blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP2628820

EP2628820 - Apparatus and methods for deposition reactors [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  05.04.2019
Database last updated on 13.11.2024
FormerThe patent has been granted
Status updated on  27.04.2018
FormerGrant of patent is intended
Status updated on  24.11.2017
FormerExamination is in progress
Status updated on  20.02.2017
Most recent event   Tooltip01.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 03.08.2022  [2022/31]
Applicant(s)For all designated states
Picosun Oy
Tietotie 3
02150 Espoo / FI
[2013/34]
Inventor(s)01 / Lindfors, Sven
Nuottamiehentie 8
02230 Espoo / FI
02 / Soininen, Pekka J.
Haltijatontuntie 21 A 1
02200 Espoo / FI
 [2013/34]
Representative(s)Espatent Oy
Kaivokatu 10 D
00100 Helsinki / FI
[2013/40]
Former [2013/34]Söderholm, Sampsa Petteri, et al
Espatent Oy Kaivokatu 10 D
00100 Helsinki / FI
Application number, filing date13162242.515.04.2009
[2013/34]
Priority number, dateUS2008014888522.04.2008         Original published format: US 148885
[2013/34]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report 
No.:EP2628820
Date:21.08.2013
Language:EN
[2013/34]
Type: B1 Patent specification 
No.:EP2628820
Date:30.05.2018
Language:EN
[2018/22]
Search report(s)(Supplementary) European search report - dispatched on:EP22.07.2013
ClassificationIPC:F16L53/00, C23C16/448, C23C16/455
[2017/46]
CPC:
C23C16/4485 (EP,US); C23C16/45544 (EP,KR,US); C23C16/45553 (KR,US);
C23C16/4481 (KR); C23C16/45561 (EP,KR,US); C23C16/45527 (RU);
C23C16/54 (RU); Y10T137/6416 (EP,US) (-)
Former IPC [2013/34]C23C16/448, C23C16/455
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   SE,   SI,   SK,   TR [2018/22]
Former [2013/34]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HR,  HU,  IE,  IS,  IT,  LI,  LT,  LU,  LV,  MC,  MK,  MT,  NL,  NO,  PL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:Vorrichtung und Verfahren für Abscheidungsreaktoren[2013/34]
English:Apparatus and methods for deposition reactors[2013/34]
French:Appareil et procédés pour réacteurs de dépôt[2013/34]
Examination procedure18.02.2014Amendment by applicant (claims and/or description)
18.02.2014Examination requested  [2014/13]
06.10.2016Despatch of a communication from the examining division (Time limit: M04)
15.02.2017Reply to a communication from the examining division
23.10.2017Cancellation of oral proceeding that was planned for 27.10.2017
27.10.2017Date of oral proceedings (cancelled)
24.11.2017Communication of intention to grant the patent
02.03.2018Fee for grant paid
02.03.2018Fee for publishing/printing paid
02.03.2018Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP09735289.2  / EP2274457
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued (EP20090735289) is  02.11.2016
Opposition(s)01.03.2019No opposition filed within time limit [2019/19]
Fees paidRenewal fee
04.04.2013Renewal fee patent year 03
04.04.2013Renewal fee patent year 04
04.04.2013Renewal fee patent year 05
31.03.2014Renewal fee patent year 06
21.04.2015Renewal fee patent year 07
29.03.2016Renewal fee patent year 08
21.04.2017Renewal fee patent year 09
23.04.2018Renewal fee patent year 10
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU15.04.2009
AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
MK30.05.2018
MT30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
TR30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
IS30.09.2018
PT01.10.2018
[2022/31]
Former [2021/34]HU15.04.2009
AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
MT30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
TR30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
IS30.09.2018
PT01.10.2018
Former [2021/32]HU15.04.2009
AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
TR30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
IS30.09.2018
PT01.10.2018
Former [2021/31]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
TR30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
IS30.09.2018
PT01.10.2018
Former [2020/29]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
TR30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
PT01.10.2018
Former [2020/16]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
TR30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2020/02]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
MC30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2019/26]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SI30.05.2018
SK30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2019/11]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
IT30.05.2018
LT30.05.2018
LV30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SK30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2019/10]AT30.05.2018
CY30.05.2018
CZ30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
LT30.05.2018
LV30.05.2018
PL30.05.2018
RO30.05.2018
SE30.05.2018
SK30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2019/09]CY30.05.2018
DK30.05.2018
EE30.05.2018
ES30.05.2018
HR30.05.2018
LT30.05.2018
LV30.05.2018
SE30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2019/08]CY30.05.2018
DK30.05.2018
ES30.05.2018
HR30.05.2018
LT30.05.2018
LV30.05.2018
SE30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2018/52]CY30.05.2018
ES30.05.2018
HR30.05.2018
LT30.05.2018
LV30.05.2018
SE30.05.2018
BG30.08.2018
NO30.08.2018
GR31.08.2018
Former [2018/51]CY30.05.2018
ES30.05.2018
HR30.05.2018
LT30.05.2018
LV30.05.2018
SE30.05.2018
BG30.08.2018
NO30.08.2018
Former [2018/50]CY30.05.2018
ES30.05.2018
HR30.05.2018
LT30.05.2018
SE30.05.2018
BG30.08.2018
NO30.08.2018
Former [2018/49]CY30.05.2018
ES30.05.2018
LT30.05.2018
SE30.05.2018
BG30.08.2018
NO30.08.2018
Former [2018/47]ES30.05.2018
LT30.05.2018
NO30.08.2018
Documents cited:Search[X]US5160542  (MIHIRA HIROSHI [JP], et al) [X] 1-6 * the whole document *;
 [X]US2005189072  (CHEN LING [US], et al) [X] 1-4,7-10* the whole document *
by applicantWO2006111618
 US2007117383
    - "Atomic Layer Deposition", M. RITALA ET AL., Handbook of Thin Film Materials, Volume 1: Deposition and Processing of Thin Films, ACADEMIC PRESS, (2002), page 103
    - R. PUURUNEN, "Surface chemistry of atomic layer deposition: A case study for the trimethylaluminium/water process", JOURNAL OF APPLIED PHYSICS, (2005), vol. 97, pages 121301 - 121352
    - "Atomic Layer Epitaxy", T. SUNTOLA, Materials Science Reports, ELSEVIER SCIENCE PUBLISHERS B. V, (1989), vol. 4, page 261
    - "Atomic Layer Epitaxy", T. SUNTOLA, Handbook of Crystal Growth 3, Thin Films and Epitaxy, Part B: Growth Mechanisms and Dynamics, ELSEVIER SCIENCE PUBLISHERS B. V, (1994), page 601
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.