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Extract from the Register of European Patents

EP About this file: EP3127141

EP3127141 - METHOD FOR THE SURFACE CLEANING OF SUBSTRATES [Right-click to bookmark this link]
Former [2017/06]METHOD AND DEVICE FOR THE SURFACE TREATMENT OF SUBSTRATES
[2020/44]
StatusNo opposition filed within time limit
Status updated on  04.02.2022
Database last updated on 03.10.2024
FormerThe patent has been granted
Status updated on  19.02.2021
FormerGrant of patent is intended
Status updated on  29.10.2020
FormerExamination is in progress
Status updated on  15.04.2019
FormerRequest for examination was made
Status updated on  06.01.2017
FormerThe international publication has been made
Status updated on  21.12.2016
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024 [2024/41]
Applicant(s)For all designated states
EV Group E. Thallner GmbH
DI Erich Thallner Strasse 1
4782 St. Florian am Inn / AT
[2017/06]
Inventor(s)01 / RAZEK, Nasser
Zwickledt 30/2
4783 Wernstein / AT
 [2017/06]
Representative(s)Schneider, Sascha, et al
Becker & Müller
Patentanwälte
Turmstraße 22
40878 Ratingen / DE
[2017/06]
Application number, filing date14715265.601.04.2014
[2017/06]
WO2014EP56545
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2015149846
Date:08.10.2015
Language:DE
[2015/40]
Type: A1 Application with search report 
No.:EP3127141
Date:08.02.2017
Language:DE
The application published by WIPO in one of the EPO official languages on 08.10.2015 takes the place of the publication of the European patent application.
[2017/06]
Type: B1 Patent specification 
No.:EP3127141
Date:24.03.2021
Language:DE
[2021/12]
Search report(s)International search report - published on:EP08.10.2015
ClassificationIPC:H01L21/02, H01L21/67, H01J37/32, C23C14/02
[2020/44]
CPC:
H01L21/02046 (EP,KR,US); H01L21/3065 (KR); C23C14/022 (EP,KR,US);
C23C16/50 (US); H01J37/32009 (EP,US); H01L21/02315 (KR);
H01L21/0234 (KR); H01L21/67028 (EP,KR,US); H01L21/67069 (KR);
H01J2237/08 (EP,KR,US); H01J2237/3137 (EP,KR,US); H01J2237/3151 (EP,KR,US) (-)
Former IPC [2017/06]H01L21/02, C23C14/02
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/06]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:VERFAHREN ZUR OBERFLÄCHENREINIGUNG VON SUBSTRATEN[2020/44]
English:METHOD FOR THE SURFACE CLEANING OF SUBSTRATES[2020/44]
French:PROCÉDÉ DE NETTOYAGE DE SURFACE DE SUBSTRATS[2020/44]
Former [2017/06]VERFAHREN UND VORRICHTUNG ZUR OBERFLÄCHENBEHANDLUNG VON SUBSTRATEN
Former [2017/06]METHOD AND DEVICE FOR THE SURFACE TREATMENT OF SUBSTRATES
Former [2017/06]PROCÉDÉ ET DISPOSITIF DE TRAITEMENT DE SURFACE DE SUBSTRATS
Entry into regional phase19.10.2016National basic fee paid 
19.10.2016Designation fee(s) paid 
19.10.2016Examination fee paid 
Examination procedure27.03.2015Request for preliminary examination filed
International Preliminary Examining Authority: EP
19.10.2016Amendment by applicant (claims and/or description)
19.10.2016Examination requested  [2017/06]
19.10.2016Date on which the examining division has become responsible
18.04.2019Despatch of a communication from the examining division (Time limit: M04)
12.08.2019Reply to a communication from the examining division
04.12.2019Despatch of a communication from the examining division (Time limit: M04)
02.04.2020Reply to a communication from the examining division
30.10.2020Communication of intention to grant the patent
15.02.2021Fee for grant paid
15.02.2021Fee for publishing/printing paid
15.02.2021Receipt of the translation of the claim(s)
Divisional application(s)EP21157175.7  / EP3859766
Opposition(s)04.01.2022No opposition filed within time limit [2022/10]
Fees paidRenewal fee
19.10.2016Renewal fee patent year 03
06.03.2017Renewal fee patent year 04
09.04.2018Renewal fee patent year 05
17.04.2019Renewal fee patent year 06
09.04.2020Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU01.04.2014
AL24.03.2021
CY24.03.2021
CZ24.03.2021
DK24.03.2021
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FI24.03.2021
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IE01.04.2021
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FR24.05.2021
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GR25.06.2021
IS24.07.2021
PT26.07.2021
[2024/41]
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PT26.07.2021
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Cited inInternational search[XI]JPS6187338  (NEC CORP);
 [XI]JPS61160938  (NEC CORP);
 [AD]DE10210253  (INST OBERFLAECHENMODIFIZIERUNG [DE]);
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.