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Extract from the Register of European Patents

EP About this file: EP3114705

EP3114705 - METROLOGY SYSTEM AND METHOD FOR COMPENSATING FOR OVERLAY ERRORS BY THE METROLOGY SYSTEM [Right-click to bookmark this link]
Former [2017/02]STATISTICAL OVERLAY ERROR PREDICTION FOR FEED FORWARD AND FEEDBACK CORRECTION OF OVERLAY ERRORS, ROOT CAUSE ANALYSIS AND PROCESS CONTROL
[2022/24]
StatusNo opposition filed within time limit
Status updated on  29.09.2023
Database last updated on 05.10.2024
FormerThe patent has been granted
Status updated on  21.10.2022
FormerGrant of patent is intended
Status updated on  02.06.2022
FormerExamination is in progress
Status updated on  21.05.2021
FormerRequest for examination was made
Status updated on  09.12.2016
FormerThe international publication has been made
Status updated on  16.11.2016
Most recent event   Tooltip24.05.2024Lapse of the patent in a contracting state
New state(s): IT		published on 26.06.2024  [2024/26]
Applicant(s)For all designated states
KLA - Tencor Corporation
One Technology Drive
Milpitas, California 95035 / US
[2017/02]
Inventor(s)01 / CHANG, Wei
1081 Foster City
Apt. D
Foster City, California 94404 / US
02 / RAO, Krishna
3222 Glencoe Circle
San Ramon, California 94582 / US
03 / GUTIERREZ, Joseph
3864 Pruneridge Avenue
Santa Clara, California 95051 / US
04 / OLAVARRIA, Ramon
41731 Gifford Street
Fremont, California 94538 / US
05 / MACNAUGHTON, Craig
16768 Corcel Court
Los Gatos, California 95032 / US
06 / AZORDEGAN, Amir
4471 Billings Circle
Santa Clara, California 95054 / US
07 / DIGHE, Prasanna
7579 Balmoral Way
San Ramon, California 94582 / US
 [2017/02]
Representative(s)FRKelly
Waterways House
Grand Canal Quay
Dublin D02 PD39 / IE
[N/P]
Former [2022/47]FRKelly
27 Clyde Road
Dublin D04 F838 / IE
Former [2017/02]Keane, Paul Fachtna
FRKelly
27 Clyde Road
Dublin D04 F838 / IE
Application number, filing date15758366.705.03.2015
[2017/02]
WO2015US18884
Priority number, dateUS201461949022P06.03.2014         Original published format: US 201461949022 P
US20141422066520.03.2014         Original published format: US201414220665
[2017/02]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2015134709
Date:11.09.2015
Language:EN
[2015/36]
Type: A1 Application with search report 
No.:EP3114705
Date:11.01.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 11.09.2015 takes the place of the publication of the European patent application.
[2017/02]
Type: B1 Patent specification 
No.:EP3114705
Date:23.11.2022
Language:EN
[2022/47]
Search report(s)International search report - published on:KR11.09.2015
(Supplementary) European search report - dispatched on:EP11.10.2017
ClassificationIPC:H01L21/66, G01B9/02, G03F7/20, G06F30/398, G06N20/00, // G06F119/18
[2022/24]
CPC:
G03F7/705 (EP,KR,US); G03F1/36 (KR,US); G03F7/706 (KR);
G03F7/70633 (EP,KR,US); G03F7/706833 (KR); G03F7/706837 (KR);
G06F30/39 (KR,US); G06F30/398 (EP,KR,US); G06N20/00 (EP,US);
G06N5/04 (US); G06F2119/18 (EP,KR,US); Y02P90/02 (EP,US) (-)
Former IPC [2017/45]H01L21/66, G01B9/02, G03F7/20, G06F17/50
Former IPC [2017/02]H01L21/66, G01B9/02
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/02]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:METROLOGIESYSTEM UND VERFAHREN ZUM KOMPENSIEREN VON ÜBERLAGERUNGSFEHLERN DURCH DAS METROLOGIESYSTEM[2022/24]
English:METROLOGY SYSTEM AND METHOD FOR COMPENSATING FOR OVERLAY ERRORS BY THE METROLOGY SYSTEM[2022/24]
French:SYSTEME DE METROLOGIE ET PROCEDE POUR LA CORRECTION D'ERREURS DE SUPERPOSITION PAR LE SYSTEME DE METROLOGIE[2022/24]
Former [2017/02]STATISTISCHE ÜBERLAGERUNGSFEHLERPRÄDIKTION FÜR FEEDFORWARD- UND FEEDBACKKORREKTUR VON ÜBERLAGERUNGSFEHLERN, GRUNDURSACHENANALYSE UND PROZESSSTEUERUNG
Former [2017/02]STATISTICAL OVERLAY ERROR PREDICTION FOR FEED FORWARD AND FEEDBACK CORRECTION OF OVERLAY ERRORS, ROOT CAUSE ANALYSIS AND PROCESS CONTROL
Former [2017/02]PRÉDICTION D'ERREUR DE SUPERPOSITION STATISTIQUE POUR LA CORRECTION EN FLUX AVANT ET EN FLUX ARRIÈRE D'ERREURS DE SUPERPOSITION, ANALYSE DES CAUSES RACINES ET CONTRÔLE DE PROCESSUS
Entry into regional phase17.08.2016National basic fee paid 
17.08.2016Search fee paid 
