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Extract from the Register of European Patents

EP About this file: EP3036510

EP3036510 - PRESSURE-BASED GAS FLOW CONTROLLER WITH DYNAMIC SELF-CALIBRATION [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  15.04.2022
Database last updated on 21.08.2024
FormerThe patent has been granted
Status updated on  07.05.2021
FormerGrant of patent is intended
Status updated on  20.12.2020
FormerExamination is in progress
Status updated on  19.02.2020
Most recent event   Tooltip27.04.2024Lapse of the patent in a contracting state
New state(s): MK		published on 29.05.2024  [2024/22]
Applicant(s)For all designated states
Horwitz, Christopher, Max
2200 Beechwood Boulevard
Pittsburgh, PA 15217 / US
[2016/26]
Inventor(s)01 / see applicant
...
 [2016/26]
Representative(s)Stratagem IPM Limited
Meridian Court
Comberton Road
Toft, Cambridge CB23 2RY / GB
[2021/23]
Former [2016/26]Emerson, Peter James
Page Hargrave Whitefriars Lewins Mead
Bristol BS1 2NT / GB
Application number, filing date14769464.014.03.2014
[2016/26]
WO2014US27698
Priority number, dateUS201361785235P14.03.2013         Original published format: US 201361785235 P
[2016/26]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report
No.:WO2014152755
Date:25.09.2014
Language:EN
[2014/39]
Type: A2 Application without search report 
No.:EP3036510
Date:29.06.2016
Language:EN
The application published by WIPO in one of the EPO official languages on 25.09.2014 takes the place of the publication of the European patent application.
[2016/26]
Type: B1 Patent specification 
No.:EP3036510
Date:09.06.2021
Language:EN
[2021/23]
Search report(s)International search report - published on:US31.12.2014
(Supplementary) European search report - dispatched on:EP11.05.2017
ClassificationIPC:G01F1/00, E03B1/00, G01F25/00, G05D7/06
[2017/23]
CPC:
G05D7/0635 (EP,US); G01F1/76 (US); G01F1/86 (US);
G01F1/88 (US); G01F25/15 (EP,US)
Former IPC [2016/26]G01F1/00, E03B1/00
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2016/26]
TitleGerman:DRUCKBASIERTE GASSTRÖMUNGSSTEUERUNG MIT DYNAMISCHER SELBSTKALIBRIERUNG[2016/26]
English:PRESSURE-BASED GAS FLOW CONTROLLER WITH DYNAMIC SELF-CALIBRATION[2016/26]
French:DISPOSITIF DE COMMANDE D'ÉCOULEMENT DE GAZ BASÉ SUR LA PRESSION ET PRÉSENTANT UN AUTO-ÉTALONNAGE DYNAMIQUE[2016/26]
Entry into regional phase19.01.2016National basic fee paid 
19.01.2016Search fee paid 
19.01.2016Designation fee(s) paid 
19.01.2016Examination fee paid 
Examination proceduredeletedDeletion: Application deemed to be withdrawn, date of legal effect  [2016/26]
20.11.2015Despatch of communication that the application is deemed to be withdrawn, reason: filing fee / search fee not paid in time  [2016/26]
19.01.2016Examination requested  [2016/26]
24.11.2017Amendment by applicant (claims and/or description)
24.02.2020Despatch of a communication from the examining division (Time limit: M04)
02.07.2020Reply to a communication from the examining division
21.12.2020Communication of intention to grant the patent
29.04.2021Fee for grant paid
29.04.2021Fee for publishing/printing paid
29.04.2021Receipt of the translation of the claim(s)
Divisional application(s)The date of the Examining Division's first communication in respect of the earliest application for which a communication has been issued is  24.02.2020
Opposition(s)10.03.2022No opposition filed within time limit [2022/20]
Request for further processing for:The application is deemed to be withdrawn due to non-payment of the search fee
19.01.2016Request for further processing filed
19.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
19.01.2016Request for further processing filed
19.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
The application is deemed to be withdrawn due to non-payment of the filing fee
19.01.2016Request for further processing filed
19.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
The application is deemed to be withdrawn due to non-payment of the examination fee
19.01.2016Request for further processing filed
19.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
19.01.2016Request for further processing filed
19.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
The application is deemed to be withdrawn due to non-payment of designation fees
TR, SM, SK, SI, SE, RS, RO, PT, PL, NO, NL, MT, MK, MC, LV, LU, LT, IT, IS, IE, HU, HR, GR, GB, FR, FI, ES, EE, DK, DE, CZ, CY, CH, BG, BE, AT, AL
19.01.2016Request for further processing filed
19.01.2016Full payment received (date of receipt of payment)
Request granted
