| EP2986959 - THIN-FILM ENCAPSULATED INFRARED SENSOR [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 21.07.2023 Database last updated on 10.03.2026 | |
| Former | The patent has been granted Status updated on 12.08.2022 | ||
| Former | Grant of patent is intended Status updated on 19.04.2022 | ||
| Former | Examination is in progress Status updated on 11.11.2019 | Most recent event Tooltip | 06.09.2024 | Lapse of the patent in a contracting state New state(s): MT | published on 09.10.2024 [2024/41] | Applicant(s) | For all designated states Robert Bosch GmbH Postfach 30 02 20 70442 Stuttgart / DE | [2020/18] |
| Former [2016/20] | For all designated states Robert Bosch GmbH Postfach 30 02 20 70442 Stuttgart / DE | ||
| Former [2016/08] | For all designated states Robert Bosch GmbH Postfach 30 02 20 70442 Stuttgart / DE | ||
| For all designated states Purkl, Fabian 724 Arastradero Road Apt. 313 Palo Alto, CA 94306 / US | |||
| For all designated states Yama, Gary 1520 Gretel Lane Mountain View, CA 94040 / US | |||
| For all designated states Feyh, Ando 742 Encina Grande Drive Palo Alto, CA 94306 / US | |||
| For all designated states Graham, Andrew 980 Hillcrest Drive Redwood City, CA 94062 / US | |||
| For all designated states Samarao, Ashwin 877 Heatherstone Way Apt. 708 Mountain View, CA 94040 / US | |||
| For all designated states O'Brien, Gary 1540 Oak Creek Drive Apt. 302 Palo Alto, CA 94304 / US | Inventor(s) | 01 /
PURKL, Fabian 724 Arastradero Road Apt. 313 Palo Alto, CA 94306 / US | 02 /
YAMA, Gary 1520 Gretel Lane Mountain View, CA 94040 / US | 03 /
FEYH, Ando 742 Encina Grande Drive Palo Alto, CA 94306 / US | 04 /
GRAHAM, Andrew 980 Hillcrest Drive Redwood City, CA 94062 / US | 05 /
SAMARAO, Ashwin 877 Heathstone Way 708 Mountain View, CA 94040 / US | 06 /
O'BRIEN, Gary 1540 Oak Creek Drive Apt. 302 Palo Alto, CA 94304 / US | [2016/08] | Representative(s) | (deleted) | [2022/37] |
| Former [2016/08] | Bee, Joachim Robert Bosch GmbH, C/IPE P.O. Box 30 02 20 70442 Stuttgart / DE | Application number, filing date | 13821342.6 | 20.12.2013 | [2016/08] | WO2013US77052 | Priority number, date | US201261740737P | 21.12.2012 Original published format: US 201261740737 P | [2016/08] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2014100648 | Date: | 26.06.2014 | Language: | EN | [2014/26] | Type: | A1 Application with search report | No.: | EP2986959 | Date: | 24.02.2016 | Language: | EN | The application published by WIPO in one of the EPO official languages on 26.06.2014 takes the place of the publication of the European patent application. | [2016/08] | Type: | B1 Patent specification | No.: | EP2986959 | Date: | 14.09.2022 | Language: | EN | [2022/37] | Search report(s) | International search report - published on: | EP | 26.06.2014 | Classification | IPC: | G01J5/04, G01J5/20 | [2016/08] | CPC: |
G01J5/045 (EP,US);
H10F77/50 (US);
G01J5/20 (EP,US);
H10F30/10 (US);
H10F71/00 (US)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2016/08] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | DÜNNSCHICHTGEKAPSELTER INFRAROTSENSOR | [2016/08] | English: | THIN-FILM ENCAPSULATED INFRARED SENSOR | [2016/08] | French: | CAPTEUR INFRAROUGE ENCAPSULÉ DANS UN FILM MINCE | [2016/08] | Entry into regional phase | 21.07.2015 | National basic fee paid | 21.07.2015 | Designation fee(s) paid | 21.07.2015 | Examination fee paid | Examination procedure | 21.07.2015 | Examination requested [2016/08] | 11.07.2016 | Amendment by applicant (claims and/or description) | 14.11.2019 | Despatch of a communication from the examining division (Time limit: M04) | 23.03.2020 | Reply to a communication from the examining division | 20.04.2022 | Communication of intention to grant the patent | 04.08.2022 | Fee for grant paid | 04.08.2022 | Fee for publishing/printing paid | 04.08.2022 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 14.11.2019 | Opposition(s) | 15.06.2023 | No opposition filed within time limit [2023/34] | Fees paid | Renewal fee | 04.01.2016 | Renewal fee patent year 03 | 02.01.2017 | Renewal fee patent year 04 | 02.01.2018 | Renewal fee patent year 05 | 02.01.2019 | Renewal fee patent year 06 | 02.01.2020 | Renewal fee patent year 07 | 11.01.2021 | Renewal fee patent year 08 | 03.01.2022 | Renewal fee patent year 09 |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 20.12.2013 | AL | 14.09.2022 | AT | 14.09.2022 | BG | 14.09.2022 | CY | 14.09.2022 | CZ | 14.09.2022 | DK | 14.09.2022 | EE | 14.09.2022 | ES | 14.09.2022 | FI | 14.09.2022 | HR | 14.09.2022 | IT | 14.09.2022 | LT | 14.09.2022 | LV | 14.09.2022 | MC | 14.09.2022 | MK | 14.09.2022 | MT | 14.09.2022 | NL | 14.09.2022 | PL | 14.09.2022 | RO | 14.09.2022 | RS | 14.09.2022 | SE | 14.09.2022 | SI | 14.09.2022 | SK | 14.09.2022 | SM | 14.09.2022 | TR | 14.09.2022 | NO | 14.12.2022 | GR | 15.12.2022 | IE | 20.12.2022 | LU | 20.12.2022 | BE | 31.12.2022 | CH | 31.12.2022 | LI | 31.12.2022 | IS | 14.01.2023 | PT | 16.01.2023 | [2024/41] |
