EP2686877 - METHOD FOR PLASMA DICING A SEMI-CONDUCTOR WAFER [Right-click to bookmark this link] | |||
Former [2014/04] | METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER | ||
[2019/21] | Status | No opposition filed within time limit Status updated on 10.07.2020 Database last updated on 31.08.2024 | |
Former | The patent has been granted Status updated on 05.07.2019 | ||
Former | Grant of patent is intended Status updated on 02.05.2019 | ||
Former | Examination is in progress Status updated on 23.02.2018 | Most recent event Tooltip | 08.07.2022 | Lapse of the patent in a contracting state New state(s): MK | published on 10.08.2022 [2022/32] | Applicant(s) | For all designated states Plasma-Therm, LLC 10050 16th Street North St. Petersburg, FL 33716 / US | [2014/04] | Inventor(s) | 01 /
WESTERMAN, Russell 3610 Swans Landing Drive Land O'lakes, FL 34639 / US | 02 /
JOHNSON, David 110 Asa Dorsey Road Cleveland, GA 30528 / US | 03 /
JOHNSON, Chris 5973 50th Avenue North St. Petersburg, FL 33709 / US | 04 /
PAYS-VOLARD, David 5146 15th Street North St. Petersburg, FL 33703 / US | 05 /
MARTINEZ, Linnell 6244 Alamanda Hills Blvd. Lakeland, FL 33813 / US | 06 /
Gordon, Grivna 565 W. Laguna Azul Mesa, AZ 85210 / US | [2014/21] |
Former [2014/04] | 01 /
WESTERMAN, Russell 3610 Swans Landing Drive Land O'lakes, FL 34639 / US | ||
02 /
JOHNSON, David 110 Asa Dorsey Road Cleveland, GA 30528 / US | |||
03 /
JOHNSON, Chris 5973 50th Avenue North St. Petersburg, FL 33709 / US | |||
04 /
PAYS-VOLARD, David 5146 15th Street North St. Petersburg, FL 33703 / US | |||
05 /
MARTINEZ, Linnell 6244 Alamanda Hills Blvd. Lakeland, FL 33813 / US | Representative(s) | Raunecker, Klaus Peter Lorenz & Kollegen Patentanwälte Partnerschaftsgesellschaft mbB Alte Ulmer Straße 2 89522 Heidenheim / DE | [2019/32] |
Former [2014/04] | Raunecker, Klaus Peter Lorenz & Kollegen Patentanwälte Partnerschaftsgesellschaft Alte Ulmer Straße 2 89522 Heidenheim / DE | Application number, filing date | 12719486.8 | 12.03.2012 | [2019/32] | WO2012US28771 | Priority number, date | US201161452450P | 14.03.2011 Original published format: US 201161452450 P | US201213412119 | 05.03.2012 Original published format: US201213412119 | [2014/04] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2012125560 | Date: | 20.09.2012 | Language: | EN | [2012/38] | Type: | A2 Application without search report | No.: | EP2686877 | Date: | 22.01.2014 | Language: | EN | The application published by WIPO in one of the EPO official languages on 20.09.2012 takes the place of the publication of the European patent application. | [2014/04] | Type: | B1 Patent specification | No.: | EP2686877 | Date: | 07.08.2019 | Language: | EN | [2019/32] | Search report(s) | International search report - published on: | EP | 04.07.2013 | (Supplementary) European search report - dispatched on: | EP | 20.06.2018 | Classification | IPC: | H01L21/78, H01L21/3065, H01L21/67, H01L21/683, H01L21/687, H01J37/32 | [2019/21] | CPC: |
H01J37/32623 (EP,US);
H01L21/78 (EP,CN,US);
H01J37/321 (EP,CN,US);
H01J37/32155 (EP,US);
H01J37/32642 (EP,CN,US);
H01J37/32651 (EP,US);
H01J37/32724 (EP,US);
H01L21/3065 (EP,CN,US);
H01L21/30655 (EP,CN,US);
H01L21/67069 (EP,CN,US);
H01L21/68 (US);
H01L21/6831 (EP,CN,US);
H01L21/6833 (US);
H01L21/68735 (EP,CN,US);
H01L21/68742 (EP,CN,US);
H01J37/32422 (EP,CN,US);
H01L21/31116 (US);
H01L21/67739 (EP,US);
|
Former IPC [2018/17] | H01L21/3065, H01L21/78, H01L21/683, H01L21/687, H01L21/67, H01J37/32 | ||