26.01.2016Decision despatched
Fees paidRenewal fee
24.03.2016Renewal fee patent year 03
24.03.2017Renewal fee patent year 04
23.03.2018Renewal fee patent year 05
27.03.2019Renewal fee patent year 06
24.03.2020Renewal fee patent year 07
23.03.2021Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU14.03.2014
AL09.06.2021
AT09.06.2021
CY09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
IT09.06.2021
LT09.06.2021
LV09.06.2021
MC09.06.2021
MK09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SI09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
[2024/22]
Former [2024/20]HU14.03.2014
AL09.06.2021
AT09.06.2021
CY09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
IT09.06.2021
LT09.06.2021
LV09.06.2021
MC09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SI09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2024/18]HU14.03.2014
AL09.06.2021
AT09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
IT09.06.2021
LT09.06.2021
LV09.06.2021
MC09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SI09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/47]AL09.06.2021
AT09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
IT09.06.2021
LT09.06.2021
LV09.06.2021
MC09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SI09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/36]AL09.06.2021
AT09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
IT09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SI09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/29]AL09.06.2021
AT09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SI09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/26]AL09.06.2021
AT09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/21]AT09.06.2021
CZ09.06.2021
DK09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/10]AT09.06.2021
CZ09.06.2021
EE09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
PL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
IS09.10.2021
PT11.10.2021
Former [2022/09]AT09.06.2021
CZ09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
RO09.06.2021
RS09.06.2021
SE09.06.2021
SK09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
PT11.10.2021
Former [2022/08]AT09.06.2021
CZ09.06.2021
ES09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
RS09.06.2021
SE09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
Former [2022/07]AT09.06.2021
FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
NL09.06.2021
RS09.06.2021
SE09.06.2021
SM09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
Former [2021/51]FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
RS09.06.2021
SE09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
Former [2021/49]FI09.06.2021
HR09.06.2021
LT09.06.2021
LV09.06.2021
SE09.06.2021
BG09.09.2021
NO09.09.2021
GR10.09.2021
Former [2021/47]FI09.06.2021
LT09.06.2021
BG09.09.2021
Former [2021/46]FI09.06.2021
LT09.06.2021
Documents cited:Search[Y]US4285245  (KENNEDY LYN R) [Y] 1-16 * the whole document *;
 [Y]US2003000578  (LOWERY PATRICK A [US], et al) [Y] 1-16 * the whole document *;
 [Y]US2003234039  (SHAJII ALI [US], et al) [Y] 1-16* the whole document *;
 [Y]US2009143998  (DE CRISTOFARO FERDINANDO [IT], et al) [Y] 1-16 * the whole document *
International search[X]WO0073868  (CYBER INSTR TECHNOLOGY LLC [US]);
 [Y]US2002198668  (LULL JOHN M [US], et al);
 [X]US2003000578  (LOWERY PATRICK A [US], et al);
 [Y]US2008300802  (LAKHANI IQBAL [CA], et al);
 [Y]US2009143998  (DE CRISTOFARO FERDINANDO [IT], et al);
 [Y]US2011220213  (CABRERA RAFAEL A [US], et al)
by applicantUS4285245
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 US7225085
 US7243538
 US2008035202
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 US7424346
 US7424895
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 US2010251828
 US7823436
 US7975558
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 US8205629
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    - C. M. HORWITZ, "Simple Calibrated Gas Feed System", Rev. Sci. Instrum., (19790500), vol. 50, no. 5, pages 652 - 654
    - BROWN, ROBERT L.SCHWARTZ, JAMES M., "Pressure based mass flow control for ion implant SDS applications", Proceedings of International Conference on Ion Implantation Technology, (19980000), vol. 1, doi:10.1109/IIT.1999.812130, pages 369 - 372, XP010362005

DOI:   http://dx.doi.org/10.1109/IIT.1999.812130
    - J. J. SULLIVANS. SCHAFFERR. P. JACOBS, "Mass flow measurement and control of low vapor pressure sources", J. Vac. Sci. Technol. A, (19890000), vol. 7, no. 3, pages 2387 - 2393
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.