EP3218303 - MICROELECTROMECHANICAL SYSTEM (MEMS) PACKAGE [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 13.05.2022 Database last updated on 02.11.2024 | |
Former | The patent has been granted Status updated on 12.06.2021 | ||
Former | Grant of patent is intended Status updated on 17.01.2021 | ||
Former | Examination is in progress Status updated on 29.03.2019 | ||
Former | Request for examination was made Status updated on 18.08.2017 | ||
Former | The international publication has been made Status updated on 15.06.2017 | Most recent event Tooltip | 06.09.2024 | Lapse of the patent in a contracting state New state(s): MT | published on 09.10.2024 [2024/41] | Applicant(s) | For all designated states AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Fabriksgasse 13 8700 Leoben / AT | [2017/38] | Inventor(s) | 01 /
LEITGEB, Markus Robert-Postmannstr. 7B 8793 Trofaiach / AT | 02 /
RENAUD-BEZOT, Nick Knappengasse 1/8 8700 Leoben / AT | [2017/38] | Representative(s) | Dilg, Haeusler, Schindelmann Patentanwaltsgesellschaft mbH Leonrodstraße 58 80636 München / DE | [2021/27] |
Former [2017/38] | Dilg, Haeusler, Schindelmann Patentanwaltsgesellschaft mbH Leonrodstrasse 58 80636 München / DE | Application number, filing date | 15791629.7 | 10.11.2015 | [2017/38] | WO2015EP76158 | Priority number, date | EP20140290341 | 10.11.2014 Original published format: EP 14290341 | [2017/38] | Filing language | DE | Procedural language | DE | Publication | Type: | A1 Application with search report | No.: | WO2016075113 | Date: | 19.05.2016 | Language: | DE | [2016/20] | Type: | A1 Application with search report | No.: | EP3218303 | Date: | 20.09.2017 | Language: | DE | The application published by WIPO in one of the EPO official languages on 19.05.2016 takes the place of the publication of the European patent application. | [2017/38] | Type: | B1 Patent specification | No.: | EP3218303 | Date: | 07.07.2021 | Language: | DE | [2021/27] | Search report(s) | International search report - published on: | EP | 19.05.2016 | Classification | IPC: | B81C1/00, H04R19/00, H04R19/04 | [2017/38] | CPC: |
B81C1/0023 (EP,CN,US);
B81B7/0061 (US);
B81B7/02 (CN);
B81C3/008 (CN);
H04R19/005 (EP,CN,US);
H04R19/02 (US);
H04R19/04 (CN,US);
B81B2201/0257 (EP,CN,US);
B81B2207/012 (US);
B81B2207/095 (EP,CN,US);
B81B2207/096 (EP,CN,US);
B81C2203/0785 (US);
| C-Set: |
H01L2224/48091, H01L2924/00014 (EP)
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2017/38] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | MEMS PACKAGE | [2017/38] | English: | MICROELECTROMECHANICAL SYSTEM (MEMS) PACKAGE | [2017/38] | French: | BOÎTIER DE SYSTÈME MICROÉLECTROMÉCANIQUE | [2017/38] | Entry into regional phase | 09.06.2017 | National basic fee paid | 09.06.2017 | Designation fee(s) paid | 09.06.2017 | Examination fee paid | Examination procedure | 09.06.2017 | Examination requested [2017/38] | 09.06.2017 | Date on which the examining division has become responsible | 08.01.2018 | Amendment by applicant (claims and/or description) | 02.04.2019 | Despatch of a communication from the examining division (Time limit: M04) | 26.07.2019 | Reply to a communication from the examining division | 19.03.2020 | Despatch of a communication from the examining division (Time limit: M04) | 17.07.2020 | Reply to a communication from the examining division | 18.01.2021 | Communication of intention to grant the patent | 26.05.2021 | Fee for grant paid | 26.05.2021 | Fee for publishing/printing paid | 26.05.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 08.04.2022 | No opposition filed within time limit [2022/24] | Fees paid | Renewal fee | 22.11.2017 | Renewal fee patent year 03 | 21.11.2018 | Renewal fee patent year 04 | 15.11.2019 | Renewal fee patent year 05 | 17.11.2020 | Renewal fee patent year 06 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 10.11.2015 | AL | 07.07.2021 | CY | 07.07.2021 | CZ | 07.07.2021 | DK | 07.07.2021 | EE | 07.07.2021 | ES | 07.07.2021 | FI | 07.07.2021 | HR | 07.07.2021 | IT | 07.07.2021 | LT | 07.07.2021 | LV | 07.07.2021 | MC | 07.07.2021 | MK | 07.07.2021 | MT | 07.07.2021 | NL | 07.07.2021 | PL | 07.07.2021 | RO | 07.07.2021 | RS | 07.07.2021 | SE | 07.07.2021 | SI | 07.07.2021 | SK | 07.07.2021 | SM | 07.07.2021 | TR | 07.07.2021 | BG | 07.10.2021 | NO | 07.10.2021 | GR | 08.10.2021 | IS | 07.11.2021 | PT | 08.11.2021 | AT | 10.11.2021 | GB | 10.11.2021 | IE | 10.11.2021 | LU | 10.11.2021 | BE | 30.11.2021 | CH | 30.11.2021 | LI | 30.11.2021 | [2024/41] |
