EP2973663 - ADJUSTABLE MASS RESOLVING APERTURE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 22.02.2019 Database last updated on 16.11.2024 | |
Former | The patent has been granted Status updated on 16.03.2018 | ||
Former | Grant of patent is intended Status updated on 26.10.2017 | Most recent event Tooltip | 01.07.2022 | Lapse of the patent in a contracting state New state(s): MK | published on 03.08.2022 [2022/31] | Applicant(s) | For all designated states GLENN LANE FAMILY LIMITED LIABILITY LIMITED PARTNERSHIP 10935 S.E. 177th Place, Suite 305 Summerfield 34491 / US | [2016/03] | Inventor(s) | 01 /
LANE, Glenn, E. 10935 S.E. 177th Place Suite 305 Summerfield, FL 34491 / US | [2016/03] | Representative(s) | Müller Verweyen Patentanwälte Friedensallee 290 22763 Hamburg / DE | [2016/03] | Application number, filing date | 14764536.0 | 17.03.2014 | [2016/03] | WO2014US30744 | Priority number, date | US201361800855P | 15.03.2013 Original published format: US 201361800855 P | [2016/03] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | WO2014145898 | Date: | 18.09.2014 | Language: | EN | [2014/38] | Type: | A2 Application without search report | No.: | EP2973663 | Date: | 20.01.2016 | Language: | EN | The application published by WIPO in one of the EPO official languages on 18.09.2014 takes the place of the publication of the European patent application. | [2016/03] | Type: | B1 Patent specification | No.: | EP2973663 | Date: | 18.04.2018 | Language: | EN | [2018/16] | Search report(s) | International search report - published on: | KR | 26.02.2015 | (Supplementary) European search report - dispatched on: | EP | 02.09.2016 | Classification | IPC: | H01J37/317, H01J37/09 | [2016/40] | CPC: |
H01J37/08 (EP,US);
H01J37/3007 (US);
C23C14/48 (US);
C23C14/54 (US);
H01J37/09 (EP,US);
H01J37/3171 (EP,US);
H01J49/062 (US);
H01J2237/0213 (EP,US);
H01J2237/04 (US);
H01J2237/0455 (EP,US);
H01J2237/152 (US);
H01J2237/31701 (US);
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Former IPC [2016/03] | H01L21/265, H01J37/317 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2016/03] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | EINSTELLBARE MASSENAUFLÖSUNGSAPERTUR | [2016/03] | English: | ADJUSTABLE MASS RESOLVING APERTURE | [2016/03] | French: | OUVERTURE DE RÉSOLUTION DE MASSE AJUSTABLE | [2016/03] | Entry into regional phase | 08.10.2015 | National basic fee paid | 08.10.2015 | Search fee paid | 08.10.2015 | Designation fee(s) paid | 08.10.2015 | Examination fee paid | Examination procedure | 08.10.2015 | Examination requested [2016/03] | 30.03.2017 | Amendment by applicant (claims and/or description) | 27.10.2017 | Communication of intention to grant the patent | 06.03.2018 | Fee for grant paid | 06.03.2018 | Fee for publishing/printing paid | 06.03.2018 | Receipt of the translation of the claim(s) | Divisional application(s) | The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is 27.10.2017 | Opposition(s) | 21.01.2019 | No opposition filed within time limit [2019/13] | Fees paid | Renewal fee | 10.03.2016 | Renewal fee patent year 03 | 27.03.2017 | Renewal fee patent year 04 | 07.03.2018 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 17.03.2014 | AL | 18.04.2018 | AT | 18.04.2018 | CY | 18.04.2018 | CZ | 18.04.2018 | DK | 18.04.2018 | EE | 18.04.2018 | ES | 18.04.2018 | FI | 18.04.2018 | HR | 18.04.2018 | IT | 18.04.2018 | LT | 18.04.2018 | LV | 18.04.2018 | MC | 18.04.2018 | MK | 18.04.2018 | NL | 18.04.2018 | PL | 18.04.2018 | RO | 18.04.2018 | RS | 18.04.2018 | SE | 18.04.2018 | SI | 18.04.2018 | SK | 18.04.2018 | SM | 18.04.2018 | TR | 18.04.2018 | BG | 18.07.2018 | NO | 18.07.2018 | GR | 19.07.2018 | IS | 18.08.2018 | PT | 20.08.2018 | [2022/31] |
Former [2021/32] | HU | 17.03.2014 | |
AL | 18.04.2018 | ||
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CZ | 18.04.2018 | ||
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EE | 18.04.2018 | ||
ES | 18.04.2018 | ||
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HR | 18.04.2018 | ||
IT | 18.04.2018 | ||
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MC | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SI | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
TR | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
IS | 18.08.2018 | ||
PT | 20.08.2018 | ||
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CZ | 18.04.2018 | ||
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LV | 18.04.2018 | ||
