EP2547486 - METHOD OF AND DEVICE FOR THE SPATIALLY PERIODIC MODIFICATION OF A SUBSTRATE SURFACE USING A TELECENTRIC F-THETA LENS [Right-click to bookmark this link] | |||
Former [2013/04] | METHOD AND DEVICE FOR THE SPATIALLY PERIODIC MODIFICATION OF A SUBSTRATE SURFACE USING AN F-THETA LENS | ||
[2015/45] | Status | No opposition filed within time limit Status updated on 06.01.2017 Database last updated on 31.08.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states Laser-Laboratorium Göttingen E.V. Hans-Adolf-Krebs-Weg 1 37077 Göttingen / DE | [2013/04] | Inventor(s) | 01 /
SIMON, Peter Rilkestraße 19b 37120 Bovenden / DE | 02 /
KLEIN-WIELE, Jan-Hendrik Kleperweg 5 37085 Göttingen / DE | [2013/04] | Representative(s) | Schneider, Peter Christian Fiedler, Ostermann & Schneider Patentanwälte Obere Karspüle 41 37073 Göttingen / DE | [N/P] |
Former [2013/04] | Schneider, Peter Christian Fiedler, Ostermann & Schneider Patentanwälte Obere Karspüle 41 37073 Göttingen / DE | Application number, filing date | 11718274.1 | 12.04.2011 | [2016/09] | WO2011EP01820 | Priority number, date | DE20101029321 | 26.05.2010 Original published format: DE102010029321 | DE20101015351 | 16.04.2010 Original published format: DE102010015351 | [2013/04] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO2011128063 | Date: | 20.10.2011 | Language: | DE | [2011/42] | Type: | A1 Application with search report | No.: | EP2547486 | Date: | 23.01.2013 | Language: | DE | The application published by WIPO in one of the EPO official languages on 20.10.2011 takes the place of the publication of the European patent application. | [2013/04] | Type: | B1 Patent specification | No.: | EP2547486 | Date: | 02.03.2016 | Language: | DE | [2016/09] | Search report(s) | International search report - published on: | EP | 20.10.2011 | Classification | IPC: | B23K26/06, B23K26/08, B23K26/00, G03F7/20 | [2013/04] | CPC: |
B23K26/0648 (EP,US);
B29C59/16 (US);
B23K26/0006 (EP,US);
B23K26/0622 (EP,US);
B23K26/064 (US);
B23K26/0652 (EP,US);
B23K26/066 (EP,US);
B23K26/082 (EP,US);
B23K26/352 (EP,US);
B23K26/359 (EP,US);
F21V29/70 (US);
G03F7/70408 (EP,US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/04] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | VERFAHREN UND VORRICHTUNG ZUR RÄUMLICH PERIODISCHEN MODIFIKATION EINER SUBSTRATOBERFLÄCHE UNTER VERWENDUNG EINER TELEZENTRISCHEN F-THETA-OPTIK | [2015/45] | English: | METHOD OF AND DEVICE FOR THE SPATIALLY PERIODIC MODIFICATION OF A SUBSTRATE SURFACE USING A TELECENTRIC F-THETA LENS | [2015/45] | French: | PROCÉDÉ ET DISPOSITIF DE MODIFICATION PÉRIODIQUE SPATIALE D'UNE SURFACE DE SUBSTRAT À L'AIDE D'UNE OPTIQUE F-THETA TELECENTRIQUE | [2015/45] |
Former [2013/04] | VERFAHREN UND VORRICHTUNG ZUR RÄUMLICH PERIODISCHEN MODIFIKATION EINER SUBSTRATOBERFLÄCHE UNTER VERWENDUNG EINER F-THETA-OPTIK | ||
Former [2013/04] | METHOD AND DEVICE FOR THE SPATIALLY PERIODIC MODIFICATION OF A SUBSTRATE SURFACE USING AN F-THETA LENS | ||
Former [2013/04] | PROCÉDÉ ET DISPOSITIF DE MODIFICATION PÉRIODIQUE SPATIALE D'UNE SURFACE DE SUBSTRAT À L'AIDE D'UNE OPTIQUE F-THETA | Entry into regional phase | 19.10.2012 | National basic fee paid | 19.10.2012 | Designation fee(s) paid | 19.10.2012 | Examination fee paid | Examination procedure | 09.10.2012 | Amendment by applicant (claims and/or description) | 19.10.2012 | Examination requested [2013/04] | 01.04.2014 | Despatch of a communication from the examining division (Time limit: M06) | 19.09.2014 | Reply to a communication from the examining division | 16.11.2015 | Communication of intention to grant the patent | 11.12.2015 | Fee for grant paid | 11.12.2015 | Fee for publishing/printing paid | 11.12.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 01.04.2014 | Opposition(s) | 05.12.2016 | No opposition filed within time limit [2017/06] | Fees paid | Renewal fee | 04.04.2013 | Renewal fee patent year 03 | 08.04.2014 | Renewal fee patent year 04 | 19.03.2015 | Renewal fee patent year 05 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 12.04.2011 | AL | 02.03.2016 | CY | 02.03.2016 | CZ | 02.03.2016 | DK | 02.03.2016 | EE | 02.03.2016 | ES | 02.03.2016 | HR | 02.03.2016 | IT | 02.03.2016 | LT | 02.03.2016 | LV | 02.03.2016 | MC | 02.03.2016 | MK | 02.03.2016 | MT | 02.03.2016 | PL | 02.03.2016 | RO | 02.03.2016 | RS | 02.03.2016 | SE | 02.03.2016 | SI | 02.03.2016 | SK | 02.03.2016 | SM | 02.03.2016 | TR | 02.03.2016 | AT | 12.04.2016 | IE | 12.04.2016 | LU | 12.04.2016 | BE | 30.04.2016 | BG | 02.06.2016 | NO | 02.06.2016 | GR | 03.06.2016 | IS | 02.07.2016 | PT | 04.07.2016 | [2018/46] |
