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Extract from the Register of European Patents

EP About this file: EP2926185

EP2926185 - ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICAL SYSTEM [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  12.08.2022
Database last updated on 03.09.2024
FormerExamination is in progress
Status updated on  09.04.2019
Most recent event   Tooltip12.08.2022Application deemed to be withdrawnpublished on 14.09.2022  [2022/37]
Applicant(s)For all designated states
Carl Zeiss SMT GmbH
Rudolf-Eber-Strasse 2
73447 Oberkochen / DE
[2015/41]
Inventor(s)01 / HAUF, Markus
Hafenberg 4
89075 Ulm / DE
02 / VOGLER, Alexander
Kranichweg 27
73434 Aalen / DE
 [2015/41]
Representative(s)Frank, Hartmut
Bonsmann Bonsmann Frank
Patentanwälte
Reichspräsidentenstraße 21-25
45470 Mülheim a. d. Ruhr / DE
[2015/41]
Application number, filing date13796013.407.11.2013
[2015/41]
WO2013EP73270
Priority number, dateDE20121022183129.11.2012         Original published format: DE102012221831
US201261731260P29.11.2012         Original published format: US 201261731260 P
[2015/41]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2014082830
Date:05.06.2014
Language:EN
[2014/23]
Type: A1 Application with search report 
No.:EP2926185
Date:07.10.2015
Language:EN
The application published by WIPO in one of the EPO official languages on 05.06.2014 takes the place of the publication of the European patent application.
[2015/41]
Search report(s)International search report - published on:EP05.06.2014
ClassificationIPC:G02B7/18, G02B7/182, G03F7/20
[2015/41]
CPC:
G02B7/1828 (EP,CN,KR,US); G03F7/70075 (EP,CN,KR,US); G03F7/702 (US);
G02B26/0816 (EP,US); G02B26/0833 (CN,KR,US); G02B7/181 (EP,US);
G02B7/182 (EP,US); G03F7/70116 (EP,CN,KR,US); G03F7/70825 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2015/41]
TitleGerman:ANORDNUNG ZUR BETÄTIGUNG VON WENIGSTENS EINEM OPTISCHEN ELEMENT IN EINEM OPTISCHEN SYSTEM[2015/41]
English:ARRANGEMENT FOR ACTUATING AT LEAST ONE OPTICAL ELEMENT IN AN OPTICAL SYSTEM[2015/41]
French:AGENCEMENT POUR ACTIONNEMENT D'AU MOINS UN ÉLÉMENT OPTIQUE DANS UN SYSTÈME OPTIQUE[2015/41]
Entry into regional phase14.05.2015National basic fee paid 
14.05.2015Designation fee(s) paid 
14.05.2015Examination fee paid 
Examination procedure14.05.2015Examination requested  [2015/41]
15.12.2015Amendment by applicant (claims and/or description)
12.04.2019Despatch of a communication from the examining division (Time limit: M04)
16.08.2019Reply to a communication from the examining division
25.09.2020Despatch of a communication from the examining division (Time limit: M06)
29.03.2021Reply to a communication from the examining division
01.10.2021Despatch of a communication from the examining division (Time limit: M06)
12.04.2022Application deemed to be withdrawn, date of legal effect  [2022/37]
06.05.2022Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2022/37]
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  12.04.2019
Fees paidRenewal fee
24.11.2015Renewal fee patent year 03
23.11.2016Renewal fee patent year 04
24.11.2017Renewal fee patent year 05
22.11.2018Renewal fee patent year 06
26.11.2019Renewal fee patent year 07
20.11.2020Renewal fee patent year 08
24.11.2021Renewal fee patent year 09
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Cited inInternational search[Y]US5169050  (MONTAGU JEAN I [US]) [Y] 3 * column 1, line 43 - column 3, line 53; figures 1-3 *;
 [XY]US5803609  (STACKLIES HORST [DE], et al) [X] 1,2,4 * column 4 - column 6; figures 1,1a,2,2a * [Y] 3;
 [A]EP1001512  (ASM LITHOGRAPHY BV [NL]) [A] 1-4* paragraphs [0024] - [0030] - [0040] - paragraph [0053]; figures 1-6 *
by applicantDE102008009600
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.