EP3143384 - X-RAY SYSTEM AND METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES [Right-click to bookmark this link] | |||
Former [2017/12] | X-RAY METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES | ||
[2019/32] | Status | No opposition filed within time limit Status updated on 08.01.2021 Database last updated on 02.09.2024 | |
Former | The patent has been granted Status updated on 31.01.2020 | ||
Former | Grant of patent is intended Status updated on 27.01.2020 | ||
Former | Request for examination was made Status updated on 20.01.2020 | ||
Former | Grant of patent is intended Status updated on 03.09.2019 | ||
Former | Request for examination was made Status updated on 17.02.2017 | ||
Former | The international publication has been made Status updated on 04.11.2016 | Most recent event Tooltip | 08.07.2022 | Lapse of the patent in a contracting state New state(s): MK | published on 10.08.2022 [2022/32] | Applicant(s) | For all designated states Sigray Inc. 5750 Imhoff Drive Suite I Concord, CA 94520 / US | [2020/10] |
Former [2017/12] | For all designated states Sigray Inc. 5750 Imhoff Drive Suite I Concord, CA 94520 / US | Inventor(s) | 01 /
LEWIS, Sylvia Jia Yun 1160 Mission Street Unit 1708 San Francisco, California 94103 / US | 02 /
YUN, Wenbing 151 Adams Ranch Road Walnut Creek, California 94595 / US | 03 /
KIRZ, Janos 561 Cragmont Avenue Berkeley, California 94708 / US | [2017/12] | Representative(s) | Tevlin, Christopher Michael, et al Marks & Clerk LLP 1 New York Street Manchester M1 4HD / GB | [2020/10] |
Former [2017/12] | Richards, John, et al Ladas & Parry LLP Temple Chambers 3-7 Temple Avenue London EC4Y 0DA / GB | Application number, filing date | 15792865.6 | 15.05.2015 | [2017/12] | WO2015US31223 | Priority number, date | US201461993792P | 15.05.2014 Original published format: US 201461993792 P | US201461993811P | 15.05.2014 Original published format: US 201461993811 P | US201414527523 | 29.10.2014 Original published format: US201414527523 | [2017/12] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2015176023 | Date: | 19.11.2015 | Language: | EN | [2015/46] | Type: | A1 Application with search report | No.: | EP3143384 | Date: | 22.03.2017 | Language: | EN | The application published by WIPO in one of the EPO official languages on 19.11.2015 takes the place of the publication of the European patent application. | [2017/12] | Type: | B1 Patent specification | No.: | EP3143384 | Date: | 04.03.2020 | Language: | EN | [2020/10] | Search report(s) | International search report - published on: | KR | 19.11.2015 | (Supplementary) European search report - dispatched on: | EP | 15.09.2017 | Classification | IPC: | A61B6/03, A61B6/00, G01N23/207, G01N23/083 | [2019/32] | CPC: |
A61B6/484 (EP);
G01N23/083 (EP);
G01N23/207 (EP);
G01N2223/204 (EP)
|
Former IPC [2017/42] | A61B6/03, A61B6/00, G01N23/207 | ||
Former IPC [2017/12] | G01N23/00, G01N23/04, G01N23/06, G01N23/201, G01N23/203, G01N23/223, A61B6/00 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2017/12] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | Title | German: | RÖNTGENSYSTEM UND -VERFAHREN ZUR MESSUNG, CHARAKTERISIERUNG UND ANALYSE VON PERIODISCHEN STRUKTUREN | [2019/32] | English: | X-RAY SYSTEM AND METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES | [2019/32] | French: | SYSTÈME ET PROCÉDÉ AU RAYONS X POUR LA MESURE, LA CARACTÉRISATION ET L'ANALYSE DE STRUCTURES PERIODIQUES | [2019/32] |
