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Extract from the Register of European Patents

EP About this file: EP2676366

EP2676366 - NOVEL MICROMECHANICAL DEVICES [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 08.10.2021 Database last updated on 05.10.2024
Former	The patent has been granted Status updated on 30.10.2020
Former	Grant of patent is intended Status updated on 28.06.2020
Former	Examination is in progress Status updated on 19.12.2016
Most recent event Tooltip	06.09.2024	Lapse of the patent in a contracting state New state(s): MT	published on 09.10.2024 [2024/41]
Applicant(s)	For all designated states Teknologian tutkimuskeskus VTT Oy Vuorimiehentie 3 02150 Espoo / FI
	[N/P]
Former [2016/45]	For all designated states Teknologian tutkimuskeskus VTT Oy Vuorimiehentie 3 02150 Espoo / FI
Former [2013/52]	For all designated states Teknologian Tutki Muskeskus VTT. Vuorimiehentie 3 02044 Vtt / FI
Inventor(s)	01 / PENSALA, Tuomas VTT P.O. Box 1000 FI-02044 VTT / FI
	02 / JAAKKOLA, Antti VTT P.O. Box 1000 FI-02044 VTT / FI
	03 / GANCHENKOVA, Maria Aalto University School of Science and Technology PL 11100 FI-AALTO 00076 / FI
	04 / PRUNNILA, Mika VTT P.O. Box 1000 FI-02044 VTT / FI
	05 / KIIHAMÄKI, Jyrki VTT P.O. Box 1000 FI-02044 VTT / FI
	[2013/52]
Representative(s)	Laine IP Oy Porkkalankatu 24 00180 Helsinki / FI
	[2020/49]
Former [2014/41]	Seppo Laine Oy Itämerenkatu 3 B 00180 Helsinki / FI
Former [2013/52]	Luoto, Kristian Reinhold Seppo Laine Oy Itämerenkatu 3 B 00180 Helsinki / FI
Application number, filing date	12747759.4	17.02.2012
	[2020/49]
	WO2012FI50157
Priority number, date	FI20110005151	17.02.2011 Original published format: FI 20115151
	US201161443725P	17.02.2011 Original published format: US 201161443725 P
	[2013/52]
Filing language	EN
Procedural language	EN
Publication	Type:	A1 Application with search report
	No.:	WO2012110708
	Date:	23.08.2012
	Language:	EN
	[2012/34]
	Type:	A1 Application with search report
	No.:	EP2676366
	Date:	25.12.2013
	Language:	EN
	The application published by WIPO in one of the EPO official languages on 23.08.2012 takes the place of the publication of the European patent application.
	[2013/52]
	Type:	B1 Patent specification
	No.:	EP2676366
	Date:	02.12.2020
	Language:	EN
	[2020/49]
Search report(s)	International search report - published on:	FI	23.08.2012
	(Supplementary) European search report - dispatched on:	EP	09.07.2014
Classification	IPC:	H03H9/02, H03H3/007, B81B3/00, // H03H9/24	[2020/28]
	CPC:	H03H9/02448 (EP,FI,KR,US); B81B3/0081 (FI); B81B3/0078 (EP,KR,US); H03H3/0072 (FI,KR,US); H03H3/0076 (EP,FI,KR,US); H03H9/2405 (FI,KR,US); (+) H03H9/2447 (EP,FI,US); B81B2201/0271 (EP,US); H03H2009/02503 (EP,US); H03H2009/02519 (EP,US); H03H2009/241 (EP,US); H03H2009/2442 (EP,US); Y10T29/42 (EP,US) (-)
	Former IPC [2016/37]	H03H9/02, H03H3/007, B81B3/00, H01L41/18, // H03H9/24
	Former IPC [2014/32]	H03H9/02, H03H3/007, B81B3/00, // H03H9/24
	Former IPC [2013/52]	H03H9/02, H03H3/007, B81B3/00
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/52]
Extension states	BA	Not yet paid
	ME	Not yet paid
Title	German:	NEUE MIKROMECHANISCHE VORRICHTUNGEN	[2013/52]
	English:	NOVEL MICROMECHANICAL DEVICES	[2013/52]
	French:	NOUVEAUX DISPOSITIFS MICROMÉCANIQUES	[2013/52]
Entry into regional phase	13.09.2013	National basic fee paid
	13.09.2013	Search fee paid
	13.09.2013	Designation fee(s) paid
	13.09.2013	Examination fee paid
Examination procedure	13.09.2013	Examination requested [2013/52]
	24.03.2015	Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time
	20.05.2015	Amendment by applicant (claims and/or description)
	16.08.2016	Despatch of a communication from the examining division (Time limit: M04)
	16.12.2016	Reply to a communication from the examining division
	17.10.2019	Despatch of a communication from the examining division (Time limit: M04)
	05.02.2020	Reply to a communication from the examining division
	29.06.2020	Communication of intention to grant the patent
	26.10.2020	Fee for grant paid
	26.10.2020	Fee for publishing/printing paid
	26.10.2020	Receipt of the translation of the claim(s)
Divisional application(s)	The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 16.08.2016
Opposition(s)	03.09.2021	No opposition filed within time limit [2021/45]
Request for further processing for:	The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report
	20.05.2015	Request for further processing filed
	20.05.2015	Full payment received (date of receipt of payment) Request granted
	03.06.2015	Decision despatched
Fees paid	Renewal fee
	20.02.2014	Renewal fee patent year 03
	23.02.2015	Renewal fee patent year 04
	22.02.2016	Renewal fee patent year 05
	17.02.2017	Renewal fee patent year 06
	22.02.2018	Renewal fee patent year 07
	21.02.2019	Renewal fee patent year 08
	24.02.2020	Renewal fee patent year 09
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	17.02.2012
	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	MK	02.12.2020
	MT	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	TR	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
	[2024/41]
Former [2024/29]	HU	17.02.2012
	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	MK	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	TR	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2024/22]	HU	17.02.2012
	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	MK	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2023/27]	HU	17.02.2012
	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2023/24]	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2022/34]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	BE	28.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2022/23]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2022/10]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2022/07]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	IE	17.02.2021
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/51]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/49]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/48]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/47]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	LU	17.02.2021
	CH	28.02.2021
	LI	28.02.2021
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/45]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/42]	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/41]	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/37]	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/36]	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/35]	CZ	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/34]	CZ	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/33]	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/32]	FI	02.12.2020
	HR	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/30]	FI	02.12.2020
	HR	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/28]	FI	02.12.2020
	HR	02.12.2020
	LV	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/25]	FI	02.12.2020
	LV	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/24]	FI	02.12.2020
	LV	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/23]	FI	02.12.2020
	LV	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	NO	02.03.2021
	GR	03.03.2021
Former [2021/22]	FI	02.12.2020
	RS	02.12.2020
	NO	02.03.2021
Former [2021/20]	FI	02.12.2020
Cited in	International search	[A]US2007262831 (VAN BEEK JOZEF THOMAS M [NL], et al);
	by applicant	US4358745
		US4719383
		US7145402
		US2010127596
		FI20105849
		FI20105851
		WO2010FI50935

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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