blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...
blank News flashes

Italy joins the Federated Register

Click here for more information on the Federated Register.

2025-06-12

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register User Manual
European Patent Register – pocket guide
FAQ - European Patent Register
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP2890835

EP2890835 - METHOD FOR DEPOSITING AN ALUMINIUM NITRIDE LAYER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  15.07.2022
Database last updated on 26.03.2026
FormerThe patent has been granted
Status updated on  06.08.2021
FormerGrant of patent is intended
Status updated on  21.04.2021
FormerExamination is in progress
Status updated on  22.09.2017
Most recent event   Tooltip19.12.2025Lapse of the patent in a contracting state
New state(s): TR		published on 21.01.2026  [2026/04]
Applicant(s)For all designated states
Evatec AG
Hauptstrasse 1A
9477 Trübbach / CH
[2021/36]
Former [2017/26]For all designated states
Evatec AG
Hauptstrasse 1A
9477 Trübbach / CH
Former [2015/28]For all designated states
Oerlikon Advanced Technologies AG
Iramali 18
9496 Balzers / LI
Inventor(s)01 / CASTALDI, Lorenzo
Blumenweg 2
CH-8854 Galgenen / CH
02 / KRATZER, Martin
Wolf-Huber-Str. 23A
A-6800 Fedkirch / AT
03 / FELZER, Heinz
Seilbruckstr. 6
CH-7302 Landquart / CH
04 / MAMAZZA, Robert Jr.
Wetti 3
CH-9470 Buchs / CH
05 / HEINZ, Bernd
Wiedenstr. 2
CH-9470 Buchs / CH
 [2015/28]
Representative(s)Troesch Scheidegger Werner AG, et al
Schwäntenmos 14
8126 Zumikon / CH
[2021/36]
Former [2015/28]Moore, Joanne Camilla
Schweiger & Partner
Karlstraße 35
80333 München / DE
Application number, filing date13777342.029.08.2013
[2021/36]
WO2013IB58101
Priority number, dateUS201261695551P31.08.2012         Original published format: US 201261695551 P
[2015/28]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014033649
Date:06.03.2014
Language:EN
[2014/10]
Type: A1 Application with search report 
No.:EP2890835
Date:08.07.2015
Language:EN
The application published by WIPO in one of the EPO official languages on 06.03.2014 takes the place of the publication of the European patent application.
[2015/28]
Type: B1 Patent specification 
No.:EP2890835
Date:08.09.2021
Language:EN
[2021/36]
Search report(s)International search report - published on:EP06.03.2014
ClassificationIPC:C30B25/06, C30B29/40, H01L21/02, C30B25/18
[2021/16]
CPC:
H10P14/3416 (EP,KR,US); C30B29/403 (EP,KR,US); C30B25/06 (EP,KR,US);
C30B25/186 (EP,KR,US); H10P14/22 (EP,KR,US); H10P14/2905 (EP,KR,US);
H10P14/2926 (EP,KR,US); H10P14/3241 (EP,KR,US); H10P14/3602 (EP,KR,US);
H10P50/242 (KR,US) (-)
Former IPC [2015/28]C30B23/02, C30B29/40, H01L21/02
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2015/28]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:VERFAHREN ZUR ABSCHEIDUNG EINER ALUMINIUMNITRIDSCHICHT[2015/28]
English:METHOD FOR DEPOSITING AN ALUMINIUM NITRIDE LAYER[2015/28]
French:PROCÉDÉ POUR LE DÉPÔT D'UNE COUCHE DE NITRURE D'ALUMINIUM[2015/28]
Entry into regional phase31.03.2015National basic fee paid 
31.03.2015Designation fee(s) paid 
31.03.2015Examination fee paid 
Examination procedure27.02.2015Amendment by applicant (claims and/or description)
31.03.2015Examination requested  [2015/28]
20.09.2017Despatch of a communication from the examining division (Time limit: M04)
19.01.2018Reply to a communication from the examining division
26.09.2018Despatch of a communication from the examining division (Time limit: M04)
10.01.2019Reply to a communication from the examining division
20.08.2019Despatch of a communication from the examining division (Time limit: M04)
25.10.2019Reply to a communication from the examining division
03.06.2020Despatch of a communication from the examining division (Time limit: M04)
28.09.2020Reply to a communication from the examining division