| Former [2024/34] | HU | 20.12.2013 | |
| AL | 14.09.2022 | ||
| AT | 14.09.2022 | ||
| BG | 14.09.2022 | ||
| CY | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| IT | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| MC | 14.09.2022 | ||
| MK | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| TR | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2024/29] | HU | 20.12.2013 | |
| AL | 14.09.2022 | ||
| AT | 14.09.2022 | ||
| CY | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| IT | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| MC | 14.09.2022 | ||
| MK | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| TR | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2024/27] | HU | 20.12.2013 | |
| AL | 14.09.2022 | ||
| AT | 14.09.2022 | ||
| CY | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| IT | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| MK | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2024/26] | HU | 20.12.2013 | |
| AL | 14.09.2022 | ||
| AT | 14.09.2022 | ||
| CY | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| IT | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2024/21] | HU | 20.12.2013 | |
| AL | 14.09.2022 | ||
| AT | 14.09.2022 | ||
| CY | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2024/18] | HU | 20.12.2013 | |
| AL | 14.09.2022 | ||
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/49] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| BE | 31.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/48] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IE | 20.12.2022 | ||
| LU | 20.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/47] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| LU | 20.12.2022 | ||
| CH | 31.12.2022 | ||
| LI | 31.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/38] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| LU | 20.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/37] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SI | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/33] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| DK | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/30] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| NL | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/29] | AL | 14.09.2022 | |
| AT | 14.09.2022 | ||
| CZ | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/26] | AT | 14.09.2022 | |
| CZ | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| PL | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| IS | 14.01.2023 | ||
| PT | 16.01.2023 | ||
| Former [2023/23] | AT | 14.09.2022 | |
| CZ | 14.09.2022 | ||
| EE | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SK | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| PT | 16.01.2023 | ||
| Former [2023/22] | AT | 14.09.2022 | |
| CZ | 14.09.2022 | ||
| ES | 14.09.2022 | ||
| FI | 14.09.2022 | ||
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| RO | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| PT | 16.01.2023 | ||
| Former [2023/20] | FI | 14.09.2022 | |
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| SM | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| Former [2023/10] | FI | 14.09.2022 | |
| HR | 14.09.2022 | ||
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| GR | 15.12.2022 | ||
| Former [2023/09] | FI | 14.09.2022 | |
| LT | 14.09.2022 | ||
| LV | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| NO | 14.12.2022 | ||
| Former [2023/08] | FI | 14.09.2022 | |
| LT | 14.09.2022 | ||
| RS | 14.09.2022 | ||
| SE | 14.09.2022 | ||
| NO | 14.12.2022 | Cited in | International search | [XYI] EP1243903 (COMMISSARIAT ENERGIE ATOMIQUE et al.) [X] 1,11-14 * paragraphs [0032] , [0034] , [0039] , [0051] , [0053] , [0055] , [0059] , [0061] , [0065]; figures 1b, 2b, 4b, 5b, 6b *[Y] 8-10,17 [I] 2-7,15,16 | [X] EP2447688 (COMMISSARIAT ENERGIE ATOMIQUE et al.) [X] 1 * paragraphs [0092] - [0098]; figures 16-21 * | [Y] DE10058864 (SIEMENS AG et al.) [Y] 8-10,17 * paragraph [0034]; figure 1 * | Examination | YONEOKA S ET AL: "ALD-metal uncooled bolometer", IEEE 24TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS 2011), IEEE, US, 23 January 2011 (2011-01-23), pages 676 - 679, XP031982502, ISBN: 978-1-4244-9632-7, DOI: 10.1109/MEMSYS.2011.5734515 DOI: http://dx.doi.org/10.1109/MEMSYS.2011.5734515 |