EP2853139 - RADIATION SOURCE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 19.05.2017 Database last updated on 14.11.2024 | Most recent event Tooltip | 06.03.2020 | Lapse of the patent in a contracting state New state(s): TR | published on 08.04.2020 [2020/15] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2015/14] | Inventor(s) | 01 /
VAN SCHOOT, Jan Citrushof 8 NL-5632 XN Eindhoven / NL | 02 /
KEMPEN, Antonius P. O. Box 324 NL-5500 AH Veldhoven / NL | 03 /
KREUWEL, Hermanus De Run 6501 NL-5504 DR Veldhoven / NL | 04 /
YAKUNIN, Andrei, Mikhailovich De Run 6501 NL-5504 DR Veldhoven / NL | [2015/14] | Representative(s) | Ketting, Alfred, et al ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
Former [2015/14] | Siem, Max Yoe Shé ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | Application number, filing date | 13720349.3 | 29.04.2013 | [2016/28] | WO2013EP58869 | Priority number, date | US201261649895P | 21.05.2012 Original published format: US 201261649895 P | [2015/14] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2013174620 | Date: | 28.11.2013 | Language: | EN | [2013/48] | Type: | A1 Application with search report | No.: | EP2853139 | Date: | 01.04.2015 | Language: | EN | The application published by WIPO in one of the EPO official languages on 28.11.2013 takes the place of the publication of the European patent application. | [2015/14] | Type: | B1 Patent specification | No.: | EP2853139 | Date: | 13.07.2016 | Language: | EN | [2016/28] | Search report(s) | International search report - published on: | EP | 28.11.2013 | Classification | IPC: | H05G2/00 | [2015/14] | CPC: |
H05G2/008 (EP,US);
G03F7/70033 (US);
H05G2/006 (EP,US);
H05G2/005 (EP,US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2015/14] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | STRAHLUNGSQUELLE | [2015/14] | English: | RADIATION SOURCE | [2015/14] | French: | SOURCE DE RAYONNEMENT | [2015/14] | Entry into regional phase | 31.10.2014 | National basic fee paid | 31.10.2014 | Designation fee(s) paid | 31.10.2014 | Examination fee paid | Examination procedure | 31.10.2014 | Examination requested [2015/14] | 23.07.2015 | Amendment by applicant (claims and/or description) | 07.04.2016 | Communication of intention to grant the patent | 02.06.2016 | Fee for grant paid | 02.06.2016 | Fee for publishing/printing paid | 02.06.2016 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 07.04.2016 | Opposition(s) | 18.04.2017 | No opposition filed within time limit [2017/25] | Fees paid | Renewal fee | 21.04.2015 | Renewal fee patent year 03 | 29.03.2016 | Renewal fee patent year 04 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 29.04.2013 | AL | 13.07.2016 | AT | 13.07.2016 | BE | 13.07.2016 | CY | 13.07.2016 | CZ | 13.07.2016 | DK | 13.07.2016 | EE | 13.07.2016 | ES | 13.07.2016 | FI | 13.07.2016 | HR | 13.07.2016 | IT | 13.07.2016 | LT | 13.07.2016 | LV | 13.07.2016 | MC | 13.07.2016 | MK | 13.07.2016 | NL | 13.07.2016 | PL | 13.07.2016 | RO | 13.07.2016 | RS | 13.07.2016 | SE | 13.07.2016 | SI | 13.07.2016 | SK | 13.07.2016 | SM | 13.07.2016 | TR | 13.07.2016 | BG | 13.10.2016 | NO | 13.10.2016 | GR | 14.10.2016 | IS | 13.11.2016 | PT | 14.11.2016 | [2020/15] |
Former [2019/51] | HU | 29.04.2013 | |
AL | 13.07.2016 | ||
AT | 13.07.2016 | ||
BE | 13.07.2016 | ||
CY | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
MC | 13.07.2016 | ||
MK | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SI | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2019/48] | HU | 29.04.2013 | |
AL | 13.07.2016 | ||
AT | 13.07.2016 | ||
BE | 13.07.2016 | ||
CY | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
MC | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SI | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2019/31] | HU | 29.04.2013 | |
AL | 13.07.2016 | ||
AT | 13.07.2016 | ||
BE | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
MC | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SI | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2018/46] | AL | 13.07.2016 | |
AT | 13.07.2016 | ||
BE | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
MC | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SI | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2018/06] | AT | 13.07.2016 | |
BE | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
MC | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SI | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2017/37] | AT | 13.07.2016 | |
BE | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SI | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2017/31] | AT | 13.07.2016 | |
BE | 13.07.2016 | ||
CZ | 13.07.2016 | ||
DK | 13.07.2016 | ||
EE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RO | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
SK | 13.07.2016 | ||
SM | 13.07.2016 | ||
BG | 13.10.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2017/13] | AT | 13.07.2016 | |
BE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
LV | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2017/11] | AT | 13.07.2016 | |
BE | 13.07.2016 | ||
ES | 13.07.2016 | ||
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
NO | 13.10.2016 | ||
GR | 14.10.2016 | ||
IS | 13.11.2016 | ||
PT | 14.11.2016 | ||
Former [2017/10] | BE | 13.07.2016 | |
FI | 13.07.2016 | ||
HR | 13.07.2016 | ||
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
NL | 13.07.2016 | ||
PL | 13.07.2016 | ||
RS | 13.07.2016 | ||
SE | 13.07.2016 | ||
NO | 13.10.2016 | ||
IS | 13.11.2016 | ||
Former [2017/09] | FI | 13.07.2016 | |
IT | 13.07.2016 | ||
LT | 13.07.2016 | ||
NL | 13.07.2016 | ||
NO | 13.10.2016 | ||
Former [2017/07] | LT | 13.07.2016 | Cited in | International search | [X]EP1367866 (NORTHROP GRUMMAN SPACE TECHNOL [US]) [X] 1,10,19 * paragraphs [0005] , [0006] , [0010] *; | [A]US2010294953 (VASCHENKO GEORGIY O [US], et al) [A] 2-9,11-18* paragraph [0056] * |