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Extract from the Register of European Patents

EP About this file: EP2737112

EP2737112 - DIAMOND SEMICONDUCTOR MANUFACTURING METHOD [Right-click to bookmark this link]
Former [2014/23]DIAMOND SEMICONDUCTOR SYSTEM AND METHOD
[2019/35]
StatusNo opposition filed within time limit
Status updated on  01.01.2021
Database last updated on 11.09.2024
FormerThe patent has been granted
Status updated on  24.01.2020
FormerGrant of patent is intended
Status updated on  15.09.2019
FormerExamination is in progress
Status updated on  17.11.2017
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
Akhan Technologies, Inc.
2300 Barrington Road
Suite 400
Hoffman Estates, Illinois 60195 / US
[2014/23]
Inventor(s)01 / KHAN, Adam
255 King St. 1406
San Francisco, California 94107 / US
 [2014/23]
Representative(s)Abel & Imray LLP
Westpoint Building
James Street West
Bath BA1 2DA / GB
[N/P]
Former [2020/09]Abel & Imray
Westpoint Building
James Street West
Bath BA1 2DA / GB
Former [2014/23]Pearson, James Ginn
Abel & Imray 20 Red Lion Street
London WC1R 4PQ / GB
Application number, filing date12820625.720.07.2012
[2020/09]
WO2012US47673
Priority number, dateUS201161513569P30.07.2011         Original published format: US 201161513569 P
US20111327346714.10.2011         Original published format: US201113273467
[2014/23]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2013019435
Date:07.02.2013
Language:EN
[2013/06]
Type: A1 Application with search report 
No.:EP2737112
Date:04.06.2014
Language:EN
The application published by WIPO in one of the EPO official languages on 07.02.2013 takes the place of the publication of the European patent application.
[2014/23]
Type: B1 Patent specification 
No.:EP2737112
Date:26.02.2020
Language:EN
[2020/09]
Search report(s)International search report - published on:RU07.02.2013
(Supplementary) European search report - dispatched on:EP25.02.2015
ClassificationIPC:C30B29/04, C30B31/00, H01L21/04, H01L29/16
[2015/13]
CPC:
H01L21/0415 (EP,US); H01L21/0405 (KR,US); H01L21/22 (KR,US);
H01L29/1602 (EP,KR,US); H01L29/6603 (EP,KR,US); H01L29/868 (EP,KR,US);
H01L2924/0002 (EP,US) (-)
C-Set:
H01L2924/0002, H01L2924/00 (EP,US)
Former IPC [2014/23]C30B29/04, C30B31/00
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2014/23]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:DIAMANTHALBLEITERSVERFAHREN[2019/35]
English:DIAMOND SEMICONDUCTOR MANUFACTURING METHOD[2019/35]
French:PROCÉDÉ DE FABRICATION D'UN SEMI-CONDUCTEUR À DIAMANT[2019/35]
Former [2014/23]DIAMANTHALBLEITERSYSTEM UND VERFAHREN DAFÜR
Former [2014/23]DIAMOND SEMICONDUCTOR SYSTEM AND METHOD
Former [2014/23]SYSTÈME À SEMI-CONDUCTEURS DIAMANTS ET PROCÉDÉ CORRESPONDANT
Entry into regional phase28.02.2014National basic fee paid 
28.02.2014Search fee paid 
28.02.2014Designation fee(s) paid 
28.02.2014Examination fee paid 
Examination procedure28.02.2014Examination requested  [2014/23]
03.11.2015Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time
13.01.2016Amendment by applicant (claims and/or description)
15.11.2017Despatch of a communication from the examining division (Time limit: M06)
25.05.2018Reply to a communication from the examining division
26.03.2019Despatch of a communication from the examining division (Time limit: M04)
18.07.2019Reply to a communication from the examining division
16.09.2019Communication of intention to grant the patent
21.01.2020Fee for grant paid
21.01.2020Fee for publishing/printing paid
21.01.2020Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  15.11.2017
Opposition(s)27.11.2020No opposition filed within time limit [2021/05]
Request for further processing for:The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report
13.01.2016Request for further processing filed
13.01.2016Full payment received (date of receipt of payment)
Request granted
18.02.2016Decision despatched
Fees paidRenewal fee
30.10.2014Renewal fee patent year 03
22.01.2016Renewal fee patent year 04
28.07.2016Renewal fee patent year 05
28.07.2017Renewal fee patent year 06
31.07.2018Renewal fee patent year 07
26.07.2019Renewal fee patent year 08
Penalty fee
Additional fee for renewal fee
31.07.201403   M06   Fee paid on   30.10.2014
31.07.201504   M06   Fee paid on   22.01.2016
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU20.07.2012
AL26.02.2020
