EP2613192 - Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 02.09.2016 Database last updated on 09.09.2024 | Most recent event Tooltip | 17.08.2018 | Lapse of the patent in a contracting state New state(s): BG | published on 19.09.2018 [2018/38] | Applicant(s) | For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP | [2015/36] |
Former [2013/28] | For all designated states Nikon Corporation 12-1, Yurakucho 1-chome Chiyoda-ku Tokyo 100-8331 / JP | Inventor(s) | 01 /
Binnard, Michael 2444 Coronet Boulevard Belmont, CA 94000 / US | [2013/28] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2015/44] |
Former [2013/28] | HOFFMANN EITLE Patent- und Rechtsanwälte Arabellastrasse 4 81925 München / DE | Application number, filing date | 13154183.1 | 17.03.2004 | [2013/28] | Priority number, date | US20030462499P | 11.04.2003 Original published format: US 462499 P | [2013/28] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2613192 | Date: | 10.07.2013 | Language: | EN | [2013/28] | Type: | A3 Search report | No.: | EP2613192 | Date: | 11.06.2014 | Language: | EN | [2014/24] | Type: | B1 Patent specification | No.: | EP2613192 | Date: | 28.10.2015 | Language: | EN | [2015/44] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 09.05.2014 | Classification | IPC: | G03B27/32, G03B27/42, G03B27/58, G03F7/20, G03B27/52 | [2013/28] | CPC: |
G03F7/70341 (EP,KR,US);
G03B27/52 (EP,KR,US);
G03F7/20 (KR);
G03F7/2012 (KR);
G03F7/2041 (KR);
G03F7/2055 (KR);
G03F7/2063 (KR);
G03F7/30 (KR);
G03F7/70716 (EP,KR,US);
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR [2015/44] |
Former [2013/28] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PL, PT, RO, SE, SI, SK, TR | Title | German: | Vorrichtung und Verfahren zur Erhaltung von Immersionsflüssigkeit in der Spalte unter einer Projektionslinse während des Waferaustauschs in einer Immersionslithografiemaschine | [2013/28] | English: | Apparatus and method for maintaining immersion fluid in the gap under the projection lens during wafer exchange in an immersion lithography machine | [2013/28] | French: | Appareil et procédé permettant de maintenir un fluide d'immersion dans l'espace sous une lentille de projection pendant un échange de plaques dans une machine de lithographie par immersion | [2013/28] | Examination procedure | 18.09.2014 | Amendment by applicant (claims and/or description) | 24.09.2014 | Examination requested [2014/45] | 22.05.2015 | Communication of intention to grant the patent | 15.09.2015 | Fee for grant paid | 15.09.2015 | Fee for publishing/printing paid | 15.09.2015 | Receipt of the translation of the claim(s) | Parent application(s) Tooltip | EP04721260.0 / EP1616220 | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20040721260) is 03.03.2011 | Opposition(s) | 29.07.2016 | No opposition filed within time limit [2016/40] | Fees paid | Renewal fee | 06.02.2013 | Renewal fee patent year 03 | 06.02.2013 | Renewal fee patent year 04 | 06.02.2013 | Renewal fee patent year 05 | 06.02.2013 | Renewal fee patent year 06 | 06.02.2013 | Renewal fee patent year 07 | 06.02.2013 | Renewal fee patent year 08 | 06.02.2013 | Renewal fee patent year 09 | 06.02.2013 | Renewal fee patent year 10 | 18.03.2014 | Renewal fee patent year 11 | 23.03.2015 | Renewal fee patent year 12 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 17.03.2004 | AT | 28.10.2015 | BG | 28.10.2015 | CY | 28.10.2015 | CZ | 28.10.2015 | DK | 28.10.2015 | EE | 28.10.2015 | ES | 28.10.2015 | FI | 28.10.2015 | IT | 28.10.2015 | MC | 28.10.2015 | PL | 28.10.2015 | RO | 28.10.2015 | SE | 28.10.2015 | SI | 28.10.2015 | SK | 28.10.2015 | TR | 28.10.2015 | GR | 29.01.2016 | PT | 29.02.2016 | GB | 17.03.2016 | LU | 17.03.2016 | BE | 31.03.2016 | CH | 31.03.2016 | FR | 31.03.2016 | LI | 31.03.2016 | [2018/38] |
Former [2018/29] | HU | 17.03.2004 | |
AT | 28.10.2015 | ||
CY | 28.10.2015 | ||
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
MC | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SI | 28.10.2015 | ||
SK | 28.10.2015 | ||
TR | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
GB | 17.03.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
CH | 31.03.2016 | ||
FR | 31.03.2016 | ||
LI | 31.03.2016 | ||
Former [2018/28] | HU | 17.03.2004 | |
AT | 28.10.2015 | ||
CY | 28.10.2015 | ||
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
MC | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SI | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
GB | 17.03.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
CH | 31.03.2016 | ||
FR | 31.03.2016 | ||
LI | 31.03.2016 | ||
Former [2017/10] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
MC | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SI | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
GB | 17.03.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
CH | 31.03.2016 | ||
FR | 31.03.2016 | ||
LI | 31.03.2016 | ||
Former [2017/08] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
MC | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SI | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
GB | 17.03.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
CH | 31.03.2016 | ||
LI | 31.03.2016 | ||
Former [2017/07] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
MC | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SI | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
CH | 31.03.2016 | ||
LI | 31.03.2016 | ||
Former [2016/49] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
MC | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SI | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
Former [2016/47] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
LU | 17.03.2016 | ||
BE | 31.03.2016 | ||
Former [2016/39] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
DK | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
BE | 31.03.2016 | ||
Former [2016/36] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
EE | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
PL | 28.10.2015 | ||
RO | 28.10.2015 | ||
SE | 28.10.2015 | ||
SK | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
BE | 31.03.2016 | ||
Former [2016/34] | AT | 28.10.2015 | |
CZ | 28.10.2015 | ||
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
PL | 28.10.2015 | ||
SE | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
Former [2016/24] | AT | 28.10.2015 | |
ES | 28.10.2015 | ||
FI | 28.10.2015 | ||
IT | 28.10.2015 | ||
PL | 28.10.2015 | ||
SE | 28.10.2015 | ||
GR | 29.01.2016 | ||
PT | 29.02.2016 | ||
Former [2016/23] | ES | 28.10.2015 | |
IT | 28.10.2015 | ||
SE | 28.10.2015 | ||
Former [2016/21] | ES | 28.10.2015 | |
IT | 28.10.2015 | ||
Former [2016/20] | ES | 28.10.2015 | Documents cited: | Search | [A]US5825043 (SUWA KYOICHI [JP]) [A] 1-24* column 23, lines 1-67; figure 9 *; | [A]WO9949504 (NIKON CORP [JP], et al) [A] 1-24 * abstract *; | [A]US2001004105 (KWAN YIM BUN P [NL], et al) [A] 1-24 * paragraphs [0025] - [0032] - [ 106]; figure 2 * | by applicant | JPH08136475 | US5528118 | US5528100 | JPH08171054 | JPH08330224 | JPH08334695 | US5623853 | US5668672 | US5689377 | JPH103039 | JPH1020195 | US5835275 | US5874820 | US6262796 | US6341007 | US19970873605 | US20030462142 | US20030462112 | US20030500312 | US20040541329 |