EP2945184 - EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE [Right-click to bookmark this link] | |||
Former [2015/47] | Exposure apparatus, exposure method, and method for producing device | ||
[2017/08] | Status | No opposition filed within time limit Status updated on 04.05.2018 Database last updated on 02.09.2024 | |
Former | The patent has been granted Status updated on 26.05.2017 | ||
Former | Grant of patent is intended Status updated on 24.01.2017 | Most recent event Tooltip | 26.06.2020 | Lapse of the patent in a contracting state New state(s): CY | published on 29.07.2020 [2020/31] | Applicant(s) | For all designated states Nikon Corporation 15-3, Konan 2-chome Minato-ku Tokyo 108-6290 / JP | [2015/47] | Inventor(s) | 01 /
Nagasaka, Hiroyuki c/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo, 100-8331 / JP | 02 /
Nishii, Yasufumi c/o NIKON CORPORATION 2-3, Marunouchi 3-chome Chiyoda-ku Tokyo, 100-8331 / JP | [2015/47] | Representative(s) | Hoffmann Eitle Patent- und Rechtsanwälte PartmbB Arabellastraße 30 81925 München / DE | [2015/47] | Application number, filing date | 15158780.5 | 26.02.2004 | [2015/47] | Priority number, date | JP20030049365 | 26.02.2003 Original published format: JP 2003049365 | JP20030110748 | 15.04.2003 Original published format: JP 2003110748 | JP20030320100 | 11.09.2003 Original published format: JP 2003320100 | [2015/47] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP2945184 | Date: | 18.11.2015 | Language: | EN | [2015/47] | Type: | A3 Search report | No.: | EP2945184 | Date: | 23.03.2016 | Language: | EN | [2016/12] | Type: | B1 Patent specification | No.: | EP2945184 | Date: | 28.06.2017 | Language: | EN | [2017/26] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 24.02.2016 | Classification | IPC: | H01L21/027, G03F7/20 | [2015/47] | CPC: |
G03F7/70341 (EP,KR,US);
G03F7/2041 (KR);
G03F7/70733 (US);
G03F7/708 (EP,KR,US);
G03F7/7095 (EP,KR,US);
H01L21/0273 (KR)
| Designated contracting states | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR [2016/32] |
Former [2015/47] | AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HU, IE, IT, LI, LU, MC, NL, PT, RO, SE, SI, SK, TR | Title | German: | BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG DER VORRICHTUNG | [2015/47] | English: | EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE | [2017/08] | French: | APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE PRODUCTION DU DISPOSITIF | [2015/47] |
Former [2015/47] | Exposure apparatus, exposure method, and method for producing device | Examination procedure | 28.06.2016 | Amendment by applicant (claims and/or description) | 30.06.2016 | Examination requested [2016/32] | 25.01.2017 | Communication of intention to grant the patent | 12.05.2017 | Fee for grant paid | 12.05.2017 | Fee for publishing/printing paid | 12.05.2017 | Receipt of the translation of the claim(s) | Parent application(s) Tooltip | EP04714910.9 / EP1598855 | Opposition(s) | 29.03.2018 | No opposition filed within time limit [2018/23] | Fees paid | Renewal fee | 07.04.2015 | Renewal fee patent year 03 | 07.04.2015 | Renewal fee patent year 04 | 07.04.2015 | Renewal fee patent year 05 | 07.04.2015 | Renewal fee patent year 06 | 07.04.2015 | Renewal fee patent year 07 | 07.04.2015 | Renewal fee patent year 08 | 07.04.2015 | Renewal fee patent year 09 | 07.04.2015 | Renewal fee patent year 10 | 07.04.2015 | Renewal fee patent year 11 | 07.04.2015 | Renewal fee patent year 12 | 24.02.2016 | Renewal fee patent year 13 | 10.02.2017 | Renewal fee patent year 14 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 26.02.2004 | AT | 28.06.2017 | CY | 28.06.2017 | CZ | 28.06.2017 | DK | 28.06.2017 | EE | 28.06.2017 | ES | 28.06.2017 | FI | 28.06.2017 | IT | 28.06.2017 | MC | 28.06.2017 | PT | 28.06.2017 | RO | 28.06.2017 | SE | 28.06.2017 | SI | 28.06.2017 | SK | 28.06.2017 | TR | 28.06.2017 | BG | 28.09.2017 | GR | 29.09.2017 | GB | 26.02.2018 | LU | 26.02.2018 | BE | 28.02.2018 | CH | 28.02.2018 | FR | 28.02.2018 | LI | 28.02.2018 | [2020/31] |
Former [2020/30] | HU | 26.02.2004 | |
AT | 28.06.2017 | ||
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
MC | 28.06.2017 | ||
PT | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
TR | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
GB | 26.02.2018 | ||
LU | 26.02.2018 | ||
BE | 28.02.2018 | ||
CH | 28.02.2018 | ||
FR | 28.02.2018 | ||
LI | 28.02.2018 | ||
Former [2020/28] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
MC | 28.06.2017 | ||
PT | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
TR | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
GB | 26.02.2018 | ||
LU | 26.02.2018 | ||
BE | 28.02.2018 | ||
CH | 28.02.2018 | ||
FR | 28.02.2018 | ||
LI | 28.02.2018 | ||
Former [2020/15] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
MC | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
TR | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
GB | 26.02.2018 | ||
LU | 26.02.2018 | ||
BE | 28.02.2018 | ||
CH | 28.02.2018 | ||
FR | 28.02.2018 | ||
LI | 28.02.2018 | ||
Former [2019/12] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
MC | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
GB | 26.02.2018 | ||
LU | 26.02.2018 | ||
BE | 28.02.2018 | ||
CH | 28.02.2018 | ||
FR | 28.02.2018 | ||
LI | 28.02.2018 | ||
Former [2018/52] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
MC | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
LU | 26.02.2018 | ||
CH | 28.02.2018 | ||
LI | 28.02.2018 | ||
Former [2018/44] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
MC | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
Former [2018/40] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SI | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
Former [2018/21] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
DK | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
Former [2018/11] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
EE | 28.06.2017 | ||
ES | 28.06.2017 | ||
FI | 28.06.2017 | ||
IT | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
Former [2018/10] | AT | 28.06.2017 | |
CZ | 28.06.2017 | ||
EE | 28.06.2017 | ||
FI | 28.06.2017 | ||
RO | 28.06.2017 | ||
SE | 28.06.2017 | ||
SK | 28.06.2017 | ||
BG | 28.09.2017 | ||
GR | 29.09.2017 | ||
Former [2018/09] | EE | 28.06.2017 | |
FI | 28.06.2017 | ||
SE | 28.06.2017 | ||
BG | 28.09.2017 | ||
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Former [2017/50] | FI | 28.06.2017 | |
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BG | 28.09.2017 | ||
GR | 29.09.2017 | Documents cited: | Search | [AD]WO9949504 (NIKON CORP [JP], et al) [AD] 1-20 * abstract *; | [A]US2002149754 (AUER FRANK [NL], et al) [A] 1-20 * paragraphs [0013] , [0 81]; figures 6, 7 *; | [A]US5900354 (BATCHELDER JOHN SAMUEL [US]) [A] 1-20 * column 5, line 40 - column 6, line 30; figure 2 * | by applicant | WO9949504 | JPH06188169 | JP2002014005 | US2002041377 | WO02063664 | JPH10163099 | JPH10214783 | US6341007 | US6400441 | US6549269 | US6590634 | JP2000505958 | US5969441 | US6208407 | US5623853 | US5528118 | JPH08166475 | US5874820 | JPH08330224 |