blank Quick help
blank Maintenance news

Scheduled maintenance

Regular maintenance outages:
between 05.00 and 05.15 hrs CET (Monday to Sunday).

Other outages
Availability
Register Forum

2022.02.11

More...
blank News flashes

News Flashes

New version of the European Patent Register – SPC proceedings information in the Unitary Patent Register.

2024-07-24

More...
blank Related links

Release notes
European Patent Register Assistant
European Patent Register Resource Book
European Patent Register – pocket guide
FAQ - European Patent Register
FAQ - Register Alert
Federated Register (Flyer)
Global Dossier (Flyer)
Register events
Deep link coverage
Federated Register content
The Patent Information Tour
Fair use charter

Extract from the Register of European Patents

EP About this file: EP3143384

EP3143384 - X-RAY SYSTEM AND METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES [Right-click to bookmark this link]
Former [2017/12]X-RAY METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES
[2019/32]
StatusNo opposition filed within time limit
Status updated on  08.01.2021
Database last updated on 02.09.2024
FormerThe patent has been granted
Status updated on  31.01.2020
FormerGrant of patent is intended
Status updated on  27.01.2020
FormerRequest for examination was made
Status updated on  20.01.2020
FormerGrant of patent is intended
Status updated on  03.09.2019
FormerRequest for examination was made
Status updated on  17.02.2017
FormerThe international publication has been made
Status updated on  04.11.2016
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
Sigray Inc.
5750 Imhoff Drive
Suite I
Concord, CA 94520 / US
[2020/10]
Former [2017/12]For all designated states
Sigray Inc.
5750 Imhoff Drive
Suite I
Concord, CA 94520 / US
Inventor(s)01 / LEWIS, Sylvia Jia Yun
1160 Mission Street
Unit 1708
San Francisco, California 94103 / US
02 / YUN, Wenbing
151 Adams Ranch Road
Walnut Creek, California 94595 / US
03 / KIRZ, Janos
561 Cragmont Avenue
Berkeley, California 94708 / US
 [2017/12]
Representative(s)Tevlin, Christopher Michael, et al
Marks & Clerk LLP
1 New York Street
Manchester M1 4HD / GB
[2020/10]
Former [2017/12]Richards, John, et al
Ladas & Parry LLP
Temple Chambers
3-7 Temple Avenue
London EC4Y 0DA / GB
Application number, filing date15792865.615.05.2015
[2017/12]
WO2015US31223
Priority number, dateUS201461993792P15.05.2014         Original published format: US 201461993792 P
US201461993811P15.05.2014         Original published format: US 201461993811 P
US20141452752329.10.2014         Original published format: US201414527523
[2017/12]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2015176023
Date:19.11.2015
Language:EN
[2015/46]
Type: A1 Application with search report 
No.:EP3143384
Date:22.03.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 19.11.2015 takes the place of the publication of the European patent application.
[2017/12]
Type: B1 Patent specification 
No.:EP3143384
Date:04.03.2020
Language:EN
[2020/10]
Search report(s)International search report - published on:KR19.11.2015
(Supplementary) European search report - dispatched on:EP15.09.2017
ClassificationIPC:A61B6/03, A61B6/00, G01N23/207, G01N23/083
[2019/32]
CPC:
A61B6/484 (EP); G01N23/083 (EP); G01N23/207 (EP);
G01N2223/204 (EP)
Former IPC [2017/42]A61B6/03, A61B6/00, G01N23/207
Former IPC [2017/12]G01N23/00, G01N23/04, G01N23/06, G01N23/201, G01N23/203, G01N23/223, A61B6/00
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/12]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:RÖNTGENSYSTEM UND -VERFAHREN ZUR MESSUNG, CHARAKTERISIERUNG UND ANALYSE VON PERIODISCHEN STRUKTUREN[2019/32]
English:X-RAY SYSTEM AND METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES[2019/32]
French:SYSTÈME ET PROCÉDÉ AU RAYONS X POUR LA MESURE, LA CARACTÉRISATION ET L'ANALYSE DE STRUCTURES PERIODIQUES[2019/32]
Former [2017/12]RÖNTGENVERFAHREN ZUR MESSUNG, CHARAKTERISIERUNG UND ANALYSE VON PERIODISCHEN STRUKTUREN
Former [2017/12]X-RAY METHOD FOR MEASUREMENT, CHARACTERIZATION, AND ANALYSIS OF PERIODIC STRUCTURES
Former [2017/12]PROCÉDÉ AU RAYONS X POUR LA MESURE, LA CARACTÉRISATION ET L'ANALYSE DE STRUCTURES PERIODIQUES
Entry into regional phase08.12.2016National basic fee paid 
08.12.2016Search fee paid 
08.12.2016Designation fee(s) paid 
08.12.2016Examination fee paid 
Examination procedure04.11.2016Date on which the examining division has become responsible
08.12.2016Examination requested  [2017/12]
29.03.2018Amendment by applicant (claims and/or description)
04.09.2019Communication of intention to grant the patent
14.01.2020Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
14.01.2020Fee for grant paid
14.01.2020Fee for publishing/printing paid
27.01.2020Information about intention to grant a patent
27.01.2020Receipt of the translation of the claim(s)
Opposition(s)07.12.2020No opposition filed within time limit [2021/06]
Fees paidRenewal fee
10.05.2017Renewal fee patent year 03
30.05.2018Renewal fee patent year 04
13.05.2019Renewal fee patent year 05
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU15.05.2015
AL04.03.2020
AT04.03.2020
CY04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
MK04.03.2020
