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Extract from the Register of European Patents

EP About this file: EP3020066

EP3020066 - DEVICE FOR REMOVING A RING-SHAPED REINFORCEMENT EDGE FROM A GROUND SEMICONDUCTOR WAFER [Right-click to bookmark this link]
Former [2016/20]APPARATUS FOR REMOVING A RING-SHAPED REINFORCEMENT EDGE FROM A GROUND SEMICONDUCTOR WAFER
[2021/04]
StatusNo opposition filed within time limit
Status updated on  11.11.2022
Database last updated on 03.09.2024
FormerThe patent has been granted
Status updated on  03.12.2021
FormerGrant of patent is intended
Status updated on  10.07.2021
FormerRequest for examination was made
Status updated on  02.06.2021
FormerGrant of patent is intended
Status updated on  21.01.2021
Most recent event   Tooltip27.04.2024Lapse of the patent in a contracting state
New state(s): MK		published on 29.05.2024  [2024/22]
Applicant(s)For all designated states
mechatronic Systemtechnik GmbH
Tiroler Straße 80
9500 Villach / AT
[2021/29]
Former [2016/20]For all designated states
Mechatronic Systemtechnik GmbH
Tiroler Strasse 80
9500 Villach / AT
Inventor(s)01 / SCHOBER, Walter
Sonnenweg 8
A-9232 St. Martin/Rosegg / AT
 [2016/20]
Representative(s)Jell, Friedrich
Bismarckstrasse 9
4020 Linz / AT
[2016/20]
Application number, filing date14744291.710.07.2014
[2016/20]
WO2014EP64877
Priority number, dateEP2013017588010.07.2013         Original published format: EP 13175880
[2016/20]
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2015004262
Date:15.01.2015
Language:DE
[2015/02]
Type: A1 Application with search report 
No.:EP3020066
Date:18.05.2016
Language:DE
The application published by WIPO in one of the EPO official languages on 15.01.2015 takes the place of the publication of the European patent application.
[2016/20]
Type: B1 Patent specification 
No.:EP3020066
Date:05.01.2022
Language:DE
[2022/01]
Search report(s)International search report - published on:EP15.01.2015
ClassificationIPC:H01L21/67
[2016/20]
CPC:
H01L21/67132 (EP,US); H01L21/67092 (EP,US); H01L21/67115 (US);
H01L21/6836 (US); B32B38/10 (US); B32B43/006 (US);
H01L2221/68381 (US); Y10T156/1132 (EP,US); Y10T156/1158 (EP,US);
Y10T156/1184 (EP,US); Y10T156/1917 (EP,US); Y10T156/1944 (EP,US);
Y10T156/1967 (EP,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/20]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:VORRICHTUNG ZUM ENTFERNEN EINES RINGFÖRMIGEN VERSTÄRKUNGSRANDS VON EINEM GESCHLIFFENEN HALBLEITERWAFER[2016/20]
English:DEVICE FOR REMOVING A RING-SHAPED REINFORCEMENT EDGE FROM A GROUND SEMICONDUCTOR WAFER[2021/04]
French:DISPOSITIF D'ÉLIMINATION D'UNE COLLERETTE ANNULAIRE SUR UNE TRANCHE SEMI-CONDUCTRICE RECTIFIÉE[2021/04]
Former [2016/20]APPARATUS FOR REMOVING A RING-SHAPED REINFORCEMENT EDGE FROM A GROUND SEMICONDUCTOR WAFER
Former [2016/20]DISPOSITIF PERMETTANT D'ÉLIMINER UN BORD DE RENFORT ANNULAIRE D'UNE TRANCHE À SEMI-CONDUCTEUR RECTIFIÉE
Entry into regional phase10.02.2016National basic fee paid 
10.02.2016Designation fee(s) paid 
10.02.2016Examination fee paid 
Examination procedure10.02.2016Examination requested  [2016/20]
10.10.2016Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time
16.12.2016Amendment by applicant (claims and/or description)
22.01.2021Communication of intention to grant the patent
01.06.2021Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
01.06.2021Fee for grant paid
01.06.2021Fee for publishing/printing paid
19.07.2021Communication of intention to grant the patent
26.11.2021Receipt of the translation of the claim(s)
Opposition(s)06.10.2022No opposition filed within time limit [2022/50]
Request for further processing for:16.12.2016Request for further processing filed
