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EP2666554
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EP About this file: EP2666554
| EP2666554 - Ultrasonic cleaning method and ultrasonic cleaning apparatus [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 30.01.2015 Database last updated on 19.10.2024 | Most recent event Tooltip | 30.01.2015 | Application deemed to be withdrawn | published on 04.03.2015 [2015/10] | Applicant(s) | For all designated states Siltronic AG Hanns-Seidel-Platz 4 81737 München / DE | [2013/48] | Inventor(s) | 01 /
Uchibe, Masashi 875-2 Nakano Izumo, Shimane 693-0062 / JP | 02 /
Mori, Yoshihiro 12-38 Nishinokyo-Badai-cho Nakagyo-ku, Kyoto 604-8457 / JP | 03 /
Haibara, Teruo 7-32-9 Mitsui Hikari, Yamaguchi 743-0011 / JP | 04 /
Kubo, Etsuko 2-35 ems square, Makinokidai Yokkaichi, Mie 512-1306 / JP | [2013/48] | Representative(s) | Baar, Christian, et al c/o Siltronic AG Corporate Intellectual Property Hanns-Seidel-Platz 4 81737 München / DE | [2013/48] | Application number, filing date | 13168559.6 | 21.05.2013 | [2013/48] | Priority number, date | JP20120118636 | 24.05.2012 Original published format: JP 2012118636 | [2013/48] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2666554 | Date: | 27.11.2013 | Language: | EN | [2013/48] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 30.09.2013 | Classification | IPC: | B08B3/12 | [2013/48] | CPC: |
B08B3/12 (EP,US);
H01L21/302 (KR);
H01L21/02052 (US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2013/48] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | Ultraschallreinigungsverfahren und Ultraschallreinigungsvorrichtung | [2013/48] | English: | Ultrasonic cleaning method and ultrasonic cleaning apparatus | [2013/48] | French: | Procédé et appareil de nettoyage par ultrasons | [2013/48] | Examination procedure | 21.05.2013 | Examination requested [2013/48] | 21.03.2014 | Despatch of a communication from the examining division (Time limit: M06) | 01.10.2014 | Application deemed to be withdrawn, date of legal effect [2015/10] | 28.10.2014 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2015/10] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 21.03.2014 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]US5931173 (SCHIELE NORMAN K [US]) [X] 1-3,8 * column 3, line 31 - column 4, line 13 * * column 7, line 54 - line 57 * * figure 5A * * figure 1 * * column 10 * * column 4, line 9 - line 13 * * column 6, lines 39-65 * [I] 4-7,9; | [XA]US5985811 (TODA MASAYUKI [JP], et al) [X] 1 * column 8, line 25 - line 67 * [A] 2-9 | by applicant | JPH10109072 | JP2007250726 | - "Behaviour of a Well Designed Megasonic Cleaning System", SOLID STATE PHENOMENA, (2005), vol. 103-104, pages 155 - 158 | - "Megasonics: A cavitation driven process", SOLID STATE PHENOMENA, (2005), vol. 103-104, pages 159 - 162 |