-
EP2888758
European procedure
- EP About this file
- EP Legal status
- EP Federated register
- EP Event history
- EP Citations
- EP Patent family
- EP All documents
Extract from the Register of European Patents
EP About this file: EP2888758
| EP2888758 - COMPOSITIONS AND METHODS FOR SELECTIVE POLISHING OF PLATINUM AND RUTHENIUM MATERIALS [Right-click to bookmark this link] | Status | The application is deemed to be withdrawn Status updated on 26.04.2019 Database last updated on 18.11.2024 | |
| Former | Examination is in progress Status updated on 10.08.2018 | Most recent event Tooltip | 26.04.2019 | Application deemed to be withdrawn | published on 29.05.2019 [2019/22] | Applicant(s) | For all designated states Cabot Microelectronics Corporation 870 North Commons Drive Aurora, Illinois 60504 / US | [2015/27] | Inventor(s) | 01 /
JIN, Wiechang c/o Legal Department Cabot Microelectronics Corporation 870 North Commons Drive Aurora, Illinois 60504 / US | 02 /
REMSEN, Elizabeth c/o Legal Department Cabot Microelectronics Corporation 870 North Commons Drive Aurora, Illinois 60504 / US | [2015/27] | Representative(s) | Barker Brettell LLP 100 Hagley Road Edgbaston Birmingham B16 8QQ / GB | [N/P] |
| Former [2015/27] | Trueman, Lucy Petra Barker Brettell LLP 100 Hagley Road Edgbaston Birmingham B16 8QQ / GB | Application number, filing date | 13830251.8 | 15.08.2013 | WO2013US55071 | Priority number, date | US201213593634 | 24.08.2012 Original published format: US201213593634 | [2015/27] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2014031427 | Date: | 27.02.2014 | Language: | EN | [2014/09] | Type: | A1 Application with search report | No.: | EP2888758 | Date: | 01.07.2015 | Language: | EN | The application published by WIPO in one of the EPO official languages on 27.02.2014 takes the place of the publication of the European patent application. | [2015/27] | Search report(s) | International search report - published on: | KR | 27.02.2014 | (Supplementary) European search report - dispatched on: | EP | 23.03.2016 | Classification | IPC: | H01L21/304 | [2015/27] | CPC: |
C23F3/06 (EP,CN,US);
C09K3/1463 (EP,CN,US);
B24B1/00 (US);
C09G1/00 (US);
C09G1/02 (EP,CN,US);
C09G1/04 (US);
C09G1/06 (US);
C09K13/06 (US);
C09K3/1409 (US);
C23F3/04 (EP,CN,US);
H01L21/30625 (US);
H01L21/31053 (EP,CN,US);
H01L21/3212 (EP,CN,US)
(-)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2015/27] | Title | German: | ZUSAMMENSETZUNGEN UND VERFAHREN ZUR SELEKTIVEN POLIEREN VON PLATIN- UND RUTHENIUMMATERIALIEN | [2015/27] | English: | COMPOSITIONS AND METHODS FOR SELECTIVE POLISHING OF PLATINUM AND RUTHENIUM MATERIALS | [2015/27] | French: | COMPOSITIONS ET PROCÉDÉS POUR POLISSAGE SÉLECTIF DE MATÉRIAUX DE PLATINE ET DE RUTHÉNIUM | [2015/27] | Entry into regional phase | 23.03.2015 | National basic fee paid | 23.03.2015 | Search fee paid | 23.03.2015 | Designation fee(s) paid | 23.03.2015 | Examination fee paid | Examination procedure | 23.03.2015 | Examination requested [2015/27] | 10.10.2016 | Amendment by applicant (claims and/or description) | 13.08.2018 | Despatch of a communication from the examining division (Time limit: M04) | 03.01.2019 | Application deemed to be withdrawn, date of legal effect [2019/22] | 21.01.2019 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time [2019/22] | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 13.08.2018 | Fees paid | Renewal fee | 07.08.2015 | Renewal fee patent year 03 | 05.08.2016 | Renewal fee patent year 04 | 10.08.2017 | Renewal fee patent year 05 | Penalty fee | Additional fee for renewal fee | 31.08.2018 | 06 M06 Not yet paid |
| Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [X]US2003119319 (SINHA NISHANT [US], et al); | [X]US2003181142 (DE REGE THESAURO FRANCESCO [US], et al); | [A]US2006219663 (WANG SHI-PING [US], et al); | [X]US2009004863 (KAMIMURA TETSUYA [JP]); | [X]US2009124173 (LI SHOUTIAN [US]); | [X]US2010216309 (MINAMI HISATAKA [JP], et al) | International search | [A]US2009236559 (BRUSIC VLASTA [US], et al); | [A]US2010200802 (GRUMBINE STEVEN K [US], et al); | [A]US2010178768 (LI YUZHUO [DE]); | [A]US2008070412 (YOSHIDA IORI [JP], et al); | [A]US2009035942 (WHITE DANIELA [US], et al) | Examination | WO2005019364 |