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EP2924143
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EP About this file: EP2924143
| EP2924143 - COMPOSITIONS AND METHODS FOR THE DEPOSITION OF SILICON OXIDE FILMS [Right-click to bookmark this link] | Status | The patent has been granted Status updated on 26.07.2024 Database last updated on 02.11.2024 | |
| Former | Grant of patent is intended Status updated on 24.03.2024 | ||
| Former | Examination is in progress Status updated on 08.06.2018 | Most recent event Tooltip | 26.07.2024 | (Expected) grant | published on 28.08.2024 [2024/35] | Applicant(s) | For all designated states Versum Materials US, LLC 8555 River Parkway Tempe, AZ 85284 / US | [2017/38] |
| Former [2015/40] | For all designated states AIR PRODUCTS AND CHEMICALS, INC. 7201 Hamilton Boulevard Allentown, PA 18195-1501 / US | Inventor(s) | 01 /
Mallikarjunan, Anupama 6960 Sunflower Lane Macungie, PA 18062 / US | 02 /
Chandra, Haripin 1702 Thorley Way San Marcos, CA 92078 / US | 03 /
Xiao, Manchao 5534 Caballos Place San Diego, CA 92130 / US | 04 /
Lei, Xinjian 1928 Cherrywood Vista, CA 92081 / US | 05 /
Cuthill, Kirk Scott 119 Beaumont Drive Vista, CA 92084 / US | 06 /
O'Neill, Mark Leonard 4723 E. Ironhorse Rd. Gilbert, AZ 85297 / US | [2024/17] |
| Former [2015/40] | 01 /
Mallikarjunan, Anupama 6960 Sunflower Lane Macungie, PA 18062 / US | ||
| 02 /
Chandra, Haripin 1702 Thorley Way San Marcos, CA 92078 / US | |||
| 03 /
Xiao, Manchao 5534 Caballos Place San Diego, CA 92130 / US | |||
| 04 /
Lei, Xinjian 1928 Cherrywood Vista, CA 92081 / US | |||
| 05 /
Cuthill, Kirk Scott 119 Beaumont Drive Vista, CA 92084 / US | |||
| 06 /
O'Neill, Mark Leonard 4723 E. Ironhorse Rd. Gilbert, AZ 85297 / US | Representative(s) | Beck Greener LLP Fulwood House 12 Fulwood Place London WC1V 6HR / GB | [2024/35] |
| Former [2015/40] | Beck Greener Fulwood House 12 Fulwood Place London WC1V 6HR / GB | Application number, filing date | 15161057.3 | 26.03.2015 | [2015/40] | Priority number, date | US201461970602P | 26.03.2014 Original published format: US 201461970602 P | US201514661652 | 18.03.2015 Original published format: US201514661652 | [2015/40] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | EP2924143 | Date: | 30.09.2015 | Language: | EN | [2015/40] | Type: | B1 Patent specification | No.: | EP2924143 | Date: | 28.08.2024 | Language: | EN | [2024/35] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 31.07.2015 | Classification | IPC: | C23C16/40, C23C16/455, H01L21/02, C07F7/10 | [2015/40] | CPC: |
C23C16/402 (EP,US);
C07F7/10 (KR,US);
C23C16/401 (US);
C09K11/06 (KR);
C23C16/45525 (EP,US);
C23C16/45553 (EP,US);
C23C16/513 (US);
H01L21/02164 (EP,US);
H01L21/02205 (KR);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2016/19] |
| Former [2015/40] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | ZUSAMMENSETZUNGEN UND VERFAHREN ZUR ABSCHEIDUNG VON SILICIUMOXIDFILMEN | [2015/40] | English: | COMPOSITIONS AND METHODS FOR THE DEPOSITION OF SILICON OXIDE FILMS | [2015/40] | French: | COMPOSITIONS ET PROCÉDÉS POUR LE DÉPÔT DE FILMS D'OXYDE DE SILICUM | [2015/40] | Examination procedure | 29.03.2016 | Examination requested [2016/19] | 12.05.2016 | Despatch of communication that the application is deemed to be withdrawn, reason: reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report not received in time | 10.06.2016 | Amendment by applicant (claims and/or description) | 12.06.2018 | Despatch of a communication from the examining division (Time limit: M06) | 21.12.2018 | Reply to a communication from the examining division | 12.11.2020 | Despatch of a communication from the examining division (Time limit: M04) | 22.02.2021 | Reply to a communication from the examining division | 17.02.2022 | Despatch of a communication from the examining division (Time limit: M04) | 17.06.2022 | Reply to a communication from the examining division | 25.03.2024 | Communication of intention to grant the patent | 22.07.2024 | Fee for grant paid | 22.07.2024 | Fee for publishing/printing paid | 22.07.2024 | Receipt of the translation of the claim(s) | Request for further processing for: | The application is deemed to be withdrawn due to failure to reply to the Extended European Search Report/Written Opinion of the International Searching Authority/International Preliminary Examination Report/Supplementary international search report/Supplementary European search report | 10.06.2016 | Request for further processing filed | 10.06.2016 | Full payment received (date of receipt of payment) Request granted | 29.06.2016 | Decision despatched | Fees paid | Renewal fee | 07.03.2017 | Renewal fee patent year 03 | 13.03.2018 | Renewal fee patent year 04 | 13.03.2019 | Renewal fee patent year 05 | 12.03.2020 | Renewal fee patent year 06 | 12.03.2021 | Renewal fee patent year 07 | 22.02.2022 | Renewal fee patent year 08 | 14.02.2023 | Renewal fee patent year 09 | 03.01.2024 | Renewal fee patent year 10 |
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| Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Documents cited: | Search | [XI]WO2012167060 (AIR PROD & CHEM [US], et al); | Examination | US3305525 | GB1110846 | US3462386 | US2010291321 | JP2010275602 | US2011215445 | by applicant | US5424095 | US6992019 | US7084076 | JP2010225663 | US2010291321 | JP2010275602 | US2013295779 |