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Extract from the Register of European Patents

EP About this file: EP2945184

EP2945184 - EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE [Right-click to bookmark this link]
Former [2015/47]Exposure apparatus, exposure method, and method for producing device
[2017/08]
StatusNo opposition filed within time limit
Status updated on  04.05.2018
Database last updated on 02.09.2024
FormerThe patent has been granted
Status updated on  26.05.2017
FormerGrant of patent is intended
Status updated on  24.01.2017
Most recent event   Tooltip26.06.2020Lapse of the patent in a contracting state
New state(s): CY		published on 29.07.2020  [2020/31]
Applicant(s)For all designated states
Nikon Corporation
15-3, Konan 2-chome
Minato-ku
Tokyo 108-6290 / JP
[2015/47]
Inventor(s)01 / Nagasaka, Hiroyuki
c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
02 / Nishii, Yasufumi
c/o NIKON CORPORATION
2-3, Marunouchi 3-chome
Chiyoda-ku
Tokyo, 100-8331 / JP
 [2015/47]
Representative(s)Hoffmann Eitle
Patent- und Rechtsanwälte PartmbB
Arabellastraße 30
81925 München / DE
[2015/47]
Application number, filing date15158780.526.02.2004
[2015/47]
Priority number, dateJP2003004936526.02.2003         Original published format: JP 2003049365
JP2003011074815.04.2003         Original published format: JP 2003110748
JP2003032010011.09.2003         Original published format: JP 2003320100
[2015/47]
Filing languageEN
Procedural languageEN
PublicationType: A2 Application without search report 
No.:EP2945184
Date:18.11.2015
Language:EN
[2015/47]
Type: A3 Search report 
No.:EP2945184
Date:23.03.2016
Language:EN
[2016/12]
Type: B1 Patent specification 
No.:EP2945184
Date:28.06.2017
Language:EN
[2017/26]
Search report(s)(Supplementary) European search report - dispatched on:EP24.02.2016
ClassificationIPC:H01L21/027, G03F7/20
[2015/47]
CPC:
G03F7/70341 (EP,KR,US); G03F7/2041 (KR); G03F7/70733 (US);
G03F7/708 (EP,KR,US); G03F7/7095 (EP,KR,US); H01L21/0273 (KR)
Designated contracting statesAT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HU,   IE,   IT,   LI,   LU,   MC,   NL,   PT,   RO,   SE,   SI,   SK,   TR [2016/32]
Former [2015/47]AT,  BE,  BG,  CH,  CY,  CZ,  DE,  DK,  EE,  ES,  FI,  FR,  GB,  GR,  HU,  IE,  IT,  LI,  LU,  MC,  NL,  PT,  RO,  SE,  SI,  SK,  TR 
TitleGerman:BELICHTUNGSVORRICHTUNG, BELICHTUNGSVERFAHREN UND VERFAHREN ZUR HERSTELLUNG DER VORRICHTUNG[2015/47]
English:EXPOSURE APPARATUS, EXPOSURE METHOD, AND METHOD FOR PRODUCING DEVICE[2017/08]
French:APPAREIL D'EXPOSITION, PROCÉDÉ D'EXPOSITION ET PROCÉDÉ DE PRODUCTION DU DISPOSITIF[2015/47]
Former [2015/47]Exposure apparatus, exposure method, and method for producing device
Examination procedure28.06.2016Amendment by applicant (claims and/or description)
30.06.2016Examination requested  [2016/32]
25.01.2017Communication of intention to grant the patent
12.05.2017Fee for grant paid
12.05.2017Fee for publishing/printing paid
12.05.2017Receipt of the translation of the claim(s)
Parent application(s)   TooltipEP04714910.9  / EP1598855
Opposition(s)29.03.2018No opposition filed within time limit [2018/23]
Fees paidRenewal fee
07.04.2015Renewal fee patent year 03
07.04.2015Renewal fee patent year 04
07.04.2015Renewal fee patent year 05
07.04.2015Renewal fee patent year 06
07.04.2015Renewal fee patent year 07
07.04.2015Renewal fee patent year 08
07.04.2015Renewal fee patent year 09
07.04.2015Renewal fee patent year 10
07.04.2015Renewal fee patent year 11
07.04.2015Renewal fee patent year 12
24.02.2016Renewal fee patent year 13
10.02.2017Renewal fee patent year 14
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU26.02.2004
AT28.06.2017
CY28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
PT28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
TR28.06.2017
BG28.09.2017
GR29.09.2017
GB26.02.2018
LU26.02.2018
BE28.02.2018
CH28.02.2018
FR28.02.2018
LI28.02.2018
[2020/31]
Former [2020/30]HU26.02.2004
AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
PT28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
TR28.06.2017
BG28.09.2017
GR29.09.2017
GB26.02.2018
LU26.02.2018
BE28.02.2018
CH28.02.2018
FR28.02.2018
LI28.02.2018
Former [2020/28]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
PT28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
TR28.06.2017
BG28.09.2017
GR29.09.2017
GB26.02.2018
LU26.02.2018
BE28.02.2018
CH28.02.2018
FR28.02.2018
LI28.02.2018
Former [2020/15]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
TR28.06.2017
BG28.09.2017
GR29.09.2017
GB26.02.2018
LU26.02.2018
BE28.02.2018
CH28.02.2018
FR28.02.2018
LI28.02.2018
Former [2019/12]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
GB26.02.2018
LU26.02.2018
BE28.02.2018
CH28.02.2018
FR28.02.2018
LI28.02.2018
Former [2018/52]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
LU26.02.2018
CH28.02.2018
LI28.02.2018
Former [2018/44]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
MC28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
Former [2018/40]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
RO28.06.2017
SE28.06.2017
SI28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
Former [2018/21]AT28.06.2017
CZ28.06.2017
DK28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
RO28.06.2017
SE28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
Former [2018/11]AT28.06.2017
CZ28.06.2017
EE28.06.2017
ES28.06.2017
FI28.06.2017
IT28.06.2017
RO28.06.2017
SE28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
Former [2018/10]AT28.06.2017
CZ28.06.2017
EE28.06.2017
FI28.06.2017
RO28.06.2017
SE28.06.2017
SK28.06.2017
BG28.09.2017
GR29.09.2017
Former [2018/09]EE28.06.2017
FI28.06.2017
SE28.06.2017
BG28.09.2017
GR29.09.2017
Former [2017/50]FI28.06.2017
SE28.06.2017
BG28.09.2017
GR29.09.2017
Documents cited:Search[AD]WO9949504  (NIKON CORP [JP], et al) [AD] 1-20 * abstract *;
 [A]US2002149754  (AUER FRANK [NL], et al) [A] 1-20 * paragraphs [0013] , [0 81]; figures 6, 7 *;
 [A]US5900354  (BATCHELDER JOHN SAMUEL [US]) [A] 1-20 * column 5, line 40 - column 6, line 30; figure 2 *
by applicantWO9949504
 JPH06188169
 JP2002014005
 US2002041377
 WO02063664
 JPH10163099
 JPH10214783
 US6341007
 US6400441
 US6549269
 US6590634
 JP2000505958
 US5969441
 US6208407
 US5623853
 US5528118
 JPH08166475
 US5874820
 JPH08330224
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.