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Extract from the Register of European Patents

EP About this file: EP3161098

EP3161098 - TUNGSTEN CHEMICAL-MECHANICAL POLISHING COMPOSITION [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  01.09.2023
Database last updated on 20.12.2024
FormerThe patent has been granted
Status updated on  23.09.2022
FormerGrant of patent is intended
Status updated on  26.05.2022
FormerExamination is in progress
Status updated on  16.05.2022
FormerGrant of patent is intended
Status updated on  16.01.2022
FormerExamination is in progress
Status updated on  03.01.2020
FormerRequest for examination was made
Status updated on  31.03.2017
FormerThe international publication has been made
Status updated on  18.01.2017
Most recent event   Tooltip15.11.2024Lapse of the patent in a contracting state
New state(s): BG		published on 18.12.2024  [2024/51]
Applicant(s)For all designated states
CMC Materials, Inc.
870 North Commons Drive
Aurora, IL 60504 / US
[2021/21]
Former [2017/18]For all designated states
Cabot Microelectronics Corporation
870 North Commons Drive
Aurora, Illinois 60504 / US
Inventor(s)01 / FU, Lin
Cabot Microelectronics Corporation
870 North Commons Drive
Aurora, Illinois 60504 / US
02 / GRUMBINE, Steven
Cabot Microelectronics Corporation
870 North Commons Drive
Aurora, Illinois 60504 / US
03 / DYSARD, Jeffrey
Cabot Microelectronics Corporation
870 North Commons Drive
Aurora, Illinois 60504 / US
04 / LI, Tina
Cabot Microelectronics Corporation
870 North Commons Drive
Aurora, Illinois 60504 / US
 [2017/18]
Representative(s)Barker Brettell LLP
100 Hagley Road
Edgbaston
Birmingham B16 8QQ / GB
[2022/43]
Former [2017/18]Trueman, Lucy Petra
Barker Brettell LLP
100 Hagley Road
Edgbaston
Birmingham B16 8QQ / GB
Application number, filing date15812705.025.06.2015
[2017/18]
WO2015US37767
Priority number, dateUS201462017100P25.06.2014         Original published format: US 201462017100 P
US201462017002P25.06.2014         Original published format: US 201462017002 P
[2017/18]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2015200679
Date:30.12.2015
Language:EN
[2015/52]
Type: A1 Application with search report 
No.:EP3161098
Date:03.05.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 30.12.2015 takes the place of the publication of the European patent application.
[2017/18]
Type: B1 Patent specification 
No.:EP3161098
Date:26.10.2022
Language:EN
[2022/43]
Search report(s)International search report - published on:KR30.12.2015
(Supplementary) European search report - dispatched on:EP12.06.2018
ClassificationIPC:C09K3/14, H01L21/3105, C09G1/02, H01L21/321
[2018/28]
CPC:
C09G1/02 (EP,KR,US); C09K3/14 (US); C09K3/1436 (EP,KR,US);
C09K3/1463 (EP,KR,US); H01L21/30625 (US); H01L21/31053 (EP,KR,US);
H01L21/31055 (US); H01L21/3212 (EP,KR,US); C09K13/00 (US) (-)
Former IPC [2017/18]C09K3/14, H01L21/304
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/18]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:CHEMISCH-MECHANISCHE WOLFRAMPOLIERZUSAMMENSETZUNG[2017/18]
English:TUNGSTEN CHEMICAL-MECHANICAL POLISHING COMPOSITION[2017/18]
French:COMPOSITION DE POLISSAGE CHIMICO-MÉCANIQUE DE TUNGSTÈNE[2017/18]
Entry into regional phase18.01.2017National basic fee paid 
18.01.2017Search fee paid 
18.01.2017Designation fee(s) paid 
18.01.2017Examination fee paid 
Examination procedure18.01.2017Examination requested  [2017/18]
18.01.2017Date on which the examining division has become responsible
07.01.2019Amendment by applicant (claims and/or description)
08.01.2020Despatch of a communication from the examining division (Time limit: M06)
09.07.2020Reply to a communication from the examining division
09.03.2021Despatch of a communication from the examining division (Time limit: M06)
26.08.2021Reply to a communication from the examining division
17.01.2022Communication of intention to grant the patent
16.05.2022Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
16.05.2022Fee for grant paid
16.05.2022Fee for publishing/printing paid
03.06.2022Communication of intention to grant the patent
15.09.2022Receipt of the translation of the claim(s)
Opposition(s)27.07.2023No opposition filed within time limit [2023/40]
Fees paidRenewal fee
08.06.2017Renewal fee patent year 03
08.06.2018Renewal fee patent year 04
10.06.2019Renewal fee patent year 05
31.03.2020Renewal fee patent year 06
08.06.2021Renewal fee patent year 07
31.03.2022Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAL26.10.2022
AT26.10.2022
BG26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
IT26.10.2022
LT26.10.2022
LV26.10.2022
MC26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
IE25.06.2023
LU25.06.2023
BE30.06.2023
CH30.06.2023
[2024/51]
Former [2024/26]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
IT26.10.2022
LT26.10.2022
LV26.10.2022
MC26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
IE25.06.2023
LU25.06.2023
BE30.06.2023
CH30.06.2023
Former [2024/24]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
MC26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
IE25.06.2023
LU25.06.2023
BE30.06.2023
CH30.06.2023
Former [2024/21]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
MC26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
IE25.06.2023
LU25.06.2023
Former [2024/15]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
MC26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
LU25.06.2023
Former [2024/09]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
MC26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/51]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SI26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/38]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SK26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/37]AL26.10.2022
AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/35]AT26.10.2022
CZ26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RO26.10.2022
RS26.10.2022
SE26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/34]AT26.10.2022
DK26.10.2022
EE26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RS26.10.2022
SE26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/33]AT26.10.2022
DK26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RS26.10.2022
SE26.10.2022
SM26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/26]AT26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
PL26.10.2022
RS26.10.2022
SE26.10.2022
NO26.01.2023
GR27.01.2023
IS26.02.2023
PT27.02.2023
Former [2023/24]AT26.10.2022
ES26.10.2022
FI26.10.2022
HR26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
SE26.10.2022
NO26.01.2023
GR27.01.2023
PT27.02.2023
Former [2023/23]AT26.10.2022
ES26.10.2022
FI26.10.2022
LT26.10.2022
LV26.10.2022
NL26.10.2022
SE26.10.2022
NO26.01.2023
GR27.01.2023
PT27.02.2023
Former [2023/22]AT26.10.2022
ES26.10.2022
FI26.10.2022
LT26.10.2022
NL26.10.2022
SE26.10.2022
NO26.01.2023
PT27.02.2023
Former [2023/20]LT26.10.2022
NL26.10.2022
NO26.01.2023
Former [2023/17]NL26.10.2022
Documents cited:Search[Y]US2009081927  (GRUMBINE STEVEN [US], et al);
International search[A]US2003209522  (GRUMBINE STEVEN K [US], et al);
 [A]US6776810  (CHERIAN ISAAC K [US], et al);
 [A]US2005079718  (SIDDIQUI JUNAID AHMED [US], et al);
 [A]US2009081927  (GRUMBINE STEVEN [US], et al);
 [A]US2011163262  (HIGUCHI KAZUAKI [JP], et al)
by applicantUS5230833
 US5958288
 US5980775
 US7029508
 US7077880
 US2009081927
 US7994057
 US8252687
 US8529787
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.