE, APPAREIL DE CHAUFFAGE DE SUBSTRAT, ET PROCÉDÉ DE FORMATION DE COUCHE | [2012/21] | Entry into regional phase | 29.06.2011 | Translation filed | 19.07.2011 | National basic fee paid | 19.07.2011 | Search fee paid | 19.07.2011 | Designation fee(s) paid | 19.07.2011 | Examination fee paid | Examination procedure | 16.09.2010 | Request for preliminary examination filed International Preliminary Examining Authority: JP | 19.07.2011 | Examination requested [2012/21] | 20.03.2013 | Amendment by applicant (claims and/or description) | 12.06.2013 | Communication of intention to grant the patent | 11.10.2013 | Fee for grant paid | 11.10.2013 | Fee for publishing/printing paid | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 12.06.2013 | Opposition(s) | 21.08.2014 | No opposition filed within time limit [2014/44] | Fees paid | Renewal fee | 15.03.2012 | Renewal fee patent year 03 | 17.05.2013 | Renewal fee patent year 04 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 10.05.2010 | AL | 20.11.2013 | AT | 20.11.2013 | BE | 20.11.2013 | BG | 20.11.2013 | CY | 20.11.2013 | CZ | 20.11.2013 | DK | 20.11.2013 | EE | 20.11.2013 | ES | 20.11.2013 | FI | 20.11.2013 | HR | 20.11.2013 | IT | 20.11.2013 | LT | 20.11.2013 | LV | 20.11.2013 | MC | 20.11.2013 | MK | 20.11.2013 | MT | 20.11.2013 | NL | 20.11.2013 | PL | 20.11.2013 | RO | 20.11.2013 | SE | 20.11.2013 | SI | 20.11.2013 | SK | 20.11.2013 | SM | 20.11.2013 | TR | 20.11.2013 | NO | 20.02.2014 | GR | 21.02.2014 | IS | 20.03.2014 | PT | 20.03.2014 | IE | 10.05.2014 | LU | 10.05.2014 | CH | 31.05.2014 | LI | 31.05.2014 | [2018/46] |
Former [2018/30] | HU | 10.05.2010 | |
AT | 20.11.2013 | ||
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BG | 20.11.2013 | ||
CY | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
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IT | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
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TR | 20.11.2013 | ||
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GR | 21.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2016/33] | HU | 10.05.2010 | |
AT | 20.11.2013 | ||
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BG | 20.11.2013 | ||
CY | 20.11.2013 | ||
CZ | 20.11.2013 | ||
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TR | 20.11.2013 | ||
NO | 20.02.2014 | ||
GR | 21.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2016/32] | HU | 10.05.2010 | |
AT | 20.11.2013 | ||
BE | 20.11.2013 | ||
BG | 20.11.2013 | ||
CY | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
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GR | 21.02.2014 | ||
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PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2016/31] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
BG | 20.11.2013 | ||
CY | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
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RO | 20.11.2013 | ||
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SI | 20.11.2013 | ||
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SM | 20.11.2013 | ||
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GR | 21.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2016/28] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
BG | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
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SM | 20.11.2013 | ||
NO | 20.02.2014 | ||
GR | 21.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2016/22] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
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SI | 20.11.2013 | ||
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SM | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2016/16] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
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SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2015/22] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
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IT | 20.11.2013 | ||
LT | 20.11.2013 | ||
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MC | 20.11.2013 | ||
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PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SI | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2015/21] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
MC | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SI | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
IE | 10.05.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2015/14] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
MC | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SI | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2015/09] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
MC | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2015/08] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
LU | 10.05.2014 | ||
CH | 31.05.2014 | ||
LI | 31.05.2014 | ||
Former [2015/04] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
LU | 10.05.2014 | ||
Former [2014/41] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
DK | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
Former [2014/37] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
CZ | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
PL | 20.11.2013 | ||
RO | 20.11.2013 | ||
SE | 20.11.2013 | ||
SK | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
Former [2014/36] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
EE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
Former [2014/28] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
PT | 20.03.2014 | ||
Former [2014/26] | AT | 20.11.2013 | |
BE | 20.11.2013 | ||
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
Former [2014/25] | AT | 20.11.2013 | |
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
LV | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
Former [2014/24] | AT | 20.11.2013 | |
ES | 20.11.2013 | ||
FI | 20.11.2013 | ||
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
Former [2014/23] | FI | 20.11.2013 | |
HR | 20.11.2013 | ||
LT | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
IS | 20.03.2014 | ||
Former [2014/22] | FI | 20.11.2013 | |
LT | 20.11.2013 | ||
NL | 20.11.2013 | ||
SE | 20.11.2013 | ||
NO | 20.02.2014 | ||
Former [2014/20] | LT | 20.11.2013 | |
NO | 20.02.2014 | Documents cited: | Search | [A]JP2003129218 (TOYOTA MOTOR CORP) [A] 1,7 * abstract *; | [A]JP2008024956 (ULVAC CORP) [A] 1,7* abstract * | International search | [Y]JPH06262106 (KOBAYASHI ATSUSHI); | [Y]JPH07300664 (FUJITSU LTD); | [Y]JP2003117452 (RICOH KK); | [Y]JP2006218460 (PIONEER ELECTRONIC CORP); | [Y]JP2006278558 (MITSUBISHI MATERIALS CORP) |