EP2587530 - Wafer processing laminate, wafer processing member, temporary bonding arrangement, and thin wafer manufacturing method [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 08.01.2016 Database last updated on 19.10.2024 | Most recent event Tooltip | 12.10.2018 | Lapse of the patent in a contracting state New state(s): AL | published on 14.11.2018 [2018/46] | Applicant(s) | For all designated states Shin-Etsu Chemical Co., Ltd. 6-1, Otemachi 2-chome Chiyoda-ku Tokyo / JP | [2013/18] | Inventor(s) | 01 /
Kato, Hideto c/o Silicone-Electronics Materials Research Center Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | 02 /
Sugo, Michihiro c/o Silicone-Electronics Materials Research Center Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | 03 /
Tagami, Shohei c/o Silicone-Electronics Materials Research Center Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | [2013/18] | Representative(s) | Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE | [N/P] |
Former [2015/10] | Ter Meer Steinmeister & Partner Patentanwälte mbB Mauerkircherstrasse 45 81679 München / DE | ||
Former [2013/20] | Ter Meer Steinmeister & Partner Me/bk Mauerkircherstrasse 45 81679 München / DE | Application number, filing date | 12190089.8 | 26.10.2012 | [2013/18] | Priority number, date | JP20110236960 | 28.10.2011 Original published format: JP 2011236960 | [2013/18] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2587530 | Date: | 01.05.2013 | Language: | EN | [2013/18] | Type: | A3 Search report | No.: | EP2587530 | Date: | 12.06.2013 | Language: | EN | [2013/24] | Type: | B1 Patent specification | No.: | EP2587530 | Date: | 04.03.2015 | Language: | EN | [2015/10] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 10.05.2013 | Classification | IPC: | C08G77/52, H01L21/683, C09D183/14, C08G77/12, C08G77/14, C08G77/04, C08L83/14 | [2014/37] | CPC: |
C08G77/04 (EP,US);
H01L21/20 (KR);
C08G77/52 (EP,US);
C08L63/00 (EP,US);
C08L83/14 (EP,US);
C09D183/14 (US);
C09J183/04 (EP,US);
C09J183/14 (EP,US);
H01L21/02 (KR);
H01L21/6835 (EP,US);
C08G77/12 (EP,US);
C08G77/14 (EP,US);
H01L2221/68327 (EP,US);
H01L2221/6834 (EP,US);
H01L2221/68381 (EP,US);
| C-Set: |
C08L83/14, C08L63/00 (EP,US);
C09D183/14, C08L63/00 (US,EP);
C09J183/14, C08L63/00 (US,EP)
|
Former IPC [2013/24] | H01L21/683, C09J7/02 | ||
Former IPC [2013/18] | H01L21/683 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/18] | Title | German: | Waferverarbeitungslaminat, Waferverarbeitungselement, temporäre Bindungsanordnung und Dünnwafer-Herstellungsverfahren | [2013/18] | English: | Wafer processing laminate, wafer processing member, temporary bonding arrangement, and thin wafer manufacturing method | [2013/18] | French: | Stratifié de traitement de plaquettes, élément de traitement de plaquettes, dispositif de liaison temporaire et procédé de fabrication de plaquettes minces | [2013/18] | Examination procedure | 05.12.2013 | Amendment by applicant (claims and/or description) | 05.12.2013 | Examination requested [2014/05] | 02.10.2014 | Communication of intention to grant the patent | 23.01.2015 | Fee for grant paid | 23.01.2015 | Fee for publishing/printing paid | 23.01.2015 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 02.10.2014 | Opposition(s) | 07.12.2015 | No opposition filed within time limit [2016/06] | Fees paid | Renewal fee | 14.10.2014 | Renewal fee patent year 03 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 26.10.2012 | AL | 04.03.2015 | AT | 04.03.2015 | BE | 04.03.2015 | BG | 04.03.2015 | CY | 04.03.2015 | CZ | 04.03.2015 | DK | 04.03.2015 | EE | 04.03.2015 | ES | 04.03.2015 | FI | 04.03.2015 | HR | 04.03.2015 | IT | 04.03.2015 | LT | 04.03.2015 | LV | 04.03.2015 | MC | 04.03.2015 | MK | 04.03.2015 | MT | 04.03.2015 | NL | 04.03.2015 | PL | 04.03.2015 | RO | 04.03.2015 | RS | 04.03.2015 | SE | 04.03.2015 | SI | 04.03.2015 | SK | 04.03.2015 | SM | 04.03.2015 | TR | 04.03.2015 | NO | 04.06.2015 | GR | 05.06.2015 | IS | 04.07.2015 | PT | 06.07.2015 | IE | 26.10.2015 | LU | 26.10.2015 | CH | 31.10.2015 | LI | 31.10.2015 | [2018/46] |
Former [2018/31] | HU | 26.10.2012 | |
AT | 04.03.2015 | ||
BE | 04.03.2015 | ||
BG | 04.03.2015 | ||
CY | 04.03.2015 | ||
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
