EP2362410 - Plasma igniter for an inductively coupled plasma ion source [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 02.10.2015 Database last updated on 02.11.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states FEI COMPANY 5350 NE Dawson Creek Drive Hillsboro, Oregon 97124-5793 / US | [2011/35] | Inventor(s) | 01 /
Graupera, Anthony 2577 NE Anna Ave Hillsboro, OR 97124 / US | 02 /
Kellogg, Sean 3026 NE 55TH Ave Portland, OR 97213 / US | 03 /
Miller, Tom 10810 NW La Cassel Crest Lane Portland, OR 97229 / US | 04 /
Laur, Dustin 1214 Marvin Ct. Forest Grove, OR 97116 / US | 05 /
Zhang, Shouyin 5838 NW 183rd Ave Apt C Portland, OR 97229 / US | 06 /
Dirriwachter, Antonius Basitianus Wilhelmus 22890 NW Chestnut St. Hillsboro, OR 97124 / US | [2014/35] |
Former [2011/44] | 01 /
Graupera, Anthony 2577 NE Anna Ave Hillsboro, OR 97124 / US | ||
02 /
Kellogg, Sean 3026 NE 55TH Ave Portland, OR 97213 / US | |||
03 /
Miller, Tom 10810 NW La Cassel Crest Lane Portland, OR 97229 / US | |||
04 /
Laur, Dustin 1214 Marvin Ct. Forest Grove, OR 97116 / US | |||
05 /
Zhang, Shouyin 5838 NW 183rd Ave Apt C Portland, OR 97229 / US | |||
06 /
Dirriwachter, Antonius Basitianus Wilhelmus 22890 NW Chestnut St Hillsboro, OR 97124 / US | |||
Former [2011/35] | 01 /
Graupera, Anthony 2577 NE Anna Ave Hillsboro, OR 97124 / US | ||
02 /
Kellogg, Sean 3026 NE 55TH Ave Portland, OR 97213 / US | |||
03 /
Miller, Tom 10810 NW La Cassel Crest Lane Portland, OR 97229 / US | |||
04 /
Laur, Dustin 1214 Marvin Ct. Forest Grove, OR 97116 / US | |||
05 /
Zhang, Shouyin 5838 NW 183rd Ave Apt C Portland, OR 97229 / US | Representative(s) | Bakker, Hendrik FEI Company Patent Department P.O. Box 1745 5602 BS Eindhoven / NL | [N/P] |
Former [2011/35] | Bakker, Hendrik FEI Company Patent Department P.O. Box 1745 5602 BS Eindhoven / NL | Application number, filing date | 11154434.2 | 15.02.2011 | [2011/35] | Priority number, date | US20100706690 | 16.02.2010 Original published format: US 706690 | US20100710602 | 23.02.2010 Original published format: US 710602 | [2011/35] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2362410 | Date: | 31.08.2011 | Language: | EN | [2011/35] | Type: | A3 Search report | No.: | EP2362410 | Date: | 26.10.2011 | Language: | EN | [2011/43] | Type: | B1 Patent specification | No.: | EP2362410 | Date: | 26.11.2014 | Language: | EN | [2014/48] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 23.09.2011 | Classification | IPC: | H01J37/08, H01J37/24 | [2011/35] | CPC: |
H01J37/08 (EP,US);
H01J37/24 (EP,US);
H05H1/36 (EP,US);
H01J2237/0815 (EP,US);
H01J2237/31749 (EP,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2011/35] | Title | German: | Plasmazünder für eine induktiv gekoppelte Plasmaionenquelle | [2011/35] | English: | Plasma igniter for an inductively coupled plasma ion source | [2011/35] | French: | Dispositif d'ignition de plasma pour source d'ions plasma à couplage inductif | [2011/35] | Examination procedure | 23.04.2012 | Amendment by applicant (claims and/or description) | 23.04.2012 | Examination requested [2012/23] | 19.06.2013 | Despatch of a communication from the examining division (Time limit: M04) | 18.10.2013 | Reply to a communication from the examining division | 28.07.2014 | Communication of intention to grant the patent | 15.10.2014 | Fee for grant paid | 15.10.2014 | Fee for publishing/printing paid | 15.10.2014 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 19.06.2013 | Opposition(s) | 27.08.2015 | No opposition filed within time limit [2015/45] | Fees paid | Renewal fee | 27.02.2013 | Renewal fee patent year 03 | 27.02.2014 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 15.02.2011 | AL | 26.11.2014 | AT | 26.11.2014 | BE | 26.11.2014 | BG | 26.11.2014 | CY | 26.11.2014 | CZ | 26.11.2014 | DK | 26.11.2014 | EE | 26.11.2014 | ES | 26.11.2014 | FI | 26.11.2014 | HR | 26.11.2014 | IT | 26.11.2014 | LT | 26.11.2014 | LV | 26.11.2014 | MC | 26.11.2014 | MK | 26.11.2014 | MT | 26.11.2014 | NL | 26.11.2014 | PL | 26.11.2014 | RO | 26.11.2014 | RS | 26.11.2014 | SE | 26.11.2014 | SI | 26.11.2014 | SK | 26.11.2014 | SM | 26.11.2014 | TR | 26.11.2014 | IE | 15.02.2015 | LU | 15.02.2015 | NO | 26.02.2015 | GR | 27.02.2015 | CH | 28.02.2015 | LI | 28.02.2015 | IS | 26.03.2015 | PT | 26.03.2015 | [2018/46] |
Former [2018/31] | HU | 15.02.2011 | |
AT | 26.11.2014 | ||
BE | 26.11.2014 | ||
BG | 26.11.2014 | ||
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CZ | 26.11.2014 | ||
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EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
IT | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
MK | 26.11.2014 | ||
MT | 26.11.2014 | ||
NL | 26.11.2014 | ||
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RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SI | 26.11.2014 | ||