17.08.2016Designation fee(s) paid 
17.08.2016Examination fee paid 
Examination procedure17.08.2016Examination requested  [2017/02]
17.08.2016Date on which the examining division has become responsible
04.05.2018Amendment by applicant (claims and/or description)
26.05.2021Despatch of a communication from the examining division (Time limit: M04)
30.09.2021Reply to a communication from the examining division
03.06.2022Communication of intention to grant the patent
12.10.2022Fee for grant paid
12.10.2022Fee for publishing/printing paid
12.10.2022Receipt of the translation of the claim(s)
Opposition(s)24.08.2023No opposition filed within time limit [2023/44]
Fees paidRenewal fee
27.03.2017Renewal fee patent year 03
27.03.2018Renewal fee patent year 04
27.03.2019Renewal fee patent year 05
27.03.2020Renewal fee patent year 06
29.03.2021Renewal fee patent year 07
28.03.2022Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
IT23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SI23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
GB05.03.2023
IE05.03.2023
LU05.03.2023
IS23.03.2023
PT23.03.2023
BE31.03.2023
CH31.03.2023
FR31.03.2023
LI31.03.2023
[2024/26]
Former [2024/11]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SI23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
GB05.03.2023
IE05.03.2023
LU05.03.2023
IS23.03.2023
PT23.03.2023
BE31.03.2023
CH31.03.2023
FR31.03.2023
LI31.03.2023
Former [2024/09]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SI23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
GB05.03.2023
IE05.03.2023
LU05.03.2023
IS23.03.2023
PT23.03.2023
CH31.03.2023
LI31.03.2023
Former [2024/08]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SI23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
GB05.03.2023
IE05.03.2023
LU05.03.2023
IS23.03.2023
PT23.03.2023
Former [2024/02]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SI23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
LU05.03.2023
IS23.03.2023
PT23.03.2023
Former [2023/51]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SI23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/48]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
MC23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/38]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SK23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/37]AL23.11.2022
AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/35]AT23.11.2022
CZ23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
NL23.11.2022
PL23.11.2022
RO23.11.2022
RS23.11.2022
SE23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/34]AT23.11.2022
DK23.11.2022
EE23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
NL23.11.2022
PL23.11.2022
RS23.11.2022
SE23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/33]AT23.11.2022
DK23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
NL23.11.2022
PL23.11.2022
RS23.11.2022
SE23.11.2022
SM23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/29]AT23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
NL23.11.2022
PL23.11.2022
RS23.11.2022
SE23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/26]AT23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
PL23.11.2022
RS23.11.2022
SE23.11.2022
NO23.02.2023
GR24.02.2023
IS23.03.2023
PT23.03.2023
Former [2023/24]AT23.11.2022
ES23.11.2022
FI23.11.2022
HR23.11.2022
LT23.11.2022
LV23.11.2022
SE23.11.2022
NO23.02.2023
GR24.02.2023
PT23.03.2023
Former [2023/23]AT23.11.2022
ES23.11.2022
FI23.11.2022
LT23.11.2022
LV23.11.2022
SE23.11.2022
NO23.02.2023
GR24.02.2023
PT23.03.2023
Former [2023/22]AT23.11.2022
ES23.11.2022
FI23.11.2022
LT23.11.2022
SE23.11.2022
NO23.02.2023
PT23.03.2023
Former [2023/20]LT23.11.2022
NO23.02.2023
Documents cited:Search[XY]US7042552  (WERKMAN ROY [NL], et al);
 [YA]US2009063378  (IZIKSON PAVEL [IL]);
 [YA]WO2013178404  (ASML NETHERLANDS BV [NL])
International search[A]US2003223630  (ADEL MICHAEL [IL], et al);
 [Y]US2009063378  (IZIKSON PAVEL [IL]);
 [A]US2011154272  (HSU WEI TE [TW], et al);
 [A]US2013060354  (CHOI DONGSUB [KR], et al);
 [XY]WO2013178404  (ASML NETHERLANDS BV [NL])
by applicantUS7042552
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.