Former IPC [2014/04] | H01L21/3065, H01L21/683, H01L21/687, H01L21/67, H01L21/78, H01J37/32 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2014/04] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | VERFAHREN FÜR PLASMA-SCHNEIDEN EINES HALBLEITERWAFERS | [2019/21] | English: | METHOD FOR PLASMA DICING A SEMI-CONDUCTOR WAFER | [2019/21] | French: | PROCÉDÉ POUR DÉCOUPER AU PLASMA UNE TRANCHE SEMI-CONDUCTRICE | [2019/21] |
Former [2014/04] | VERFAHREN UND VORRICHTUNG FÜR PLASMA-SCHNEIDEN EINES HALBLEITERWAFERS | ||
Former [2014/04] | METHOD AND APPARATUS FOR PLASMA DICING A SEMI-CONDUCTOR WAFER | ||
Former [2014/04] | PROCÉDÉ ET APPAREIL POUR DÉCOUPER AU PLASMA UNE TRANCHE SEMI-CONDUCTRICE | Entry into regional phase | 10.10.2013 | National basic fee paid | 10.10.2013 | Designation fee(s) paid | 10.10.2013 | Examination fee paid | Examination procedure | 10.10.2013 | Examination requested [2014/04] | 14.10.2014 | Amendment by applicant (claims and/or description) | 20.06.2018 | Despatch of a communication from the examining division to which search results under Rule 164(2) EPC are annexed (Time limit: M04) [2018/30] | 20.06.2018 | Despatch of a communication from the examining division (Time limit: M04) | 02.10.2018 | Reply to a communication from the examining division | 03.05.2019 | Communication of intention to grant the patent | 25.06.2019 | Fee for grant paid | 25.06.2019 | Fee for publishing/printing paid | 25.06.2019 | Receipt of the translation of the claim(s) | Divisional application(s) | EP13188079.1 / EP2698812 | EP13188081.7 / EP2698813 | EP13188082.5 / EP2698814 | EP13188083.3 / EP2698815 | EP13188085.8 / EP2698816 | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 20.06.2018 | Opposition(s) | 03.06.2020 | No opposition filed within time limit [2020/33] | Fees paid | Renewal fee | 12.03.2014 | Renewal fee patent year 03 | 10.03.2015 | Renewal fee patent year 04 | 10.03.2016 | Renewal fee patent year 05 | 10.03.2017 | Renewal fee patent year 06 | 13.03.2018 | Renewal fee patent year 07 | 13.03.2019 | Renewal fee patent year 08 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 12.03.2012 | AL | 07.08.2019 | AT | 07.08.2019 | CY | 07.08.2019 | CZ | 07.08.2019 | DK | 07.08.2019 | EE | 07.08.2019 | ES | 07.08.2019 | FI | 07.08.2019 | HR | 07.08.2019 | IT | 07.08.2019 | LT | 07.08.2019 | LV | 07.08.2019 | MC | 07.08.2019 | MK | 07.08.2019 | MT | 07.08.2019 | NL | 07.08.2019 | PL | 07.08.2019 | RO | 07.08.2019 | RS | 07.08.2019 | SE | 07.08.2019 | SI | 07.08.2019 | SK | 07.08.2019 | SM | 07.08.2019 | TR | 07.08.2019 | BG | 07.11.2019 | NO | 07.11.2019 | GR | 08.11.2019 | IS | 07.12.2019 | PT | 09.12.2019 | IE | 12.03.2020 | LU | 12.03.2020 | BE | 31.03.2020 | [2022/32] |
Former [2022/27] | HU | 12.03.2012 | |
AL | 07.08.2019 | ||
AT | 07.08.2019 | ||
CY | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
MC | 07.08.2019 | ||
MT | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SI | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
IE | 12.03.2020 | ||
LU | 12.03.2020 | ||
BE | 31.03.2020 | ||
Former [2021/12] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
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LT | 07.08.2019 | ||
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MC | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SI | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
IE | 12.03.2020 | ||
LU | 12.03.2020 | ||
BE | 31.03.2020 | ||
Former [2021/08] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
MC | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SI | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
IE | 12.03.2020 | ||
LU | 12.03.2020 | ||
Former [2021/04] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