MC | 04.03.2015 | ||
MK | 04.03.2015 | ||
MT | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
SM | 04.03.2015 | ||
TR | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
IE | 26.10.2015 | ||
LU | 26.10.2015 | ||
CH | 31.10.2015 | ||
LI | 31.10.2015 | ||
Former [2017/38] | HU | 26.10.2012 | |
AT | 04.03.2015 | ||
BE | 04.03.2015 | ||
BG | 04.03.2015 | ||
CY | 04.03.2015 | ||
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
MC | 04.03.2015 | ||
MT | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
SM | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
IE | 26.10.2015 | ||
LU | 26.10.2015 | ||
CH | 31.10.2015 | ||
LI | 31.10.2015 | ||
Former [2016/45] | AT | 04.03.2015 | |
BE | 04.03.2015 | ||
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
MC | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
IE | 26.10.2015 | ||
LU | 26.10.2015 | ||
CH | 31.10.2015 | ||
LI | 31.10.2015 | ||
Former [2016/37] | AT | 04.03.2015 | |
BE | 04.03.2015 | ||
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
MC | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
LU | 26.10.2015 | ||
CH | 31.10.2015 | ||
LI | 31.10.2015 | ||
Former [2016/34] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
MC | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
LU | 26.10.2015 | ||
CH | 31.10.2015 | ||
LI | 31.10.2015 | ||
Former [2016/28] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
MC | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
LU | 26.10.2015 | ||
Former [2016/26] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
LU | 26.10.2015 | ||
Former [2016/12] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SI | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
Former [2016/07] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
DK | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
Former [2016/03] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
IT | 04.03.2015 | ||
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NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
Former [2015/50] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
NL | 04.03.2015 | ||
PL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
IS | 04.07.2015 | ||
PT | 06.07.2015 | ||
Former [2015/49] | AT | 04.03.2015 | |
CZ | 04.03.2015 | ||
EE | 04.03.2015 | ||
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
NL | 04.03.2015 | ||
RO | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
SK | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
PT | 06.07.2015 | ||
Former [2015/41] | AT | 04.03.2015 | |
ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
LT | 04.03.2015 | ||
LV | 04.03.2015 | ||
NL | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
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ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
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LV | 04.03.2015 | ||
RS | 04.03.2015 | ||
SE | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
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ES | 04.03.2015 | ||
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
LT | 04.03.2015 | ||
SE | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
Former [2015/37] | ES | 04.03.2015 | |
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
LT | 04.03.2015 | ||
SE | 04.03.2015 | ||
NO | 04.06.2015 | ||
GR | 05.06.2015 | ||
Former [2015/36] | ES | 04.03.2015 | |
FI | 04.03.2015 | ||
HR | 04.03.2015 | ||
LT | 04.03.2015 | ||
SE | 04.03.2015 | ||
NO | 04.06.2015 | ||
Former [2015/35] | ES | 04.03.2015 | |
LT | 04.03.2015 | ||
NO | 04.06.2015 | ||
Former [2015/33] | ES | 04.03.2015 | Documents cited: | Search | [A]EP1496547 (NITTO DENKO CORP [JP]) [A] 1-12 * figure 4 * * paragraphs [0012] , [0 18] - [0022] * * claim 1 *; | [A]US2008226884 (SIM CHANG-HOON [KR], et al) [A] 1-12 * figure 2 * * paragraphs [0021] , [0 25] , [0 75] - [0082] *; | [A]US2010330780 (HWANG YONG HA [KR], et al) [A] 1-12 * figures 3, 4 * * paragraphs [0032] , [0 57] , [0 70] , [0 71] , [0 88] , [ 116] , [ 1138] *; | [AP]US2012034437 (PULIGADDA RAMA [US], et al) [AP] 1-12 * figure 5 ** paragraphs [0075] , [0 87] - [0090] - [0 92] * | by applicant | JP2004064040 | EP1550156 | JP2006328104 | US7534498 | US7541264 |