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Extract from the Register of European Patents

EP About this file: EP2583141

EP2583141 - ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY AND PROJECTION EXPOSURE SYSTEM WITH AN ILLUMINATION OPTICAL SYSTEM OF THIS TYPE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.02.2022
Database last updated on 02.11.2024
FormerThe patent has been granted
Status updated on  12.03.2021
FormerGrant of patent is intended
Status updated on  11.01.2021
FormerExamination is in progress
Status updated on  25.06.2019
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024  [2024/41]
Applicant(s)For all designated states
Carl Zeiss SMT GmbH
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
[2013/17]
Inventor(s)01 / PATRA, Michael
Schubartweg 41
73447 Oberkochen / DE
02 / DEGÜNTHER, Markus
Langäckerweg 20
73432 Aalen / DE
03 / LAYH, Michael
Heulenbergweg 30
73432 Aalen / DE
 [2013/17]
Representative(s)Rau, Schneck & Hübner Patentanwälte Rechtsanwälte PartGmbB
Königstraße 2
90402 Nürnberg / DE
[2021/15]
Former [2013/17]Rau, Schneck & Hübner
Patentanwälte - Rechtsanwälte Königstraße 2
90402 Nürnberg / DE
Application number, filing date11723967.308.06.2011
[2021/15]
WO2011EP59427
Priority number, dateUS20100354772P15.06.2010         Original published format: US 354772 P
DE2010103008915.06.2010         Original published format: DE102010030089
[2013/17]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2011157601
Date:22.12.2011
Language:EN
[2011/51]
Type: A2 Application without search report 
No.:EP2583141
Date:24.04.2013
Language:EN
The application published by WIPO in one of the EPO official languages on 22.12.2011 takes the place of the publication of the European patent application.
[2013/17]
Type: B1 Patent specification 
No.:EP2583141
Date:14.04.2021
Language:EN
[2021/15]
Search report(s)International search report - published on:EP23.02.2012
ClassificationIPC:G03F7/20
[2013/17]
CPC:
G03F7/70075 (EP,US); G03F7/70091 (US); G03F7/70083 (EP,US);
G03F7/70116 (EP,US)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2013/17]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:OPTISCHES BELEUCHTUNGSSYSTEM FÜR MIKROLITHOGRAFIE UND PROJEKTIONSBELEICHTUNGSSYSTEM MIT EINEM DERARTIGEN OPTISCHEN BELEUCHTUNGSSYSTEM[2013/17]
English:ILLUMINATION OPTICAL SYSTEM FOR MICROLITHOGRAPHY AND PROJECTION EXPOSURE SYSTEM WITH AN ILLUMINATION OPTICAL SYSTEM OF THIS TYPE[2013/17]
French:SYSTÈME D'ÉCLAIRAGE OPTIQUE POUR LA MICROLITHOGRAPHIE ET SYSTÈME D'EXPOSITION PAR PROJECTION AYANT UN SYSTÈME D'ÉCLAIRAGE OPTIQUE DE CE TYPE[2013/17]
Entry into regional phase13.12.2012National basic fee paid 
13.12.2012Designation fee(s) paid 
13.12.2012Examination fee paid 
Examination procedure13.12.2012Amendment by applicant (claims and/or description)
13.12.2012Examination requested  [2013/17]
27.06.2019Despatch of a communication from the examining division (Time limit: M04)
17.10.2019Reply to a communication from the examining division
12.01.2021Communication of intention to grant the patent
05.03.2021Fee for grant paid
05.03.2021Fee for publishing/printing paid
05.03.2021Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  27.06.2019
Opposition(s)17.01.2022No opposition filed within time limit [2022/12]
Fees paidRenewal fee
20.06.2013Renewal fee patent year 03
25.06.2014Renewal fee patent year 04
19.06.2015Renewal fee patent year 05
27.06.2016Renewal fee patent year 06
27.06.2017Renewal fee patent year 07
27.06.2018Renewal fee patent year 08
25.06.2019Renewal fee patent year 09
31.03.2020Renewal fee patent year 10
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU08.06.2011
AL14.04.2021
AT14.04.2021
CY14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
IT14.04.2021
LT14.04.2021
LV14.04.2021
MC14.04.2021
MK14.04.2021
MT14.04.2021
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IE08.06.2021
LU08.06.2021
FR14.06.2021
BE30.06.2021
CH30.06.2021
LI30.06.2021
BG14.07.2021
GB14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
[2024/41]
Former [2024/22]HU08.06.2011
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CZ14.04.2021
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EE14.04.2021
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MK14.04.2021
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IE08.06.2021
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GR15.07.2021
IS14.08.2021
PT16.08.2021
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IE08.06.2021
LU08.06.2021
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CH30.06.2021
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GB14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
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GB14.07.2021
NO14.07.2021
GR15.07.2021
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PT16.08.2021
Former [2022/22]AT14.04.2021
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SM14.04.2021
IE08.06.2021
LU08.06.2021
CH30.06.2021
LI30.06.2021
BG14.07.2021
GB14.07.2021
NO14.07.2021
GR15.07.2021
PT16.08.2021
IS22.12.2021
Former [2022/21]AT14.04.2021
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DK14.04.2021
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ES14.04.2021
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EE14.04.2021
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MC14.04.2021
PL14.04.2021
RO14.04.2021
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SE14.04.2021
SK14.04.2021
SM14.04.2021
LU08.06.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
PT16.08.2021
IS22.12.2021
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FI14.04.2021
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MC14.04.2021
PL14.04.2021
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SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
PT16.08.2021
IS22.12.2021
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BG14.07.2021
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GR15.07.2021
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FI14.04.2021
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BG14.07.2021
NO14.07.2021
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PT16.08.2021
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FI14.04.2021
HR14.04.2021
LT14.04.2021
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PL14.04.2021
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GR15.07.2021
PT16.08.2021
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FI14.04.2021
HR14.04.2021
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NO14.07.2021
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Cited inInternational search[AD]WO2007093433  (ZEISS CARL SMT AG [DE], et al) [AD] 1-9 * the whole document *;
 [A]US2009115990  (OWA SOICHI [JP], et al) [A] 1-9 * paragraphs [0064] - [0066] - [0071] - [0072]; figures 1, 3A-3E, 5A *;
 [XI]WO2009080231  (ZEISS CARL SMT AG [DE], et al) [X] 1-3,8,12-15 * page 18, line 8 - page 19, line 12; figure 2 * * page 20, line 17 - page 21, line 4 * * page 26, lines 10 - 14 * * page 33, line 17 - page 34, line 3 * [I] 4-7,9;
 [A]DE102009017941  (ZEISS CARL SMT AG [DE]) [A] 1-9 * paragraphs [002 ] - [00 5]; figures 1 - 7 *;
 [A]EP2146248  (ZEISS CARL SMT AG [DE]) [A] 1-9* the whole document *
by applicantEP1262836
 WO2007093433
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.