MT04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
TR04.03.2020
IE15.05.2020
LU15.05.2020
BE31.05.2020
CH31.05.2020
FR31.05.2020
LI31.05.2020
BG04.06.2020
GB04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
[2022/31]
Former [2022/30]HU15.05.2015
AL04.03.2020
AT04.03.2020
CY04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
MT04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
TR04.03.2020
IE15.05.2020
LU15.05.2020
BE31.05.2020
CH31.05.2020
FR31.05.2020
LI31.05.2020
BG04.06.2020
GB04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2022/27]HU15.05.2015
AT04.03.2020
CY04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
MT04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
TR04.03.2020
IE15.05.2020
LU15.05.2020
BE31.05.2020
CH31.05.2020
FR31.05.2020
LI31.05.2020
BG04.06.2020
GB04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2021/23]AT04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
IE15.05.2020
LU15.05.2020
BE31.05.2020
CH31.05.2020
FR31.05.2020
LI31.05.2020
BG04.06.2020
GB04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2021/22]AT04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
IE15.05.2020
LU15.05.2020
CH31.05.2020
LI31.05.2020
BG04.06.2020
GB04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2021/20]AT04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
IE15.05.2020
LU15.05.2020
CH31.05.2020
LI31.05.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2021/15]AT04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
LU15.05.2020
CH31.05.2020
LI31.05.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2021/10]AT04.03.2020
CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
IT04.03.2020
LT04.03.2020
LV04.03.2020
MC04.03.2020
NL04.03.2020
PL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SI04.03.2020
SK04.03.2020
SM04.03.2020
CH31.05.2020
LI31.05.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2021/07]CZ04.03.2020
DK04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
LT04.03.2020
LV04.03.2020
NL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SK04.03.2020
SM04.03.2020
CH31.05.2020
LI31.05.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2020/50]CZ04.03.2020
EE04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
LT04.03.2020
LV04.03.2020
NL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SK04.03.2020
SM04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2020/49]CZ04.03.2020
ES04.03.2020
FI04.03.2020
HR04.03.2020
LT04.03.2020
LV04.03.2020
NL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SK04.03.2020
SM04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2020/48]ES04.03.2020
FI04.03.2020
HR04.03.2020
LT04.03.2020
LV04.03.2020
NL04.03.2020
RO04.03.2020
RS04.03.2020
SE04.03.2020
SM04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
PT29.07.2020
Former [2020/47]ES04.03.2020
FI04.03.2020
HR04.03.2020
LT04.03.2020
LV04.03.2020
NL04.03.2020
RS04.03.2020
SE04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
Former [2020/46]FI04.03.2020
HR04.03.2020
LV04.03.2020
NL04.03.2020
RS04.03.2020
SE04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
IS04.07.2020
Former [2020/45]FI04.03.2020
HR04.03.2020
LV04.03.2020
NL04.03.2020
RS04.03.2020
SE04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
Former [2020/39]FI04.03.2020
HR04.03.2020
LV04.03.2020
RS04.03.2020
SE04.03.2020
BG04.06.2020
NO04.06.2020
GR05.06.2020
Former [2020/38]FI04.03.2020
HR04.03.2020
LV04.03.2020
RS04.03.2020
SE04.03.2020
NO04.06.2020
GR05.06.2020
Former [2020/37]FI04.03.2020
HR04.03.2020
LV04.03.2020
RS04.03.2020
SE04.03.2020
NO04.06.2020
Former [2020/35]FI04.03.2020
NO04.06.2020
Documents cited:Search[A]  - PETER BECKER ET AL, "Measuring small lattice distortions in Si-crystals by phase-contrast x-ray topography", J. PHYS. D: APPL. PHYS, (20001231), vol. 33, pages 2678 - 2682, XP055402586 [A] 1-15 * abstract * * page 2678, column right, paragraph 3 - page 2680, column left, paragraph 2 * * figures 1,2 *
 [A]  - NEUHAUSLER U ET AL, "Non-destructive high-resolution X-ray imaging of ULSI micro-electronics using keV X-ray microscopy in Zernike phase contrast", MICROELECTRONIC ENGINEERING, ELSEVIER PUBLISHERS BV., AMSTERDAM, NL, vol. 83, no. 4-9, doi:10.1016/J.MEE.2006.01.225, ISSN 0167-9317, (20060401), pages 1043 - 1046, (20060401), XP024954989 [A] 1-15 * abstract * * page 1043, column right, paragraph 2 - page 1045, column left, paragraph 1 * * figures 1-3 *

DOI:   http://dx.doi.org/10.1016/j.mee.2006.01.225
International search[A]US2009092227  (DAVID CHRISTIAN [DE], et al) [A] 1-28 * See paragraphs [0013]-[0018]. *;
 [A]US2001006413  (BURGHOORN JACOBUS [NL]) [A] 1-28 * See paragraphs [0025]-[0031]. *;
 [A]WO2013160153  (SIEMENS AG [DE], et al) [A] 1-28 * See figure 1. *;
 [A]US2007183579  (BAUMANN JOACHIM [DE], et al) [A] 1-28 * See figure 2. *;
 [A]JP2012187341  (CANON KK) [A] 1-28 * See figure 1. *
Examination   - LIDER V V ET AL, "X-ray phase-contrast methods", CRYSTALLOGRAPHY REPORTS, NAUKA /INTERPERIODICA, MOSCOW, RU, vol. 58, no. 6, doi:10.1134/S1063774513050064, ISSN 1063-7745, (20131114), pages 769 - 787, (20131114), XP035343413

DOI:   http://dx.doi.org/10.1134/S1063774513050064
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.