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Extract from the Register of European Patents

EP About this file: EP2738605

EP2738605 - Developer for resist pattern-forming method [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  10.06.2016
Database last updated on 15.11.2024
Most recent event   Tooltip10.06.2016Application deemed to be withdrawnpublished on 13.07.2016  [2016/28]
Applicant(s)For all designated states
JSR Corporation
9-2 Higashi-Shinbashi 1-chome
Minato-ku
Tokyo 105-8640 / JP
[2014/23]
Inventor(s)01 / Furukawa, Taiichi
c/o JSR CORPORATION
9-2, Higashi-Shinbashi 1-chome
Minato-ku, Tokyo 105-8640 / JP
02 / Sakakibara, Hirokazu
c/o JSR CORPORATION
9-2, Higashi-Shinbashi 1-chome
Minato-ku, Tokyo 105-8640 / JP
 [2014/23]
Representative(s)TBK
Bavariaring 4-6
80336 München / DE
[2014/23]
Application number, filing date14150102.326.03.2012
[2014/23]
Priority number, dateJP2011012369701.06.2011         Original published format: JP 2011123697
JP2011015048006.07.2011         Original published format: JP 2011150480
[2014/23]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2738605
Date:04.06.2014
Language:EN
[2014/23]
Type: A3 Search report 
No.:EP2738605
Date:08.07.2015
Language:EN
[2015/28]
Search report(s)(Supplementary) European search report - dispatched on:EP05.06.2015
ClassificationIPC:G03F7/039, G03F7/32
[2014/23]
CPC:
G03F7/0397 (EP,KR); G03F7/0045 (KR); G03F7/0047 (KR);
G03F7/0392 (KR); G03F7/095 (EP,KR); G03F7/26 (KR);
G03F7/32 (KR); G03F7/325 (EP,KR) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2014/23]
TitleGerman:Entwickler für ein Verfahren zur Bildung von Resistmustern[2014/23]
English:Developer for resist pattern-forming method[2014/23]
French:Révélateur pour un procédé de formation de motif de resérve[2014/23]
Examination procedure03.01.2014Examination requested  [2014/23]
09.01.2016Application deemed to be withdrawn, date of legal effect  [2016/28]
17.02.2016Despatch of communication that the application is deemed to be withdrawn, reason: examination fee not paid in time  [2016/28]
Parent application(s)   TooltipEP12161159.4  / EP2530525
Fees paidRenewal fee
28.03.2014Renewal fee patent year 03
30.03.2015Renewal fee patent year 04
Penalty fee
Additional fee for renewal fee
31.03.201605   M06   Not yet paid
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Documents cited:Search[X]US3704257  (MOD ROBERT R, et al) [X] 1 * examples 1,11 *;
 [A]WO2010140709  (FUJIFILM CORP [JP], et al) [A] 1-8 * claims 1,4 * * page 31, line 10 - page 33, line 12 * * page 126, line 3 - page 127, line 20 * * page 145; compounds B-1, A1 * * examples 33,42,49,58 *;
 [A]US2010323305  (TSUBAKI HIDEAKI [JP], et al) [A] 1-8 * page 79; examples 38,44; table 6 *
 [XI]  - A. W. RALSTON ET AL, "SOLUBILITIES OF HIGH MOLECULAR WEIGHT NORMAL ALIPHATIC PRIMARY AMINES", THE JOURNAL OF ORGANIC CHEMISTRY, (19440101), vol. 9, no. 1, doi:10.1021/jo01183a012, ISSN 0022-3263, pages 102 - 112, XP055039329 [X] 1-7,9 * tables III-XVI * [I] 8

DOI:   http://dx.doi.org/10.1021/jo01183a012
by applicantJP2000199953
 JPH0612452B
 JPS5993448
 JPH05188598
 JP2005352384
 WO2007116664
 EP2530525
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.