EP2603975 - MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 23.10.2015 Database last updated on 31.08.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states Teknologian tutkimuskeskus VTT Vuorimiehentie 3 02150 Espoo / FI | [2013/25] | Inventor(s) | 01 /
JAAKKOLA, Antti c/o VTT PL 1000 FI-02044 Vtt / FI | 02 /
PENSALA, Tuomas c/o VTT P.O. Box 1000 FI-02044 Vtt / FI | 03 /
KIIHAMÄKI, Jyrki c/o VTT PL 1000 FI-02044 Vtt / FI | [2013/25] | Representative(s) | Laine IP Oy Porkkalankatu 24 00180 Helsinki / FI | [N/P] |
Former [2014/22] | Seppo Laine Oy Itämerenkatu 3 B 00180 Helsinki / FI | ||
Former [2013/25] | Tiilikainen, Jarkko Tapio Seppo Laine Oy Itämerenkatu 3 B 00180 Helsinki / FI | Application number, filing date | 11816146.2 | 11.08.2011 | WO2011FI50711 | Priority number, date | FI20100005849 | 13.08.2010 Original published format: FI 20105849 | [2013/25] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2012020173 | Date: | 16.02.2012 | Language: | EN | [2012/07] | Type: | A1 Application with search report | No.: | EP2603975 | Date: | 19.06.2013 | Language: | EN | The application published by WIPO in one of the EPO official languages on 16.02.2012 takes the place of the publication of the European patent application. | [2013/25] | Type: | B1 Patent specification | No.: | EP2603975 | Date: | 17.12.2014 | Language: | EN | [2014/51] | Search report(s) | International search report - published on: | FI | 16.02.2012 | (Supplementary) European search report - dispatched on: | EP | 18.07.2013 | Classification | IPC: | H03H3/007, H03H9/24, H03H9/02, H03H9/50 | [2013/34] | CPC: |
H03H3/0072 (EP,US);
H03H9/02433 (FI);
B81C1/00134 (FI);
H03H3/0076 (EP,FI,US);
H03H9/02448 (EP,US);
H03H9/2426 (FI);
H03H9/2436 (FI);
H03H9/2463 (EP,US);
H03H9/505 (EP,US);
|
Former IPC [2013/25] | H03H3/007, H03H9/24, H03H9/02 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/25] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | ARRAY AUS MIKROMECHANISCHEN RESONATOREN UND VERFAHREN ZU SEINER HERSTELLUNG | [2013/25] | English: | MICROMECHANICAL RESONATOR ARRAY AND METHOD FOR MANUFACTURING THEREOF | [2013/25] | French: | RÉSEAU DE RÉSONATEURS MICROMÉCANIQUES ET PROCÉDÉ DE FABRICATION ASSOCIÉ | [2013/25] | Entry into regional phase | 11.03.2013 | National basic fee paid | 11.03.2013 | Search fee paid | 11.03.2013 | Designation fee(s) paid | 11.03.2013 | Examination fee paid | Examination procedure | 11.03.2013 | Amendment by applicant (claims and/or description) | 11.03.2013 | Examination requested [2013/25] | 09.10.2013 | Despatch of a communication from the examining division (Time limit: M04) | 18.02.2014 | Reply to a communication from the examining division | 08.07.2014 | Communication of intention to grant the patent | 05.11.2014 | Fee for grant paid | 05.11.2014 | Fee for publishing/printing paid | 05.11.2014 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 09.10.2013 | Opposition(s) | 18.09.2015 | No opposition filed within time limit [2015/48] | Fees paid | Renewal fee | 23.08.2013 | Renewal fee patent year 03 | 25.08.2014 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 11.08.2011 | AL | 17.12.2014 | AT | 17.12.2014 | BE | 17.12.2014 | BG | 17.12.2014 | CY | 17.12.2014 | CZ | 17.12.2014 | DK | 17.12.2014 | EE | 17.12.2014 | ES | 17.12.2014 | FI | 17.12.2014 | HR | 17.12.2014 | IT | 17.12.2014 | LT | 17.12.2014 | LV | 17.12.2014 | MC | 17.12.2014 | MK | 17.12.2014 | MT | 17.12.2014 | NL | 17.12.2014 | PL | 17.12.2014 | RO | 17.12.2014 | RS | 17.12.2014 | SE | 17.12.2014 | SI | 17.12.2014 | SK | 17.12.2014 | SM | 17.12.2014 | TR | 17.12.2014 | NO | 17.03.2015 | GR | 18.03.2015 | IS | 17.04.2015 | PT | 17.04.2015 | IE | 11.08.2015 | LU | 11.08.2015 | CH | 31.08.2015 | LI | 31.08.2015 | [2018/46] |