AT26.02.2020
CY26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
MK26.02.2020
MT26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
TR26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
IE20.07.2020
LU20.07.2020
BE31.07.2020
CH31.07.2020
FR31.07.2020
LI31.07.2020
[2022/31]
Former [2022/30]HU20.07.2012
AL26.02.2020
AT26.02.2020
CY26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
MT26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
TR26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
IE20.07.2020
LU20.07.2020
BE31.07.2020
CH31.07.2020
FR31.07.2020
LI31.07.2020
Former [2022/27]HU20.07.2012
AT26.02.2020
CY26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
MT26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
TR26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
IE20.07.2020
LU20.07.2020
BE31.07.2020
CH31.07.2020
FR31.07.2020
LI31.07.2020
Former [2022/26]AT26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
TR26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
IE20.07.2020
LU20.07.2020
BE31.07.2020
CH31.07.2020
FR31.07.2020
LI31.07.2020
Former [2021/37]AT26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
IE20.07.2020
LU20.07.2020
BE31.07.2020
CH31.07.2020
FR31.07.2020
LI31.07.2020
Former [2021/23]AT26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
LU20.07.2020
BE31.07.2020
CH31.07.2020
FR31.07.2020
LI31.07.2020
Former [2021/20]AT26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
LU20.07.2020
CH31.07.2020
LI31.07.2020
Former [2021/13]AT26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
MC26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
Former [2021/10]AT26.02.2020
CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
IT26.02.2020
LT26.02.2020
LV26.02.2020
NL26.02.2020
PL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SI26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
Former [2020/50]CZ26.02.2020
DK26.02.2020
EE26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
LT26.02.2020
LV26.02.2020
NL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
Former [2020/49]CZ26.02.2020
DK26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
LT26.02.2020
LV26.02.2020
NL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SK26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
Former [2020/48]DK26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
LT26.02.2020
LV26.02.2020
NL26.02.2020
RO26.02.2020
RS26.02.2020
SE26.02.2020
SM26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
PT19.07.2020
Former [2020/47]DK26.02.2020
ES26.02.2020
FI26.02.2020
HR26.02.2020
LT26.02.2020
LV26.02.2020
NL26.02.2020
RS26.02.2020
SE26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
Former [2020/45]FI26.02.2020
HR26.02.2020
LV26.02.2020
NL26.02.2020
RS26.02.2020
SE26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
Former [2020/40]FI26.02.2020
HR26.02.2020
LV26.02.2020
RS26.02.2020
SE26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
IS26.06.2020
Former [2020/39]FI26.02.2020
HR26.02.2020
LV26.02.2020
RS26.02.2020
SE26.02.2020
BG26.05.2020
NO26.05.2020
GR27.05.2020
Former [2020/38]FI26.02.2020
HR26.02.2020
LV26.02.2020
RS26.02.2020
SE26.02.2020
NO26.05.2020
GR27.05.2020
Former [2020/37]FI26.02.2020
HR26.02.2020
LV26.02.2020
RS26.02.2020
SE26.02.2020
NO26.05.2020
Former [2020/35]FI26.02.2020
NO26.05.2020
Documents cited:Search[I]US5600156  (NISHIBAYASHI YOSHIKI [JP], et al) [I] 1-4 * the whole document *;
 [A]WO2006117621  (ELEMENT SIX LTD [GB], et al) [A] 1-15* the whole document *;
 [Y]US7368317  (MARIE CHEVALLIER JACQUES PAUL [FR], et al) [Y] 5-15 * the whole document *;
 [Y]  - PRINS J F, "ION IMPLANTATION OF DIAMOND FOR ELECTRONIC APPLICATIONS", SEMICONDUCTOR SCIENCE AND TECHNOLOGY, IOP PUBLISHING LTD, GB, (20030301), vol. 18, no. 3, doi:10.1088/0268-1242/18/3/304, ISSN 0268-1242, pages S27 - S33, XP001169933 [Y] 5-15 * the whole document *

DOI:   http://dx.doi.org/10.1088/0268-1242/18/3/304
International search[A]JPH0648715  (MATSUSHITA ELECTRIC IND CO LTD);
 [X]US5600156  (NISHIBAYASHI YOSHIKI [JP], et al);
 [A]US5653800  (KUCHEROV YAN R [US], et al);
 [Y]WO2008019404  (AKHAN TECHNOLOGIES INC [US], et al);
 [X]US7368317  (MARIE CHEVALLIER JACQUES PAUL [FR], et al);
 [A]JP2010189208  (NIPPON TELEGRAPH & TELEPHONE);
 [X]US7981721  (SCARSBROOK GEOFFREY ALAN [GB], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.