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HR | 07.08.2019 | ||
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LT | 07.08.2019 | ||
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MC | 07.08.2019 | ||
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PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SI | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
LU | 12.03.2020 | ||
Former [2020/49] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
MC | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SI | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/37] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SI | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/36] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/27] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SK | 07.08.2019 | ||
SM | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
PT | 09.12.2019 | ||
IS | 24.02.2020 | ||
Former [2020/25] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
CZ | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
SK | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
PT | 09.12.2019 | ||
IS | 24.02.2020 | ||
Former [2020/24] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
PT | 09.12.2019 | ||
IS | 24.02.2020 | ||
Former [2020/23] | AL | 07.08.2019 | |
AT | 07.08.2019 | ||
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
IT | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
PL | 07.08.2019 | ||
RO | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/22] | AL | 07.08.2019 | |
DK | 07.08.2019 | ||
EE | 07.08.2019 | ||
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/17] | AL | 07.08.2019 | |
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
TR | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/15] | AL | 07.08.2019 | |
ES | 07.08.2019 | ||
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/12] | ES | 07.08.2019 | |
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
IS | 07.12.2019 | ||
PT | 09.12.2019 | ||
Former [2020/11] | ES | 07.08.2019 | |
FI | 07.08.2019 | ||
HR | 07.08.2019 | ||
LT | 07.08.2019 | ||
LV | 07.08.2019 | ||
NL | 07.08.2019 | ||
RS | 07.08.2019 | ||
SE | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
GR | 08.11.2019 | ||
PT | 09.12.2019 | ||
Former [2020/10] | FI | 07.08.2019 | |
LT | 07.08.2019 | ||
NL | 07.08.2019 | ||
SE | 07.08.2019 | ||
BG | 07.11.2019 | ||
NO | 07.11.2019 | ||
PT | 09.12.2019 | ||
Former [2020/09] | FI | 07.08.2019 | |
LT | 07.08.2019 | ||
NL | 07.08.2019 | ||
NO | 07.11.2019 | ||
Former [2020/08] | LT | 07.08.2019 | |
NO | 07.11.2019 | Documents cited: | Search | [A]US2010216313 (IWAI TETSUHIRO [JP]) [A] 1-5 * paragraphs [0006] - [0008] - [0037] - [0047] - [0059] , [0062] , [0065] - [0067] - [0073]; figures 1-5 *; | [A]US2010048001 (HARIKAI ATSUSHI [JP], et al) [A] 1-5 * paragraphs [0105] - [0123] - [0139] - [0142]; figures 5,7-10 *; | [A]US6071822 (DONOHUE JOHN F [US], et al) [A] 1-5 * the whole document *; | [A]US2007262420 (ARITA KIYOSHI [JP]) [A] 1-5 * paragraphs [0135] - [0138]; figures 5,6 * * paragraphs [0153] - [0157]; figures 8,9 * | International search | [XI]US2010216313 (IWAI TETSUHIRO [JP]) [X] 1-4,7,26,27,30 * paragraphs [0006] - [0008] - [0037] - [0047] - [0059] , [0062] , [0065] - [0067] - [0073]; figures 1-5 * [I] 5,31; | [XDI]US2010048001 (HARIKAI ATSUSHI [JP], et al) [XD] 1-4,7,26,27,30 * paragraphs [0105] - [0123] - [0139] - [0142]; figures 5,7-10 * [I] 5,31 | Examination | US2010216313 | US2010048001 | US6071822 | US2007262420 | by applicant | US6642127 | US2010048001 | US6982175 | US7101805 | US7150796 |