Former [2018/31] | HU | 11.08.2011 | |
AT | 17.12.2014 | ||
BE | 17.12.2014 | ||
BG | 17.12.2014 | ||
CY | 17.12.2014 | ||
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
MK | 17.12.2014 | ||
MT | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
SM | 17.12.2014 | ||
TR | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
IE | 11.08.2015 | ||
LU | 11.08.2015 | ||
CH | 31.08.2015 | ||
LI | 31.08.2015 | ||
Former [2017/39] | HU | 11.08.2011 | |
AT | 17.12.2014 | ||
BE | 17.12.2014 | ||
BG | 17.12.2014 | ||
CY | 17.12.2014 | ||
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
MT | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
SM | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
IE | 11.08.2015 | ||
LU | 11.08.2015 | ||
CH | 31.08.2015 | ||
LI | 31.08.2015 | ||
Former [2017/22] | AT | 17.12.2014 | |
BE | 17.12.2014 | ||
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
MT | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
IE | 11.08.2015 | ||
LU | 11.08.2015 | ||
CH | 31.08.2015 | ||
LI | 31.08.2015 | ||
Former [2016/33] | AT | 17.12.2014 | |
BE | 17.12.2014 | ||
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
IE | 11.08.2015 | ||
LU | 11.08.2015 | ||
CH | 31.08.2015 | ||
LI | 31.08.2015 | ||
Former [2016/24] | AT | 17.12.2014 | |
BE | 17.12.2014 | ||
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
LU | 11.08.2015 | ||
CH | 31.08.2015 | ||
LI | 31.08.2015 | ||
Former [2016/22] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
LU | 11.08.2015 | ||
CH | 31.08.2015 | ||
LI | 31.08.2015 | ||
Former [2016/18] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
MC | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
LU | 11.08.2015 | ||
Former [2016/17] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
LU | 11.08.2015 | ||
Former [2016/12] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SI | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
Former [2016/03] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
IT | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
Former [2015/50] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
DK | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
Former [2015/38] | AT | 17.12.2014 | |
CZ | 17.12.2014 | ||
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
IS | 17.04.2015 | ||
PT | 17.04.2015 | ||
Former [2015/37] | CZ | 17.12.2014 | |
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
PL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
SK | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
PT | 17.04.2015 | ||
Former [2015/36] | CZ | 17.12.2014 | |
EE | 17.12.2014 | ||
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
RO | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
PT | 17.04.2015 | ||
Former [2015/35] | EE | 17.12.2014 | |
ES | 17.12.2014 | ||
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
PT | 17.04.2015 | ||
Former [2015/33] | ES | 17.12.2014 | |
FI | 17.12.2014 | ||
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
Former [2015/29] | FI | 17.12.2014 | |
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
NL | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
Former [2015/24] | FI | 17.12.2014 | |
HR | 17.12.2014 | ||
LT | 17.12.2014 | ||
LV | 17.12.2014 | ||
RS | 17.12.2014 | ||
SE | 17.12.2014 | ||
NO | 17.03.2015 | ||
GR | 18.03.2015 | ||
Former [2015/23] | FI | 17.12.2014 | |
LT | 17.12.2014 | ||
NO | 17.03.2015 | ||
Former [2015/21] | LT | 17.12.2014 | |
NO | 17.03.2015 | ||
Former [2015/20] | LT | 17.12.2014 | Cited in | International search | [A]US2006017523 (BHAVE SUNIL A [US], et al); | [A]US7586239 (LI SHENG-SHIAN [US], et al); | [A]WO2009141750 (NXP BV [NL], et al); | [AP]EP2282404 (NXP BV [NL]); | by applicant | US4719383 |