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EP2764408
European procedure
Extract from the Register of European Patents
EP Citations: EP2764408
| Cited in | International search | Type: | Patent literature | Publication No.: | EP0320297
[A] (CANON KK [JP]) [A] 1,37,38,41,45,53 * abstract * * figure 2B * * column 1, line 5 - line 12 * * column 3, line 31 - column 4, line 22 *; | Type: | Patent literature | Publication No.: | EP0360529
[A] (TOTO LTD [JP]) [A] 1,37,38,41,45,53 * abstract * * figure 1 * * column 1, line 1 - line 3 * * column 2, line 43 - column 3, line 32 *; | Type: | Patent literature | Publication No.: | EP0439000
[A] (APPLIED MATERIALS INC [US]) [A] 1,37,38,41,45,53 * abstract * * page 2, line 3 - line 5 ** page 5, line 28 - page 6, line 36 *; | Type: | Patent literature | Publication No.: | WO9220093
[XAI] (IBM [US]) [X] 1,2,5-9,26,28,30 * abstract * * figure 1 * * page 1, line 3 - line 15 * * page 4, line 12 - page 7, line 24 * [A] 37,38,41,45,53 [I] 4,10-18,20-25,27,29,39,40; | Type: | Patent literature | Publication No.: | JPH08172123
[A] (HITACHI LTD) [A] 1,37,38,41,45,53 * abstract * * figure 1 *; | Type: | Patent literature | Publication No.: | US6084938
[A] (HARA SHINICHI [JP], et al) [A] 1,37,38,41,45,53 * abstract * * figure 1 * * column 1, lines 8,9 * * column 4, line 50 - line 60 *; | Type: | Patent literature | Publication No.: | EP1359466
[A] (ASML NETHERLANDS BV [NL]) [A] 1,37,38,41,45,53 * abstract * * figures 1,4 * * paragraphs [0001] , [0054] *; | Type: | Patent literature | Publication No.: | US2005211694
[A] (MOROZ PAUL [US]) [A] 1,37,38,41,45,53 * abstract * * figure 1 * * paragraphs [0002] , [0027] - [0034] *; | Type: | Patent literature | Publication No.: | US2009207392
[A] (RIJPMA ALBERT PIETER [NL], et al) [A] 1,37,38,41,45,53 * abstract * * figure 4 * * paragraphs [0002] , [0071] - [0078] - [0082] , [0090] , [0091] , [0095] * | Cited in | Examination | Type: | Patent literature | Publication No.: | US2005134828
| Type: | Patent literature | Publication No.: | JP2002231799
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