Former [2018/31] | HU | 12.04.2011 | |
CY | 02.03.2016 | ||
CZ | 02.03.2016 | ||
DK | 02.03.2016 | ||
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
MC | 02.03.2016 | ||
MK | 02.03.2016 | ||
MT | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SI | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
TR | 02.03.2016 | ||
AT | 12.04.2016 | ||
IE | 12.04.2016 | ||
LU | 12.04.2016 | ||
BE | 30.04.2016 | ||
BG | 02.06.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2018/29] | HU | 12.04.2011 | |
CY | 02.03.2016 | ||
CZ | 02.03.2016 | ||
DK | 02.03.2016 | ||
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
MC | 02.03.2016 | ||
MK | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SI | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
TR | 02.03.2016 | ||
AT | 12.04.2016 | ||
IE | 12.04.2016 | ||
LU | 12.04.2016 | ||
BE | 30.04.2016 | ||
BG | 02.06.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2018/28] | HU | 12.04.2011 | |
CY | 02.03.2016 | ||
CZ | 02.03.2016 | ||
DK | 02.03.2016 | ||
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
MC | 02.03.2016 | ||
MK | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SI | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
AT | 12.04.2016 | ||
IE | 12.04.2016 | ||
BE | 30.04.2016 | ||
BG | 02.06.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2017/38] | CZ | 02.03.2016 | |
DK | 02.03.2016 | ||
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SI | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
AT | 12.04.2016 | ||
IE | 12.04.2016 | ||
BE | 30.04.2016 | ||
BG | 02.06.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2017/16] | CZ | 02.03.2016 | |
DK | 02.03.2016 | ||
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SI | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
BE | 30.04.2016 | ||
BG | 02.06.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2017/07] | CZ | 02.03.2016 | |
DK | 02.03.2016 | ||
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2017/03] | CZ | 02.03.2016 | |
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
IT | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2016/51] | CZ | 02.03.2016 | |
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
PT | 04.07.2016 | ||
Former [2016/50] | CZ | 02.03.2016 | |
EE | 02.03.2016 | ||
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RO | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
SK | 02.03.2016 | ||
SM | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
Former [2016/49] | EE | 02.03.2016 | |
ES | 02.03.2016 | ||
HR | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
Former [2016/48] | ES | 02.03.2016 | |
HR | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
IS | 02.07.2016 | ||
Former [2016/39] | ES | 02.03.2016 | |
HR | 02.03.2016 | ||
LT | 02.03.2016 | ||
LV | 02.03.2016 | ||
PL | 02.03.2016 | ||
RS | 02.03.2016 | ||
SE | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
Former [2016/36] | ES | 02.03.2016 | |
HR | 02.03.2016 | ||
LT | 02.03.2016 | ||
PL | 02.03.2016 | ||
BE | 30.04.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | ||
Former [2016/35] | ES | 02.03.2016 | |
HR | 02.03.2016 | ||
NO | 02.06.2016 | ||
GR | 03.06.2016 | Cited in | International search | [XAI]JP2005066628 (MATSUSHITA ELECTRIC IND CO LTD) [X] 1,2,10,11,14-16,27,28,31 * abstract * * paragraphs [0043] - [0044] - [0059] - [0061] * [A] 13,30 [I] 12,29; | [Y]US2007138151 (TANAKA KOICHIRO [JP], et al) [Y] 1-5,15-19* paragraph [0056]; figure - *; | [YDA]DE102006032053 (LASER LAB GOETTINGEN EV [DE]) [YD] 1-5,15-19 * paragraphs [0038] - [0039]; figures 3-4 * [A] 6-13,20-31 | by applicant | US2004074881 | US6882477 | US2006109532 | DE102006032053 |