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Extract from the Register of European Patents

EP About this file: EP2618188

EP2618188 - Illumination optical apparatus, exposure apparatus, and exposure method [Right-click to bookmark this link]
Former [2013/30]Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
[2015/28]
StatusNo opposition filed within time limit
Status updated on  12.08.2016
Database last updated on 20.09.2024
Most recent event   Tooltip17.08.2018Lapse of the patent in a contracting state
New state(s): BG		published on 19.09.2018  [2018/38]
Applicant(s)For all designated states
Nikon Corporation
15-3, Konan 2-chome
Minato-ku
Tokyo 108-6290 / JP
[2015/36]
Former [2013/30]For all designated states
Nikon Corporation
12-1, Yurakucho 1-chome Chiyoda-ku
Tokyo 100-8331 / JP
Inventor(s)01 / Tanitsu, Osamu
c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
02 / Shigematsu, Koji
c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
03 / Hirota, Hiroyuki
c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
04 / Matsuyama, Tomoyuki
c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
 [2013/30]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2015/41]
Former [2013/30]HOFFMANN EITLE
Patent- und Rechtsanwälte
Arabellastrasse 4
81925 München / DE
Application number, filing date13156324.914.01.2005
[2013/30]
Priority number, dateJP2004003055506.02.2004         Original published format: JP 2004030555
JP2004035821810.12.2004         Original published format: JP 2004358218
[2013/30]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2618188
Date:24.07.2013
Language:EN
[2013/30]
Type: B1 Patent specification 
No.:EP2618188
Date:07.10.2015
Language:EN
[2015/41]
Search report(s)(Supplementary) European search report - dispatched on:EP21.06.2013
ClassificationIPC:G02B5/30, G03F7/20, H01L21/027
[2013/30]
CPC:
G03F7/70566 (EP,KR,US); G03F7/2006 (KR); F21V13/02 (EP,KR,US);
F21V9/14 (KR,US); G02B27/0977 (US); G02B27/286 (EP,KR,US);
G02B5/3025 (US); G03F7/70058 (KR); G03F7/701 (EP,KR);
G03F7/70191 (US); G03F7/70308 (US) (-)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   MC,   NL,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2015/41]
Former [2013/30]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  MC,  NL,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Optisches Beleuchtungsgerät, Belichtungsgerät und Belichtungsverfahren[2015/28]
English:Illumination optical apparatus, exposure apparatus, and exposure method[2015/28]
French:Appareil optique d'illumination, appareil d'exposition et procédé d'exposition[2015/28]
Former [2013/30]Polarisierungsmodulationslement, optisches Beleuchtungsgerät, Belichtungsgerät und Belichtungsverfahren
Former [2013/30]Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method
Former [2013/30]Élément de modulation-polarisation, appareil optique dýillumination, appareil dýexposition et procédé dýexposition
Examination procedure21.01.2014Examination requested  [2014/10]
22.01.2014Amendment by applicant (claims and/or description)
29.04.2014Despatch of a communication from the examining division (Time limit: M03)
11.08.2014Reply to a communication from the examining division
30.10.2014Despatch of a communication from the examining division (Time limit: M04)
14.01.2015Reply to a communication from the examining division
16.04.2015Despatch of a communication from the examining division (Time limit: M02)
22.04.2015Reply to a communication from the examining division
16.06.2015Communication of intention to grant the patent
10.08.2015Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
10.08.2015Fee for grant paid
10.08.2015Fee for publishing/printing paid
27.08.2015Information about intention to grant a patent
27.08.2015Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP05703646.9  / EP1720047
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20050703646) is  15.02.2011
Opposition(s)08.07.2016No opposition filed within time limit [2016/37]
Fees paidRenewal fee
20.03.2013Renewal fee patent year 03
20.03.2013Renewal fee patent year 04
20.03.2013Renewal fee patent year 05
20.03.2013Renewal fee patent year 06
20.03.2013Renewal fee patent year 07
20.03.2013Renewal fee patent year 08
20.03.2013Renewal fee patent year 09
28.01.2014Renewal fee patent year 10
15.01.2015Renewal fee patent year 11
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU14.01.2005
AT07.10.2015
BE07.10.2015
BG07.10.2015
CY07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SI07.10.2015
SK07.10.2015
TR07.10.2015
GR08.01.2016
GB14.01.2016
LU14.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
[2018/38]
Former [2018/29]HU14.01.2005
AT07.10.2015
BE07.10.2015
CY07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SI07.10.2015
SK07.10.2015
TR07.10.2015
GR08.01.2016
GB14.01.2016
LU14.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
Former [2018/28]HU14.01.2005
AT07.10.2015
BE07.10.2015
CY07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SI07.10.2015
SK07.10.2015
GR08.01.2016
GB14.01.2016
LU14.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
Former [2017/03]AT07.10.2015
BE07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SI07.10.2015
SK07.10.2015
GR08.01.2016
GB14.01.2016
LU14.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/49]AT07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SI07.10.2015
SK07.10.2015
GR08.01.2016
GB14.01.2016
LU14.01.2016
BE31.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/47]AT07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SK07.10.2015
GR08.01.2016
GB14.01.2016
LU14.01.2016
BE31.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/46]AT07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SK07.10.2015
GR08.01.2016
LU14.01.2016
BE31.01.2016
CH31.01.2016
LI31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/42]AT07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
MC07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SK07.10.2015
GR08.01.2016
LU14.01.2016
BE31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/39]AT07.10.2015
CZ07.10.2015
DK07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SK07.10.2015
GR08.01.2016
LU14.01.2016
BE31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/36]AT07.10.2015
CZ07.10.2015
EE07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
PL07.10.2015
RO07.10.2015
SE07.10.2015
SK07.10.2015
GR08.01.2016
BE31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/34]AT07.10.2015
CZ07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
PL07.10.2015
SE07.10.2015
GR08.01.2016
BE31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/24]AT07.10.2015
ES07.10.2015
FI07.10.2015
LT07.10.2015
PL07.10.2015
SE07.10.2015
GR08.01.2016
BE31.01.2016
IS07.02.2016
PT08.02.2016
Former [2016/23]ES07.10.2015
LT07.10.2015
SE07.10.2015
IS07.02.2016
Former [2016/22]ES07.10.2015
LT07.10.2015
IS07.02.2016
Former [2016/20]ES07.10.2015
LT07.10.2015
Documents cited:Search[XI]EP0764858  (ZEISS CARL [DE], et al) [X] 1,18,20,22,24 * abstract * * column 5, line 27 - column 7, line 44 * * figures 3a,3b,5 * [I] 2-17,19,21,23;
 [A]EP0937999  (ZEISS CARL [DE], et al) [A] 1-24 * abstract * * paragraph [0016] * * figure 1 *;
 [A]GB856621  (NAT RES DEV) [A] 1-24 * figure 4 * * page 3, lines 11-61 *
ExaminationJPH0653120
by applicantJP3246615B
 WO9949504
 JPH06124873
 JPH10303114
    - TSURUTA, "Pencil of Light-Applied Optics for optical engineers", K.K. SHINGIJUTSU COMMUNICATIONS
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.