Former [2017/12] | RÖNTGENVERFAHREN ZUR MESSUNG, CHARAKTERISIERUNG UND ANALYSE VON PERIODISCHEN STRUKTUREN | ||
Former [2017/12] | X-RAY METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES | ||
Former [2017/12] | PROCÉDÉ AU RAYONS X POUR LA MESURE, LA CARACTÉRISATION ET L'ANALYSE DE STRUCTURES PERIODIQUES | Entry into regional phase | 08.12.2016 | National basic fee paid | 08.12.2016 | Search fee paid | 08.12.2016 | Designation fee(s) paid | 08.12.2016 | Examination fee paid | Examination procedure | 04.11.2016 | Date on which the examining division has become responsible | 08.12.2016 | Examination requested [2017/12] | 29.03.2018 | Amendment by applicant (claims and/or description) | 04.09.2019 | Communication of intention to grant the patent | 14.01.2020 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 14.01.2020 | Fee for grant paid | 14.01.2020 | Fee for publishing/printing paid | 27.01.2020 | Information about intention to grant a patent | 27.01.2020 | Receipt of the translation of the claim(s) | Opposition(s) | 07.12.2020 | No opposition filed within time limit [2021/06] | Fees paid | Renewal fee | 10.05.2017 | Renewal fee patent year 03 | 30.05.2018 | Renewal fee patent year 04 | 13.05.2019 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 15.05.2015 | AL | 04.03.2020 | AT | 04.03.2020 | CY | 04.03.2020 | CZ | 04.03.2020 | DK | 04.03.2020 | EE | 04.03.2020 | ES | 04.03.2020 | FI | 04.03.2020 | HR | 04.03.2020 | IT | 04.03.2020 | LT | 04.03.2020 | LV | 04.03.2020 | MC | 04.03.2020 | MK | 04.03.2020 | MT | 04.03.2020 | NL | 04.03.2020 | PL | 04.03.2020 | RO | 04.03.2020 | RS | 04.03.2020 | SE | 04.03.2020 | SI | 04.03.2020 | SK | 04.03.2020 | SM | 04.03.2020 | TR | 04.03.2020 | IE | 15.05.2020 | LU | 15.05.2020 | BE | 31.05.2020 | CH | 31.05.2020 | FR | 31.05.2020 | LI | 31.05.2020 | BG | 04.06.2020 | GB | 04.06.2020 | NO | 04.06.2020 | GR | 05.06.2020 | IS | 04.07.2020 | PT | 29.07.2020 | [2022/31] |
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NO | 04.06.2020 | Documents cited: | Search | [A] - PETER BECKER ET AL, "Measuring small lattice distortions in Si-crystals by phase-contrast x-ray topography", J. PHYS. D: APPL. PHYS, (20001231), vol. 33, pages 2678 - 2682, XP055402586 [A] 1-15 * abstract * * page 2678, column right, paragraph 3 - page 2680, column left, paragraph 2 * * figures 1,2 * | [A] - NEUHAUSLER U ET AL, "Non-destructive high-resolution X-ray imaging of ULSI micro-electronics using keV X-ray microscopy in Zernike phase contrast", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 83, no. 4-9, doi:10.1016/J.MEE.2006.01.225, ISSN 0167-9317, (20060401), pages 1043 - 1046, (20060401), XP024954989 [A] 1-15 * abstract * * page 1043, column right, paragraph 2 - page 1045, column left, paragraph 1 * * figures 1-3 * DOI: http://dx.doi.org/10.1016/j.mee.2006.01.225 | International search | [A]US2009092227 (DAVID CHRISTIAN [DE], et al) [A] 1-28 * See paragraphs [0013]-[0018]. *; | [A]US2001006413 (BURGHOORN JACOBUS [NL]) [A] 1-28 * See paragraphs [0025]-[0031]. *; | [A]WO2013160153 (SIEMENS AG [DE], et al) [A] 1-28 * See figure 1. *; | [A]US2007183579 (BAUMANN JOACHIM [DE], et al) [A] 1-28 * See figure 2. *; | [A]JP2012187341 (CANON KK) [A] 1-28 * See figure 1. * | Examination | - LIDER V V ET AL, "X-ray phase-contrast methods", CRYSTALLOGRAPHY REPORTS, NAUKA /INTERPERIODICA, MOSCOW, RU, vol. 58, no. 6, doi:10.1134/S1063774513050064, ISSN 1063-7745, (20131114), pages 769 - 787, (20131114), XP035343413 DOI: http://dx.doi.org/10.1134/S1063774513050064 |