SK | 26.11.2014 | ||
SM | 26.11.2014 | ||
TR | 26.11.2014 | ||
IE | 15.02.2015 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2017/46] | HU | 15.02.2011 | |
AT | 26.11.2014 | ||
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MC | 26.11.2014 | ||
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RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SI | 26.11.2014 | ||
SK | 26.11.2014 | ||
SM | 26.11.2014 | ||
TR | 26.11.2014 | ||
IE | 15.02.2015 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2017/38] | HU | 15.02.2011 | |
AT | 26.11.2014 | ||
BG | 26.11.2014 | ||
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
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IT | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
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RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SI | 26.11.2014 | ||
SK | 26.11.2014 | ||
SM | 26.11.2014 | ||
TR | 26.11.2014 | ||
IE | 15.02.2015 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2017/03] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
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LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
MT | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SI | 26.11.2014 | ||
SK | 26.11.2014 | ||
IE | 15.02.2015 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2016/12] | AT | 26.11.2014 | |
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CZ | 26.11.2014 | ||
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MC | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SI | 26.11.2014 | ||
SK | 26.11.2014 | ||
IE | 15.02.2015 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2016/07] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
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LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
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PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SK | 26.11.2014 | ||
IE | 15.02.2015 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2016/03] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
IT | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SK | 26.11.2014 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/47] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SK | 26.11.2014 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
CH | 28.02.2015 | ||
LI | 28.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/46] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
MC | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SK | 26.11.2014 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/44] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SK | 26.11.2014 | ||
LU | 15.02.2015 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/37] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
PL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
SK | 26.11.2014 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/36] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
CZ | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
RO | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/35] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
DK | 26.11.2014 | ||
EE | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/26] | AT | 26.11.2014 | |
CY | 26.11.2014 | ||
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/25] | AT | 26.11.2014 | |
ES | 26.11.2014 | ||
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/24] | ES | 26.11.2014 | |
FI | 26.11.2014 | ||
HR | 26.11.2014 | ||
LT | 26.11.2014 | ||
LV | 26.11.2014 | ||
NL | 26.11.2014 | ||
RS | 26.11.2014 | ||
SE | 26.11.2014 | ||
NO | 26.02.2015 | ||
GR | 27.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/23] | ES | 26.11.2014 | |
FI | 26.11.2014 | ||
LT | 26.11.2014 | ||
NL | 26.11.2014 | ||
NO | 26.02.2015 | ||
IS | 26.03.2015 | ||
PT | 26.03.2015 | ||
Former [2015/22] | LT | 26.11.2014 | |
NO | 26.02.2015 | ||
PT | 26.03.2015 | ||
Former [2015/21] | LT | 26.11.2014 | |
NO | 26.02.2015 | ||
Former [2015/20] | LT | 26.11.2014 | Documents cited: | Search | [E]EP2341525 (FEI CO [US]) [E] 1,2,4,10,12-14 * paragraphs [0027] - [0032]; figure 3 *; | [E]EP2312611 (FEI CO [US]) [E] 1,2,4,10-15 * paragraphs [0019] - [0025] - [0037] , [0041]; figures 1,3,4 *; | [XI]DE3842756 (SCHARMANN ARTHUR [DE], et al) [X] 1-5 * column 1, lines 1-7 * * column 2, line 50 - column 3, line 34; figures 1, 2, 6, 7 * [I] 6-9; | [XI]US2006086699 (HOLBER WILLIAM M [US], et al) [X] 1,2,4,5 * paragraphs [0102] , [0112] - [0116]; figure 8c * [I] 6-9; | [XD]US2005183667 (KELLER JOHN [US], et al) [XD] 12 * paragraphs [0018] , [0021] , [0020]; figure 1 * | [A] - "Bias tee", (20090518), Wikipedia, URL: http://en.wikipedia.org/w/index.php?title=Bias_tee&oldid=290814579, (20110908), XP002658568 [A] 6 * the whole document * | by applicant | US7241361 |