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EP2323158
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EP About this file: EP2323158
| EP2323158 - Lithography system and projection method [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 07.02.2014 Database last updated on 09.07.2024 | Most recent event Tooltip | 07.02.2014 | Application deemed to be withdrawn | published on 12.03.2014 [2014/11] | Applicant(s) | For all designated states Mapper Lithography IP B.V. Computerlaan 15 2628 XK Delft / NL | [2011/20] | Inventor(s) | 01 /
Kruit, Pieter Koornmarkt 49 2611 EB Delft / NL | 02 /
Wieland, Marco Jan-Jaco c/o Computerlaan 15 2628 XK Delft / NL | 03 /
Steenbrink, Stijn Willem Karel Herman Tolsteegsingel 50 bis a 3282 AM Utrecht / NL | 04 /
Jager, Remco Lange Nieuwstraat 95 3512 PG Utrecht / NL | [2011/20] | Representative(s) | Geurts, Franciscus Antonius Octrooibureau Vriesendorp & Gaade B.V. Koninginnegracht 19 2514 AB Den Haag / NL | [N/P] |
| Former [2011/20] | Geurts, Franciscus Antonius Octrooibureau Vriesendorp & Gaade B.V. Dr. Kuyperstraat 6 2514 BB Den Haag / NL | Application number, filing date | 11157080.0 | 09.03.2007 | [2011/20] | Priority number, date | US20060781040P | 10.03.2006 Original published format: US 781040 P | [2011/20] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2323158 | Date: | 18.05.2011 | Language: | EN | [2011/20] | Type: | A3 Search report | No.: | EP2323158 | Date: | 04.01.2012 | Language: | EN | [2012/01] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 01.12.2011 | Classification | IPC: | H01J37/317, H01J37/302, G03F7/20, B82Y10/00 | [2012/01] | CPC: |
H01J37/3177 (EP,KR,US);
H01J37/3174 (EP,KR,US);
B82Y10/00 (EP,US);
B82Y40/00 (EP,KR,US);
G03F7/2059 (KR);
G03F7/70291 (EP,KR,US);
G03F7/70383 (EP,KR,US);
G03F7/70508 (EP,KR,US);
H01J37/3026 (EP,KR,US);
H01L21/67282 (EP,KR,US);
H01J2237/31764 (EP,KR,US);
H01J2237/31766 (EP,KR,US);
H01J2237/31771 (EP,US)
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| Former IPC [2011/20] | H01J37/317, H01J37/302, G03F7/20 | Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MT, NL, PL, PT, RO, SE, SI, SK, TR [2011/20] | Title | German: | Lithographiesystem und Projektionsmethode | [2011/20] | English: | Lithography system and projection method | [2011/20] | French: | Système de lithographie et procédé de projection | [2011/20] | Examination procedure | 04.07.2012 | Amendment by applicant (claims and/or description) | 04.07.2012 | Examination requested [2012/33] | 01.10.2013 | Application deemed to be withdrawn, date of legal effect [2014/11] | 04.11.2013 | Despatch of communication that the application is deemed to be withdrawn, reason: renewal fee not paid in time [2014/11] | Parent application(s) Tooltip | EP07747250.4 / EP1994447 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20070747250) is 06.03.2009 | Fees paid | Renewal fee | 07.03.2011 | Renewal fee patent year 03 | 07.03.2011 | Renewal fee patent year 04 | 07.03.2011 | Renewal fee patent year 05 | 19.03.2012 | Renewal fee patent year 06 | Penalty fee | Additional fee for renewal fee | 31.03.2013 | 07 M06 Not yet paid |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [A]JPS5710236 (TOKYO SHIBAURA ELECTRIC CO) [A] 1 * abstract *; | [A]US4498010 (BIECHLER CHARLES S [US], et al) [A] 1 * abstract *; | [I]US5103101 (BERGLUND C NEIL [US], et al) [I] 1-7 * column 2, lines 43-60 * * column 3, lines 15-39; figure 1 * * column 4, line 15 - column 5, line 30; figures 4-7(2); claims 5, 7, 10, 14, 15 *; | [I]US5369282 (ARAI SOICHIRO [JP], et al) [I] 1-6 * column 2, lines 4-41; figure 1 * * column 3, line 46 - column 4, line 6; figure 2 * * column 10, lines 22-25 * * column 13, line 45 - column 15, line 25; figures 11(a)-11(e) * * column 16, line 53 - column 19, line 10; figures 15-19 *; | [A]US2002027198 (NAGATA KOJI [JP], et al) [A] 1 * abstract *; | [I]US6498685 (JOHNSON KENNETH C [US]) [I] 1-7 * column 53, line 36 - column 54, line 63; figures 51-57 *; | [I]US2004004699 (KANATAKE TAKASHI [JP]) [I] 1-7 * paragraphs [0092] - [0102]; figures 15,17,18 *; | [A]US2004037487 (NAKAYA DAISUKE [JP], et al) [A] 1* paragraphs [0144] , [0164] , [0165] * | by applicant | US4498010 | US5103101 | US5393987 | US2002104970 | WO2004038509 |