MC | 18.04.2018 | ||
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PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SI | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
TR | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
IS | 18.08.2018 | ||
PT | 20.08.2018 | ||
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AT | 18.04.2018 | ||
CY | 18.04.2018 | ||
CZ | 18.04.2018 | ||
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EE | 18.04.2018 | ||
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
IT | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
MC | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SI | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
TR | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
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EE | 18.04.2018 | ||
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
IT | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
MC | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SI | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
TR | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
Former [2019/46] | AL | 18.04.2018 | |
AT | 18.04.2018 | ||
CZ | 18.04.2018 | ||
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EE | 18.04.2018 | ||
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LV | 18.04.2018 | ||
MC | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SI | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
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CZ | 18.04.2018 | ||
DK | 18.04.2018 | ||
EE | 18.04.2018 | ||
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LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
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RS | 18.04.2018 | ||
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SI | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
Former [2019/11] | AL | 18.04.2018 | |
AT | 18.04.2018 | ||
CZ | 18.04.2018 | ||
DK | 18.04.2018 | ||
EE | 18.04.2018 | ||
ES | 18.04.2018 | ||
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LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
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PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SK | 18.04.2018 | ||
SM | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
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AT | 18.04.2018 | ||
CZ | 18.04.2018 | ||
DK | 18.04.2018 | ||
EE | 18.04.2018 | ||
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RO | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
SK | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
Former [2019/09] | AL | 18.04.2018 | |
DK | 18.04.2018 | ||
EE | 18.04.2018 | ||
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
Former [2019/08] | AL | 18.04.2018 | |
DK | 18.04.2018 | ||
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
Former [2019/03] | AL | 18.04.2018 | |
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
PT | 20.08.2018 | ||
Former [2018/52] | AL | 18.04.2018 | |
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
GR | 19.07.2018 | ||
Former [2018/51] | AL | 18.04.2018 | |
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
LV | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
RS | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
Former [2018/50] | AL | 18.04.2018 | |
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
HR | 18.04.2018 | ||
LT | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
Former [2018/49] | AL | 18.04.2018 | |
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
LT | 18.04.2018 | ||
NL | 18.04.2018 | ||
PL | 18.04.2018 | ||
SE | 18.04.2018 | ||
BG | 18.07.2018 | ||
NO | 18.07.2018 | ||
Former [2018/47] | AL | 18.04.2018 | |
ES | 18.04.2018 | ||
FI | 18.04.2018 | ||
LT | 18.04.2018 | ||
NL | 18.04.2018 | ||
NO | 18.07.2018 | ||
Former [2018/46] | AL | 18.04.2018 | |
LT | 18.04.2018 | ||
NL | 18.04.2018 | ||
NO | 18.07.2018 | ||
Former [2018/43] | NL | 18.04.2018 | Documents cited: | Search | [A]US3150257 (WILSKA ALVAR P)[A] 1-15; | [A]WO2012161745 (AXCELIS TECH INC [US], et al) [A] 1-15 * figures 4a,4b * | International search | [A]US2002066872 (NISHIHASHI TSUTOMU [JP], et al); | [A]JP2006156259 (SUMITOMO EATON NOVA [JP]); | [A]US2008061228 (VANDERBERG BO H [US], et al); | [A]US2008078949 (BENVENISTE VICTOR [US]); | [A]US2011315867 (LANE GLENN [US]) | by applicant | US5189303 | US6803590 | US7399980 | US8368033 | US8637838 |