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Extract from the Register of European Patents

EP About this file: EP3166133

EP3166133 - QUALITY EVALUATION METHOD FOR LAMINATE HAVING PROTECTIVE LAYER ON SURFACE OF OXIDE SEMICONDUCTOR THIN FILM AND QUALITY CONTROL METHOD FOR OXIDE SEMICONDUCTOR THIN FILM [Right-click to bookmark this link]
StatusThe application is deemed to be withdrawn
Status updated on  29.04.2022
Database last updated on 13.11.2024
FormerExamination is in progress
Status updated on  25.02.2019
FormerRequest for examination was made
Status updated on  07.04.2017
FormerThe international publication has been made
Status updated on  23.12.2016
Most recent event   Tooltip29.04.2022Application deemed to be withdrawnpublished on 01.06.2022  [2022/22]
Applicant(s)For all designated states
Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
2-4, Wakinohama-Kaigandori 2-chome
Chuo-ku
Kobe-shi, Hyogo 651-8585 / JP
[2017/19]
Inventor(s)01 / HAYASHI, Kazushi
c/o Kobe Corporate Research Laboratories in
Kobe Steel, Ltd
5-5, Takatsukadai 1-chome
Nishi-ku, Kobe-shi Hyogo 651-2271 / JP
02 / MIKI, Aya
c/o Kobe Corporate Research Laboratories in
Kobe Steel, Ltd
5-5, Takatsukadai 1-chome
Nishi-ku, Kobe-shi Hyogo 651-2271 / JP
03 / KAWAKAMI, Nobuyuki
c/o Kobe Corporate Research Laboratories in
Kobe Steel, Ltd
5-5, Takatsukadai 1-chome
Nishi-ku, Kobe-shi Hyogo 651-2271 / JP
 [2017/19]
Representative(s)Müller-Boré & Partner Patentanwälte PartG mbB
Friedenheimer Brücke 21
80639 München / DE
[2017/19]
Application number, filing date15814922.922.06.2015
[2017/19]
WO2015JP67848
Priority number, dateJP2014013634901.07.2014         Original published format: JP 2014136349
[2017/19]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016002554
Date:07.01.2016
Language:JA
[2016/01]
Type: A1 Application with search report 
No.:EP3166133
Date:10.05.2017
Language:EN
[2017/19]
Search report(s)International search report - published on:JP07.01.2016
(Supplementary) European search report - dispatched on:EP22.01.2018
ClassificationIPC:H01L21/66, H01L21/28, H01L29/786, H01L29/66, G01R1/06, G01R31/26, G01R31/27, G01R31/265, H01L27/32
[2018/08]
CPC:
G01R31/2656 (EP,US); H01L22/12 (EP,KR,US); G01R1/06 (US);
G01R31/2623 (EP,US); G01R31/27 (US); H01L21/28 (EP,KR,US);
H01L22/14 (EP,KR,US); H01L22/20 (KR); H01L29/66969 (EP,US);
H01L29/786 (US); H01L29/7869 (EP,KR,US); H01L29/78693 (EP,US);
H10K59/00 (US) (-)
Former IPC [2017/19]H01L21/66, H01L21/28, H01L21/336, H01L29/786
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/19]
TitleGerman:QUALITÄTSBEURTEILUNGSVERFAHREN FÜR LAMINAT MIT EINER SCHUTZSCHICHT AUF DER OBERFLÄCHE EINER OXIDHALBLEITER-DÜNNSCHICHT UND QUALITÄTSKONTROLLVERFAHREN FÜR OXIDHALBLEITER-DÜNNSCHICHT[2017/19]
English:QUALITY EVALUATION METHOD FOR LAMINATE HAVING PROTECTIVE LAYER ON SURFACE OF OXIDE SEMICONDUCTOR THIN FILM AND QUALITY CONTROL METHOD FOR OXIDE SEMICONDUCTOR THIN FILM[2017/19]
French:PROCEDE D'EVALUATION DE QUALITE POUR STRATIFIE COMPORTANT UNE COUCHE DE PROTECTION SUR LA SURFACE D'UNE COUCHE MINCE D'OXYDE SEMI-CONDUCTEUR ET PROCEDE DE CONTROLE QUALITE POUR COUCHE MINCE D'OXYDE SEMI-CONDUCTEUR[2017/19]
Entry into regional phase16.12.2016Translation filed 
22.12.2016National basic fee paid 
22.12.2016Search fee paid 
22.12.2016Designation fee(s) paid 
22.12.2016Examination fee paid 
Examination procedure16.12.2016Date on which the examining division has become responsible
22.12.2016Examination requested  [2017/19]
09.08.2018Amendment by applicant (claims and/or description)
28.02.2019Despatch of a communication from the examining division (Time limit: M04)
27.06.2019Reply to a communication from the examining division
07.02.2020Despatch of a communication from the examining division (Time limit: M04)
03.06.2020Reply to a communication from the examining division
27.08.2021Despatch of a communication from the examining division (Time limit: M04)
08.01.2022Application deemed to be withdrawn, date of legal effect  [2022/22]
28.01.2022Despatch of communication that the application is deemed to be withdrawn, reason: reply to the communication from the examining division not received in time  [2022/22]
Fees paidRenewal fee
27.06.2017Renewal fee patent year 03
25.06.2018Renewal fee patent year 04
26.06.2019Renewal fee patent year 05
29.06.2020Renewal fee patent year 06
16.06.2021Renewal fee patent year 07
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Documents cited:Search[XI]JP2012033857  (KOBE STEEL LTD) [X] 1-4,7-14 * paragraphs [0010] , [0011] , [0017] , [0030] , [0060] - [0063] - [0076] , [0094]; figures 3,5 * [I] 5,6;
 [A]JP2013168575  (UNIV TOKYO, et al) [A] 5 * sentences 133-135 *;
 [A]JP2013254948  (KOBE STEEL LTD) [A] 6* paragraphs [0005] , [0007] , [0053]; figures 6A,6B,7 *
International search[A]JP2002098634  (TOCHIGI NIKON CORP, et al) [A] 1-11* , entire text; all drawings & US 2001/0029436 A1 & TW 571106 B & KR 10-2001-0091010 A *;
 [A]JP2011054863  (RIKAGAKU KENKYUSHO, et al) [A] 1-11 * , entire text; all drawings & US 2011/0058155 A1 *;
 [A]JP2011249788  (SEMICONDUCTOR ENERGY LAB CO LTD) [A] 1-11 * , entire text; all drawings & US 2011/0269266 A1 & WO 2011/135987 A1 & TW 201205684 A *;
 [XY]JP2012033857  (KOBE STEEL LTD) [X] 1, 5-8 * , paragraphs [0004], [0017] to [0125]; fig. 1, 3 & CN 102313849 A & KR 10-2012-0002459 A & TW 201226892 A * [Y] 2-4;
 [Y]JP2013168575  (UNIV TOKYO, et al) [Y] 2, 3 * , paragraphs [0133] to [0135] (Family: none) *;
 [Y]JP2013254948  (KOBE STEEL LTD) [Y] 4 * , paragraphs [0007], [0108] to [0130] & US 2015/0091000 A1 & WO 2013/168748 A1 & CN 104272463 A & KR 10-2015-0005591 A & TW 201409718 A *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.