22.04.2021Communication of intention to grant the patent
02.08.2021Fee for grant paid
02.08.2021Fee for publishing/printing paid
02.08.2021Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  20.09.2017
Opposition(s)09.06.2022No opposition filed within time limit [2022/33]
Fees paidRenewal fee
31.08.2015Renewal fee patent year 03
31.08.2016Renewal fee patent year 04
10.08.2017Renewal fee patent year 05
02.08.2018Renewal fee patent year 06
06.08.2019Renewal fee patent year 07
05.08.2020Renewal fee patent year 08
03.08.2021Renewal fee patent year 09
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU29.08.2013
AL08.09.2021
AT08.09.2021
CY08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
MC08.09.2021
MK08.09.2021
MT08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
TR08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
[2026/04]
Former [2024/41]HU29.08.2013
AL08.09.2021
AT08.09.2021
CY08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
MC08.09.2021
MK08.09.2021
MT08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2024/27]HU29.08.2013
AL08.09.2021
AT08.09.2021
CY08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
MC08.09.2021
MK08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2024/21]HU29.08.2013
AL08.09.2021
AT08.09.2021
CY08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
MC08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2024/18]HU29.08.2013
AL08.09.2021
AT08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
MC08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2023/16]AL08.09.2021
AT08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
MC08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2023/10]AL08.09.2021
AT08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
IT08.09.2021
LT08.09.2021
LV08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2022/36]AL08.09.2021
AT08.09.2021
CZ08.09.2021
DK08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SI08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2022/29]AL08.09.2021
AT08.09.2021
CZ08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2022/25]AT08.09.2021
CZ08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SK08.09.2021
SM08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2022/24]AT08.09.2021
CZ08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
NL08.09.2021
PL08.09.2021
RO08.09.2021
RS08.09.2021
SE08.09.2021
SK08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
IS08.01.2022
PT10.01.2022
Former [2022/23]AT08.09.2021
CZ08.09.2021
EE08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
PL08.09.2021
RS08.09.2021
SE08.09.2021
SK08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
PT10.01.2022
Former [2022/21]AT08.09.2021
ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
RS08.09.2021
SE08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
Former [2022/10]ES08.09.2021
FI08.09.2021
HR08.09.2021
LT08.09.2021
LV08.09.2021
RS08.09.2021
SE08.09.2021
BG08.12.2021
NO08.12.2021
GR09.12.2021
Former [2022/09]ES08.09.2021
FI08.09.2021
LT08.09.2021
RS08.09.2021
SE08.09.2021
BG08.12.2021
NO08.12.2021
Former [2022/08]ES08.09.2021
FI08.09.2021
LT08.09.2021
SE08.09.2021
BG08.12.2021
NO08.12.2021
Former [2022/07]LT08.09.2021
NO08.12.2021
Cited inInternational search[XYI] US2004230271  (WANG XINGWU et al.)
 [XYI] US5633194  (SELVAKUMAR C R et al.) [X] 1,2,7,10-12,20 * paragraphs [0100] - [0102] - [0115] , [0116] , [0356] - [0360] - [0365] , [0370] , [0371] , [0531] - [0541] *[Y] 3-6,8,9,14 [I] 13,15-19
 [Y] WO2011066518  (OC OERLIKON BALZERS AG et al.) [Y] 3-6,8,9 * column 6, line 44 - line 56 *
 [Y] DE10006108  (RICHTER WOLFGANG et al.) [Y] 14 * page 15, line 18 - line 20; figure 2 *
 [A] US2006124956  (PENG HUI et al.) [A] 1-20 * the whole document *
ExaminationEP2056339
 EP0732732
by applicantUS6391748
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.