EP2466625 - Exposure apparatus, exposure method, and method for producing device [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 26.02.2016 Database last updated on 02.09.2024 | Most recent event Tooltip | 17.08.2018 | Lapse of the patent in a contracting state New state(s): BG | published on 19.09.2018 [2018/38] | Applicant(s) | For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP | [2015/36] |
Former [2012/25] | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
Nagasaka, Hiroyuki c/o Nikon Corporation 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo 100-8331 / JP | [2012/25] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2015/17] |
Former [2012/25] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastraße 4 81925 München / DE | Application number, filing date | 12159209.1 | 26.02.2004 | [2012/25] | Priority number, date | JP20030049365 | 26.02.2003 Original published format: JP 2003049365 | JP20030110748 | 15.04.2003 Original published format: JP 2003110748 | JP20030320100 | 11.09.2003 Original published format: JP 2003320100 | [2012/25] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2466625 | Date: | 20.06.2012 | Language: | EN | [2012/25] | Type: | A3 Search report | No.: | EP2466625 | Date: | 28.11.2012 | Language: | EN | [2012/48] | Type: | B1 Patent specification | No.: | EP2466625 | Date: | 22.04.2015 | Language: | EN | [2015/17] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 29.10.2012 | Classification | IPC: | H01L21/027, G03F7/20 | [2012/25] | CPC: |
G03F7/70341 (EP,KR,US);
G03F7/2041 (KR);
G03F7/70733 (US);
G03F7/708 (EP,KR,US);
G03F7/7095 (EP,KR,US);
H01L21/0273 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2012/25] | Title | German: | Belichtungsvorrichtung, Belichtungsverfahren und Verfahren zur Herstellung des Geräts | [2012/25] | English: | Exposure apparatus, exposure method, and method for producing device | [2012/25] | French: | Appareil d'exposition, procédé d'exposition et procédé de production du dispositif | [2012/25] | Examination procedure | 13.03.2012 | Examination requested [2012/25] | 24.05.2013 | Amendment by applicant (claims and/or description) | 11.04.2014 | Despatch of a communication from the examining division (Time limit: M04) | 21.08.2014 | Reply to a communication from the examining division | 14.11.2014 | Communication of intention to grant the patent | 12.03.2015 | Fee for grant paid | 12.03.2015 | Fee for publishing/printing paid | 12.03.2015 | Receipt of the translation of the claim(s) | Parent application(s) Tooltip | EP04714910.9 / EP1598855 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20040714910) is 04.03.2010 | Opposition(s) | 25.01.2016 | No opposition filed within time limit [2016/13] | Fees paid | Renewal fee | 13.03.2012 | Renewal fee patent year 03 | 13.03.2012 | Renewal fee patent year 04 | 13.03.2012 | Renewal fee patent year 05 | 13.03.2012 | Renewal fee patent year 06 | 13.03.2012 | Renewal fee patent year 07 | 13.03.2012 | Renewal fee patent year 08 | 13.03.2012 | Renewal fee patent year 09 | 20.02.2013 | Renewal fee patent year 10 | 18.02.2014 | Renewal fee patent year 11 | 18.02.2015 | Renewal fee patent year 12 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 26.02.2004 | AT | 22.04.2015 | BE | 22.04.2015 | BG | 22.04.2015 | CY | 22.04.2015 | CZ | 22.04.2015 | DK | 22.04.2015 | EE | 22.04.2015 | ES | 22.04.2015 | FI | 22.04.2015 | IT | 22.04.2015 | MC | 22.04.2015 | RO | 22.04.2015 | SE | 22.04.2015 | SI | 22.04.2015 | SK | 22.04.2015 | TR | 22.04.2015 | GR | 23.07.2015 | PT | 24.08.2015 | [2018/38] |
Former [2018/33] | HU | 26.02.2004 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
TR | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2018/28] | HU | 26.02.2004 | |
AT | 22.04.2015 | ||
BE | 22.04.2015 | ||
CY | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2017/40] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SE | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/42] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
MC | 22.04.2015 | ||
RO | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/37] | AT | 22.04.2015 | |
BE | 22.04.2015 | ||
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
RO | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/24] | AT | 22.04.2015 | |
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
RO | 22.04.2015 | ||
SI | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/21] | AT | 22.04.2015 | |
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
IT | 22.04.2015 | ||
RO | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/10] | AT | 22.04.2015 | |
CZ | 22.04.2015 | ||
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
RO | 22.04.2015 | ||
SK | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/09] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
EE | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2016/07] | AT | 22.04.2015 | |
DK | 22.04.2015 | ||
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2015/51] | AT | 22.04.2015 | |
ES | 22.04.2015 | ||
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | ||
Former [2015/49] | ES | 22.04.2015 | |
FI | 22.04.2015 | ||
GR | 23.07.2015 | ||
PT | 24.08.2015 | Documents cited: | Search | [A]WO9949504 (NIKON CORP [JP], et al) [A] 1-40 * abstract *; | [A]US3648587 (STEVENS GUY WILLIAM W) [A] 1-40 * column 2, lines 1-35; figure 3 * | by applicant | WO9409504 | JPH06188169 | JP2002014005 | US2002041377 | WO02063664 | JPH10163099 | JPH10214783 | US6341007 | US6400441 | US6549269 | US6590634 | JP2000505958 | US5969441 | US6208407 | US5623853 | US5528118 | JPH08166475 | US5874820 | JPH08330224 |