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Extract from the Register of European Patents

EP About this file: EP2466625

EP2466625 - Exposure apparatus, exposure method, and method for producing device [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  26.02.2016
Database last updated on 02.09.2024
Most recent event   Tooltip17.08.2018Lapse of the patent in a contracting state
New state(s): BG		published on 19.09.2018  [2018/38]
Applicant(s)For all designated states
Nikon Corporation
15-3, Konan 2-chome
Minato-ku
Tokyo 108-6290 / JP
[2015/36]
Former [2012/25]For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / Nagasaka, Hiroyuki
c/o Nikon Corporation
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo 100-8331 / JP
 [2012/25]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2015/17]
Former [2012/25]HOFFMANN EITLE
Patent- und Rechtsanwälte
Arabellastraße 4
81925 München / DE
Application number, filing date12159209.126.02.2004
[2012/25]
Priority number, dateJP2003004936526.02.2003         Original published format: JP 2003049365
JP2003011074815.04.2003         Original published format: JP 2003110748
JP2003032010011.09.2003         Original published format: JP 2003320100
[2012/25]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2466625
Date:20.06.2012
Language:EN
[2012/25]
Type: A3 Search report 
No.:EP2466625
Date:28.11.2012
Language:EN
[2012/48]
Type: B1 Patent specification 
No.:EP2466625
Date:22.04.2015
Language:EN
[2015/17]
Search report(s)(Supplementary) European search report - dispatched on:EP29.10.2012
ClassificationIPC:H01L21/027, G03F7/20
[2012/25]
CPC:
G03F7/70341 (EP,KR,US); G03F7/2041 (KR); G03F7/70733 (US);
G03F7/708 (EP,KR,US); G03F7/7095 (EP,KR,US); H01L21/0273 (KR)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   RO,   SE,   SI,   SK,   TR [2012/25]
TitleGerman:Belichtungsvorrichtung, Belichtungsverfahren und Verfahren zur Herstellung des Geräts[2012/25]
English:Exposure apparatus, exposure method, and method for producing device[2012/25]
French:Appareil d'exposition, procédé d'exposition et procédé de production du dispositif[2012/25]
Examination procedure13.03.2012Examination requested  [2012/25]
24.05.2013Amendment by applicant (claims and/or description)
11.04.2014Despatch of a communication from the examining division (Time limit: M04)
21.08.2014Reply to a communication from the examining division
14.11.2014Communication of intention to grant the patent
12.03.2015Fee for grant paid
12.03.2015Fee for publishing/printing paid
12.03.2015Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP04714910.9  / EP1598855
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20040714910) is  04.03.2010
Opposition(s)25.01.2016No opposition filed within time limit [2016/13]
Fees paidRenewal fee
13.03.2012Renewal fee patent year 03
13.03.2012Renewal fee patent year 04
13.03.2012Renewal fee patent year 05
13.03.2012Renewal fee patent year 06
13.03.2012Renewal fee patent year 07
13.03.2012Renewal fee patent year 08
13.03.2012Renewal fee patent year 09
20.02.2013Renewal fee patent year 10
18.02.2014Renewal fee patent year 11
18.02.2015Renewal fee patent year 12
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU26.02.2004
AT22.04.2015
BE22.04.2015
BG22.04.2015
CY22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
TR22.04.2015
GR23.07.2015
PT24.08.2015
[2018/38]
Former [2018/33]HU26.02.2004
AT22.04.2015
BE22.04.2015
CY22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
TR22.04.2015
GR23.07.2015
PT24.08.2015
Former [2018/28]HU26.02.2004
AT22.04.2015
BE22.04.2015
CY22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2017/40]AT22.04.2015
BE22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SE22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/42]AT22.04.2015
BE22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
MC22.04.2015
RO22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/37]AT22.04.2015
BE22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
RO22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/24]AT22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
RO22.04.2015
SI22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/21]AT22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
IT22.04.2015
RO22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/10]AT22.04.2015
CZ22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
RO22.04.2015
SK22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/09]AT22.04.2015
DK22.04.2015
EE22.04.2015
ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Former [2016/07]AT22.04.2015
DK22.04.2015
ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Former [2015/51]AT22.04.2015
ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Former [2015/49]ES22.04.2015
FI22.04.2015
GR23.07.2015
PT24.08.2015
Documents cited:Search[A]WO9949504  (NIKON CORP [JP], et al) [A] 1-40 * abstract *;
 [A]US3648587  (STEVENS GUY WILLIAM W) [A] 1-40 * column 2, lines 1-35; figure 3 *
by applicantWO9409504
 JPH06188169
 JP2002014005
 US2002041377
 WO02063664
 JPH10163099
 JPH10214783
 US6341007
 US6400441
 US6549269
 US6590634
 JP2000505958
 US5969441
 US6208407
 US5623853
 US5528118
 JPH08166475
 US5874820
 JPH08330224
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.