16.12.2016Full payment received (date of receipt of payment)
Request granted
04.01.2017Decision despatched
16.12.2016Request for further processing filed
16.12.2016Full payment received (date of receipt of payment)
Request granted
04.01.2017Decision despatched
Fees paidRenewal fee
01.08.2016Renewal fee patent year 03
31.07.2017Renewal fee patent year 04
31.07.2018Renewal fee patent year 05
31.07.2019Renewal fee patent year 06
31.07.2020Renewal fee patent year 07
02.08.2021Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU10.07.2014
AL05.01.2022
CY05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
MK05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
GB10.07.2022
IE10.07.2022
LU10.07.2022
BE31.07.2022
CH31.07.2022
LI31.07.2022
[2024/22]
Former [2024/20]HU10.07.2014
AL05.01.2022
CY05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
GB10.07.2022
IE10.07.2022
LU10.07.2022
BE31.07.2022
CH31.07.2022
LI31.07.2022
Former [2024/18]HU10.07.2014
AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
GB10.07.2022
IE10.07.2022
LU10.07.2022
BE31.07.2022
CH31.07.2022
LI31.07.2022
Former [2023/33]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
GB10.07.2022
IE10.07.2022
LU10.07.2022
BE31.07.2022
CH31.07.2022
LI31.07.2022
Former [2023/27]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
GB10.07.2022
LU10.07.2022
BE31.07.2022
CH31.07.2022
LI31.07.2022
Former [2023/25]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
LU10.07.2022
BE31.07.2022
CH31.07.2022
LI31.07.2022
Former [2023/21]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
LU10.07.2022
CH31.07.2022
LI31.07.2022
Former [2023/11]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
MC05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2023/10]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SI05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2023/01]AL05.01.2022
CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/49]CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SK05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/48]CZ05.01.2022
DK05.01.2022
EE05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/47]DK05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RO05.01.2022
RS05.01.2022
SE05.01.2022
SM05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/46]DK05.01.2022
ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/42]ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
IS05.05.2022
PT05.05.2022
Former [2022/39]ES05.01.2022
FI05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
PT05.05.2022
Former [2022/36]ES05.01.2022
HR05.01.2022
LT05.01.2022
LV05.01.2022
NL05.01.2022
PL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
GR06.04.2022
PT05.05.2022
Former [2022/35]ES05.01.2022
HR05.01.2022
LT05.01.2022
NL05.01.2022
RS05.01.2022
SE05.01.2022
BG05.04.2022
NO05.04.2022
PT05.05.2022
Former [2022/34]ES05.01.2022
LT05.01.2022
NL05.01.2022
NO05.04.2022
PT05.05.2022
Former [2022/33]LT05.01.2022
NL05.01.2022
NO05.04.2022
Former [2022/30]NL05.01.2022
Cited inInternational search[Y]US2010055877  (KAJIYAMA KEIICHI [JP], et al) [Y] 1-12 * paragraph [0039] - paragraph [0057] * * figures 13-15 *;
 [Y]US2009165277  (ZUSSY MARC [FR], et al) [Y] 1-12 * paragraph [0184] - paragraph [0189] * * figures 30,31 *;
 [A]US4403567  (DACOSTA HARRY [US], et al) [A] 1,12 * column 3, line 4 - line 20 * * figures 2,6 *;
 [A]JP2007059829  (DISCO ABRASIVE SYSTEMS LTD) [A] 1 * the whole document *;
 [A]DE102010039798  (DISCO CORP [JP]) [A] 1 * the whole document *;
 [A]US2007077731  (MASUDA TAKATOSHI [JP]) [A] 1 * the whole document *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.