blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP3186189

EP3186189 - 3-DOF MEMS PISTON-TUBE ELECTROSTATIC MICROACTUATOR [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  04.09.2020
Database last updated on 02.11.2024
FormerRequest for examination was made
Status updated on  02.06.2017
FormerThe international publication has been made
Status updated on  27.01.2017
Most recent event   Tooltip24.08.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
Sheba Microsystems Inc.
MaRS Centre, South Tower
101 College Street
Suite 200
Toronto, ON M5G 1L7 / CA
[2020/23]
Former [2017/27]For all designated states
Ba-Tis, Faez
130 Konrad Crescent
Unit 11
Markham, ON L3R 0G5 / CA
For all designated states
Ben-Mrad, Ridha
130 Konrad Crescent
Unit 11
Markham, ON L3R 0G5 / CA
Inventor(s)01 / Ba-Tis, Faez
4303-95 Thorncliffe Park Dr.
East York, ON M4H 1L7 / CA
02 / Ben-Mrad, Ridha
17 Burnaby Blvd.
Toronto, ON M4R 1B5 / CA
[N/P]
Former [2017/27]01 / see applicant
...
Representative(s)Hocking, Adrian Niall, et al
Albright IP Limited
County House
Bayshill Road
Cheltenham, Glos. GL50 3BA / GB
[2017/27]
Application number, filing date14899403.104.08.2014
[2017/27]
WO2014IB01498
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016020716
Date:11.02.2016
Language:EN
[2016/06]
Type: A1 Application with search report 
No.:EP3186189
Date:05.07.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 11.02.2016 takes the place of the publication of the European patent application.
[2017/27]
Search report(s)International search report - published on:CA11.02.2016
(Supplementary) European search report - dispatched on:EP10.04.2018
ClassificationIPC:B81B3/00, H02N1/00, G02B26/08, B25J7/00
[2018/19]
CPC:
G02B26/0841 (EP); B81B3/0018 (KR); B25J7/00 (EP);
B81B3/0037 (EP); B81B3/0062 (EP); B81B7/02 (KR);
B81C1/00015 (KR); H02N1/002 (EP); B81B2201/03 (KR);
B81B2201/047 (EP); B81B2203/0136 (EP); B81B2203/053 (EP) (-)
Former IPC [2017/27]B81B3/00
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/27]
TitleGerman:ELEKTROSTATISCHER MIKROAKTUATOR MIT MEMS-KOLBEN-ROHR MIT DREI FREIHEITSGRADEN[2017/27]
English:3-DOF MEMS PISTON-TUBE ELECTROSTATIC MICROACTUATOR[2017/27]
French:MICRO-ACTIONNEUR ÉLECTROSTATIQUE À TUBES ET PISTONS MEMS À 3 DEGRÉS DE LIBERTÉ[2017/27]
Entry into regional phase27.01.2017National basic fee paid 
27.01.2017Search fee paid 
27.01.2017Designation fee(s) paid 
27.01.2017Examination fee paid 
Examination procedure27.01.2017Examination requested  [2017/27]
27.01.2017Date on which the examining division has become responsible
29.10.2018Amendment by applicant (claims and/or description)
08.09.2020Invitation to indicate the basis for amendments (Time limit: M01)
07.10.2020Reply to an invitation to indicate the basis for amendments
20.12.2021Despatch of a communication from the examining division (Time limit: M04)
20.04.2022Reply to a communication from the examining division
Fees paidRenewal fee
27.01.2017Renewal fee patent year 03
31.07.2017Renewal fee patent year 04
13.08.2018Renewal fee patent year 05
28.08.2019Renewal fee patent year 06
08.07.2020Renewal fee patent year 07
02.08.2021Renewal fee patent year 08
29.07.2022Renewal fee patent year 09
25.07.2023Renewal fee patent year 10
23.08.2024Renewal fee patent year 11
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Documents cited:Search[A]WO2010038229  (AUDIO PIXELS LTD [IL], et al) [A] 1-15 * page 15, line 11 - line 24 ** pages 1-2; figures 1-2 *
International search[A]US2013139592  (ACAR CENK [US]) [A] 1-16 * (abstract) *;
 [A]WO2013083534  (SAGEM DEFENSE SECURITE [FR]) [A] 1-16 * (abstract) *;
 [A]US2014028897  (AZUMA EDDIE [US]) [A] 1-16* (abstract) *;
 [A]CN203643683U  (GLSUN SCIENCE AND TECH CO LTD) [A] 1-16 * (abstract) *;
 [A]CN203705471U  (GOERTEK INC) [A] 1-16 * (abstract) *
by applicantUS6384952
 US7538471
 WO2010038229
 US2012121242
 US8269395
 US8358925
 WO2013076350
 US8711495
    - D. J. DAGELW. D. COWANS. MEMBERO. B. SPAHNG. D. GROSSETETEA. J. GRINEM. J. SHAWP. J. RESNICKB. JOKIEL, Large-Stroke MEMS Deformable Mirrors for Adaptive Optics, (20060000), vol. 15, no. 3, pages 572 - 583
    - B. S. KIMJ. S. PARKC. MOONG. M. JEONGH. S. AHN, "A precision robot system with modular actuators and MEMS micro gripper for micro system assembly", J. Mech. Sci. Technol., (20080400), vol. 22, no. 1, pages 70 - 76
    - A. P. LEED. R. CIARLOP. A. KRULEVITCHS. LEHEWJ. TREVINOM. A. NORTHRUP, "A Practical Microgripper By Fine Alignment, Eutectic Bonding And Sma Actuation", Proc. Int. Solid-State Sensors Actuators Conf. - TRANSDUCERS '95, (19950000), vol. 2, pages 368 - 371
    - D. J. BELLT. J. LUN. A. FLECKS. M. SPEARING, "MEMS actuators and sensors: observations on their performance and selection for purpose", J. Micromechanics Microengineering, (20050700), vol. 15, no. 7, doi:10.1088/0960-1317/15/7/022, pages S153 - S164, XP020091623

DOI:   http://dx.doi.org/10.1088/0960-1317/15/7/022
    - C. LIU, "Electrostatic Actuation", Foundations ofMEMS, (20050000), pages 127 - 168
    - V. MILANOVICG. A. MATUSD. T. MCCORMICK, "Gimbal-Less Monolithic Silicon Actuators for Tip-Tilt-Piston Micromirror Applications", IEEE J. Sel. Top. Quantum Electron., (20040500), vol. 10, no. 3, doi:10.1109/JSTQE.2004.829205, pages 462 - 471, XP011116292

DOI:   http://dx.doi.org/10.1109/JSTQE.2004.829205
    - Y. LID. PSYCHOGIOUS. KIIHNEJ. HESSELBARTHC. HAFNERC. HIEROLD, "Large Stroke Staggered Vertical Comb-Drive Actuator for the Application of a Millimeter-Wave Tunable Phase Shifter", J. MICROELECTROMECHANICAL Syst., (20130000), vol. 22, no. 4, doi:10.1109/JMEMS.2013.2252146, pages 962 - 975, XP011523162

DOI:   http://dx.doi.org/10.1109/JMEMS.2013.2252146
    - E. CARRS. OLIVIERO. SOLGAARD, "Large-Stroke Self-Aligned Vertical Comb Drive Actuators for Adaptive Optics Applications", SPIE, (20060100), vol. 6113, pages 61130T - 61130T9
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.