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Extract from the Register of European Patents

EP About this file: EP2625306

EP2625306 - GRID PROVIDING BEAMLET STEERING [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  06.08.2021
Database last updated on 16.11.2024
FormerThe patent has been granted
Status updated on  28.08.2020
FormerGrant of patent is intended
Status updated on  08.06.2020
FormerExamination is in progress
Status updated on  22.12.2017
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
Veeco Instruments Inc.
Terminal Drive
Plainview, NY 11803 / US
[2013/33]
Inventor(s)01 / KAMEYAMA, Ikuya
Veeco Instruments Inc.
Terminal Drive
Plainview
New York 11803 / US
 [2013/33]
Representative(s)Hanna Moore + Curley
Garryard House
25-26 Earlsfort Terrace
Dublin 2, D02 PX51 / IE
[N/P]
Former [2020/40]Hanna Moore + Curley
Garryard House
25/26 Earlsfort Terrace
Dublin 2, D02 PX51 / IE
Former [2013/33]Moore, Barry, et al
Hanna Moore & Curley 13 Lower Lad Lane
Dublin 2 / IE
Application number, filing date11831472.304.10.2011
[2020/40]
WO2011US54800
Priority number, dateUS2010089842405.10.2010         Original published format: US 898424
US2010089828105.10.2010         Original published format: US 898281
US2010089835105.10.2010         Original published format: US 898351
[2013/33]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2012047914
Date:12.04.2012
Language:EN
[2012/15]
Type: A2 Application without search report 
No.:EP2625306
Date:14.08.2013
Language:EN
The application published by WIPO in one of the EPO official languages on 12.04.2012 takes the place of the publication of the European patent application.
[2013/33]
Type: B1 Patent specification 
No.:EP2625306
Date:30.09.2020
Language:EN
[2020/40]
Search report(s)International search report - published on:KR21.06.2012
(Supplementary) European search report - dispatched on:EP08.04.2016
ClassificationIPC:C23C14/46, C23C14/34, H01J27/02, H01J37/08
[2016/19]
CPC:
C23C14/46 (EP); H01J27/024 (EP); H01J37/08 (EP);
H01J2237/0656 (EP); H01J2237/083 (EP); H01J2237/3142 (EP);
H01J2237/3151 (EP); H01J2237/31701 (EP) (-)
Former IPC [2013/33]C23C14/46, C23C14/34
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2013/33]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:GITTER MIT BEAMLET-LENKUNG[2013/33]
English:GRID PROVIDING BEAMLET STEERING[2013/33]
French:GRILLE FOURNISSANT UNE DIRECTION DE PETITS FAISCEAUX[2013/33]
Entry into regional phase08.04.2013National basic fee paid 
08.04.2013Search fee paid 
08.04.2013Designation fee(s) paid 
08.04.2013Examination fee paid 
Examination procedure08.04.2013Examination requested  [2013/33]
14.10.2016Amendment by applicant (claims and/or description)
21.12.2017Despatch of a communication from the examining division (Time limit: M04)
27.04.2018Reply to a communication from the examining division
19.09.2019Despatch of a communication from the examining division (Time limit: M04)
29.01.2020Reply to a communication from the examining division
09.06.2020Communication of intention to grant the patent
19.08.2020Fee for grant paid
19.08.2020Fee for publishing/printing paid
19.08.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  21.12.2017
Opposition(s)01.07.2021No opposition filed within time limit [2021/36]
Fees paidRenewal fee
07.10.2013Renewal fee patent year 03
07.10.2014Renewal fee patent year 04
07.10.2015Renewal fee patent year 05
07.10.2016Renewal fee patent year 06
27.10.2017Renewal fee patent year 07
29.10.2018Renewal fee patent year 08
28.10.2019Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU04.10.2011
AL30.09.2020
AT30.09.2020
CY30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
MK30.09.2020
MT30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SI30.09.2020
SK30.09.2020
SM30.09.2020
TR30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
[2022/32]
Former [2022/27]HU04.10.2011
AL30.09.2020
AT30.09.2020
CY30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
MT30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SI30.09.2020
SK30.09.2020
SM30.09.2020
TR30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2022/26]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SI30.09.2020
SK30.09.2020
SM30.09.2020
TR30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2022/23]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SI30.09.2020
SK30.09.2020
SM30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2022/10]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SI30.09.2020
SK30.09.2020
SM30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
PT01.02.2021
Former [2021/49]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SI30.09.2020
SK30.09.2020
SM30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/48]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
IT30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SK30.09.2020
SM30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/46]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SK30.09.2020
SM30.09.2020
IE04.10.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/37]AL30.09.2020
AT30.09.2020
CZ30.09.2020
DK30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SK30.09.2020
SM30.09.2020
LU04.10.2020
BE31.10.2020
CH31.10.2020
LI31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/36]AL30.09.2020
AT30.09.2020
CZ30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SK30.09.2020
SM30.09.2020
LU04.10.2020
BE31.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/31]AL30.09.2020
AT30.09.2020
CZ30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
MC30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SK30.09.2020
SM30.09.2020
LU04.10.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/28]AL30.09.2020
AT30.09.2020
CZ30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SK30.09.2020
SM30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/25]AL30.09.2020
AT30.09.2020
CZ30.09.2020
EE30.09.2020
ES30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
NL30.09.2020
PL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SM30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
IS30.01.2021
PT01.02.2021
Former [2021/24]AT30.09.2020
CZ30.09.2020
EE30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
NL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SM30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
PT01.02.2021
Former [2021/23]CZ30.09.2020
EE30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
NL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
SM30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
PT01.02.2021
Former [2021/22]CZ30.09.2020
EE30.09.2020
FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
NL30.09.2020
RO30.09.2020
RS30.09.2020
SE30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
PT01.02.2021
Former [2021/21]FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
NL30.09.2020
RS30.09.2020
SE30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
PT01.02.2021
Former [2021/20]FI30.09.2020
HR30.09.2020
LT30.09.2020
LV30.09.2020
RS30.09.2020
SE30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
Former [2021/10]FI30.09.2020
HR30.09.2020
LV30.09.2020
RS30.09.2020
SE30.09.2020
BG30.12.2020
NO30.12.2020
GR31.12.2020
Former [2021/08]FI30.09.2020
SE30.09.2020
BG30.12.2020
NO30.12.2020
Former [2021/07]FI30.09.2020
NO30.12.2020
Documents cited:Search[A]WO2005024881  (ZEISS CARL SMS GMBH [DE], et al) [A] 1-15 * page 3, lines 14-34 * * page 25, line 12 - page 26, line 12 * * figures 12-15 *;
 [A]WO2005038855  (APPLIED MATERIALS INC [US]) [A] 1-15 * page 6, paragraph 13 - page 7, paragraph 18 * * page 7, paragraphs 20-22 ** figures 5-7 *
International search[A]JP2000011905  (JAPAN AVIATION ELECTRON);
 [A]US2007181820  (HWANG SUNG-WOOK [KR], et al);
 [A]US7285788  (LEE YUNG HEE [KR], et al);
 [A]US2008164819  (HWANG SUNG-WOOK [KR], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.