Former [2024/29] | HU | 10.11.2015 | |
AL | 07.07.2021 | ||
CY | 07.07.2021 | ||
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
MK | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
TR | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
AT | 10.11.2021 | ||
GB | 10.11.2021 | ||
IE | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2024/22] | HU | 10.11.2015 | |
AL | 07.07.2021 | ||
CY | 07.07.2021 | ||
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
MK | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
AT | 10.11.2021 | ||
GB | 10.11.2021 | ||
IE | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2023/30] | HU | 10.11.2015 | |
AL | 07.07.2021 | ||
CY | 07.07.2021 | ||
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
AT | 10.11.2021 | ||
GB | 10.11.2021 | ||
IE | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2023/29] | HU | 10.11.2015 | |
AL | 07.07.2021 | ||
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
AT | 10.11.2021 | ||
GB | 10.11.2021 | ||
IE | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2023/07] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
AT | 10.11.2021 | ||
GB | 10.11.2021 | ||
IE | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2022/48] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
GB | 10.11.2021 | ||
IE | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2022/47] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
GB | 10.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2022/37] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
CH | 30.11.2021 | ||
LI | 30.11.2021 | ||
Former [2022/36] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
IT | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
Former [2022/34] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
LU | 10.11.2021 | ||
BE | 30.11.2021 | ||
Former [2022/33] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
MC | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
BE | 30.11.2021 | ||
Former [2022/29] | AL | 07.07.2021 | |
CZ | 07.07.2021 | ||
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SI | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
Former [2022/25] | CZ | 07.07.2021 | |
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SK | 07.07.2021 | ||
SM | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
Former [2022/24] | CZ | 07.07.2021 | |
DK | 07.07.2021 | ||
EE | 07.07.2021 | ||
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RO | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
SK | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
Former [2022/21] | DK | 07.07.2021 | |
ES | 07.07.2021 | ||
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
Former [2022/11] | ES | 07.07.2021 | |
FI | 07.07.2021 | ||
HR | 07.07.2021 | ||
LT | 07.07.2021 | ||
LV | 07.07.2021 | ||
NL | 07.07.2021 | ||
PL | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
GR | 08.10.2021 | ||
IS | 07.11.2021 | ||
PT | 08.11.2021 | ||
Former [2022/09] | ES | 07.07.2021 | |
FI | 07.07.2021 | ||
LT | 07.07.2021 | ||
NL | 07.07.2021 | ||
RS | 07.07.2021 | ||
SE | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
PT | 08.11.2021 | ||
Former [2022/08] | ES | 07.07.2021 | |
FI | 07.07.2021 | ||
LT | 07.07.2021 | ||
NL | 07.07.2021 | ||
SE | 07.07.2021 | ||
BG | 07.10.2021 | ||
NO | 07.10.2021 | ||
Former [2022/07] | LT | 07.07.2021 | |
NL | 07.07.2021 | ||
NO | 07.10.2021 | Cited in | International search | [XI]US8115283 (BOLOGNIA DAVID [US], et al) [X] 1-3,9,11-14,17 * figures 8A,8B * * figures 1,5 * [I] 5-7,10,15,16,18-21; | [XI]US2012153771 (FORMOSA KEVIN [MT], et al) [X] 1,17,21 * figures 3b,3f,3g * * paragraphs [0037] , [0041] *[I] 18-20; | [XI]US2013193533 (VOS SANDRA F [US], et al) [X] 1,4,8,17 * figure 1 * * paragraph [0025] * [I] 5-7,10,15,16 | Examination | US2012087521 |