EP2981816 - METHOD OF MANUFACTURING A SENSOR DEVICE HAVING A POROUS THIN-FILM METAL ELECTRODE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 25.01.2019 Database last updated on 31.08.2024 | |
Former | The patent has been granted Status updated on 16.02.2018 | ||
Former | Grant of patent is intended Status updated on 13.09.2017 | Most recent event Tooltip | 10.07.2020 | Lapse of the patent in a contracting state New state(s): IS | published on 12.08.2020 [2020/33] | Applicant(s) | For all designated states Robert Bosch GmbH Postfach 30 02 20 70442 Stuttgart / DE | [2018/12] |
Former [2016/06] | For all designated states Robert Bosch GmbH Postfach 30 02 20 70442 Stuttgart / DE | Inventor(s) | 01 /
FEYH, Ando 742 Encina Grande Drive Palo Alto, CA 94306 / US | 02 /
O'BRIEN, Gary 4009 Miranda Avenue Palo Alto, CA 94304 / US | 03 /
PURKL, Fabian 724 Arastradero Road Apt. 313 Palo Alto, CA 94306 / US | 04 /
YAMA, Gary 1520 Gretel Lane Mountain View, CA 94040 / US | 05 /
SAMARAO, Ashwin 877 Heathstone Way 708 Mountain View, CA 94040 / US | [2016/06] | Representative(s) | (deleted) | [2018/12] |
Former [2016/06] | Bee, Joachim Robert Bosch GmbH, C/IPE P.O. Box 30 02 20 70442 Stuttgart / DE | Application number, filing date | 13821336.8 | 20.12.2013 | [2016/06] | WO2013US76976 | Priority number, date | US201261745573P | 22.12.2012 Original published format: US 201261745573 P | [2016/06] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2014100611 | Date: | 26.06.2014 | Language: | EN | [2014/26] | Type: | A1 Application with search report | No.: | EP2981816 | Date: | 10.02.2016 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.06.2014 takes the place of the publication of the European patent application. | [2016/06] | Type: | B1 Patent specification | No.: | EP2981816 | Date: | 21.03.2018 | Language: | EN | [2018/12] | Search report(s) | International search report - published on: | EP | 26.06.2014 | Classification | IPC: | G01N27/414, // H01L21/28, H01L29/423 | [2017/40] | CPC: |
G01N27/4146 (EP,US);
H01L21/28008 (US);
H01L29/4238 (US)
|
Former IPC [2016/06] | G01N27/414 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2016/06] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | VERFAHREN ZUR HERSTELLUNG EINES SENSORS MIT EINER PORÖSEN DÜNNFILMMETALLELEKTRODE | [2017/40] | English: | METHOD OF MANUFACTURING A SENSOR DEVICE HAVING A POROUS THIN-FILM METAL ELECTRODE | [2016/06] | French: | MÉTHODE DE FABRICATION D'UN DÉTECTEUR AVEC UN ELECTRODE MÉTALLIQUE MINCE POREUSE | [2017/40] |
Former [2016/06] | VERFAHREN ZUR HERSTELLUNG EINER SENSORVORRICHTUNG MIT EINER PORÖSEN DÜNNSCHICHT-METALLELEKTRODE | ||
Former [2016/06] | PROCÉDÉ DE FABRICATION D'UN DISPOSITIF DE CAPTEUR AVEC ÉLECTRODE MÉTALLIQUE POREUSE EN FILM MINCE | Entry into regional phase | 22.07.2015 | National basic fee paid | 22.07.2015 | Designation fee(s) paid | 22.07.2015 | Examination fee paid | Examination procedure | 22.07.2015 | Examination requested [2016/06] | 22.07.2016 | Amendment by applicant (claims and/or description) | 14.09.2017 | Communication of intention to grant the patent | 09.01.2018 | Fee for grant paid | 09.01.2018 | Fee for publishing/printing paid | 09.01.2018 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 14.09.2017 | Opposition(s) | 02.01.2019 | No opposition filed within time limit [2019/09] | Fees paid | Renewal fee | 04.01.2016 | Renewal fee patent year 03 | 02.01.2017 | Renewal fee patent year 04 | 02.01.2018 | Renewal fee patent year 05 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 20.12.2013 | AL | 21.03.2018 | AT | 21.03.2018 | CY | 21.03.2018 | CZ | 21.03.2018 | EE | 21.03.2018 | ES | 21.03.2018 | FI | 21.03.2018 | HR | 21.03.2018 | IT | 21.03.2018 | LT | 21.03.2018 | LV | 21.03.2018 | MC | 21.03.2018 | MK | 21.03.2018 | PL | 21.03.2018 | RO | 21.03.2018 | RS | 21.03.2018 | SE | 21.03.2018 | SI | 21.03.2018 | SK | 21.03.2018 | SM | 21.03.2018 | TR | 21.03.2018 | BG | 21.06.2018 | NO | 21.06.2018 | GR | 22.06.2018 | IS | 21.07.2018 | PT | 23.07.2018 | GB | 20.12.2018 | IE | 20.12.2018 | LU | 20.12.2018 | MT | 20.12.2018 | BE | 31.12.2018 | CH | 31.12.2018 | FR | 31.12.2018 | LI | 31.12.2018 | [2020/32] |
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PT | 23.07.2018 | ||
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NO | 21.06.2018 | Cited in | International search | [YA]US2008221806 (BRYANT CRAIG [US], et al) [Y] 7,10 * figures 1-19 * * paragraphs [0027] , [0084] *[A] 1-6,11-16; | [Y]DE102011002854 (BOSCH GMBH ROBERT [DE]) [Y] 1,2,4-16 * figures 1-12 * * paragraphs [0001] , [0012] , [0044] , [0045] , [0051] , [0077] , [0080] *; | [XA] - I. FERAIN ET AL, "Metal gate thickness optimization for MuGFET performance improvement", ESSDERC 2008, 38TH EUROPEAN SOLID-STATE DEVICE RESEARCH CONFERENCE, (20080901), doi:10.1109/ESSDERC.2008.4681733, ISBN 978-1-42-442363-7, pages 202 - 205, XP055108623 [X] 1-3,6 * abstract * * page 202, column left, paragraph 2 - column right, paragraph 1 * [A] 4,5,7-16 DOI: http://dx.doi.org/10.1109/ESSDERC.2008.4681733 | [YA] - DAI HONG KIM ET AL, "Gas sensing properties in epitaxial SnO2 films grown on TiO2 single crystals with various orientations", SENSORS AND ACTUATORS B: CHEMICAL, (20100603), vol. 147, no. 2, doi:10.1016/j.snb.2010.03.065, ISSN 0925-4005, pages 653 - 659, XP055109261 [Y] 1,2,4-6,8,9,11-16 * abstract * * page 653, column left, paragraph 2 - column right, paragraph 1 * [A] 3,7,10 DOI: http://dx.doi.org/10.1016/j.snb.2010.03.065 |