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Extract from the Register of European Patents

EP About this file: EP3164885

EP3164885 - PROCESS AND SYSTEM FOR UNIFORMLY RECRYSTALLIZING AMORPHOUS SILICON SUBSTRATE BY FIBER LASER [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  01.07.2022
Database last updated on 10.07.2024
FormerThe patent has been granted
Status updated on  23.07.2021
FormerGrant of patent is intended
Status updated on  03.02.2021
FormerExamination is in progress
Status updated on  30.03.2020
FormerRequest for examination was made
Status updated on  07.04.2017
FormerThe international publication has been made
Status updated on  21.12.2016
Most recent event   Tooltip14.06.2024Lapse of the patent in a contracting state
New state(s): TR
published on 17.07.2024 [2024/29]
Applicant(s)For all designated states
IPG Photonics Corporation
50 Old Webster Road
Oxford, Massachusetts 01540 / US
[2017/19]
Inventor(s)01 / EROKHIN, Yuri
c/o IPG Photonics Corporation
50 Old Webster Road
Oxford, MA 01540 / US
02 / SAMARTSEV, Igor
c/o IPG Photonics Corporation
50 Old Webster Road Oxford, MA 01540 / US
 [2017/19]
Representative(s)Kobiako von Gamm, Iouri
Kobiako-von Gamm
Patent- und Rechtsanwaltskanzlei
PartG mbB
Bruckmannstraße 13
80638 München / DE
[2021/34]
Former [2017/19]Kobiako von Gamm, Iouri
Bettinger Scheffelt Kobiako von Gamm Rechtsanwälte
Patentanwälte Partnergesellschaft mbB
Bavariaring 14
80336 München / DE
Application number, filing date15815632.301.07.2015
[2017/19]
WO2015US38785
Priority number, dateUS201462020501P03.07.2014         Original published format: US 201462020501 P
[2017/19]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016004175
Date:07.01.2016
Language:EN
[2016/01]
Type: A1 Application with search report 
No.:EP3164885
Date:10.05.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 07.01.2016 takes the place of the publication of the European patent application.
[2017/19]
Type: B1 Patent specification 
No.:EP3164885
Date:25.08.2021
Language:EN
[2021/34]
Search report(s)International search report - published on:KR07.01.2016
(Supplementary) European search report - dispatched on:EP05.02.2018
ClassificationIPC:H01L21/20, H01S3/067, H01S3/094
[2018/10]
CPC:
H01L21/02686 (EP,KR,US); H01L21/02532 (EP,KR,US); H01S3/06745 (EP,KR,US);
H01S3/06754 (EP,KR,US); H01S3/094003 (EP,KR,US); H01S3/1618 (EP,KR,US)
Former IPC [2017/19]H01L21/762, H01L21/822, H01L21/268
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/19]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:VERFAHREN UND SYSTEM ZUR GLEICHMÄSSIGEN REKRISTALLISATION EINES AMORPHEN SILICIUMSUBSTRATS MIT FASERLASER[2017/19]
English:PROCESS AND SYSTEM FOR UNIFORMLY RECRYSTALLIZING AMORPHOUS SILICON SUBSTRATE BY FIBER LASER[2017/19]
French:PROCÉDÉ ET SYSTÈME DE RECRISTALLISATION UNIFORME D'UN SUBSTRAT DE SILICIUM AMORPHE PAR LASER À FIBRE[2017/19]
Entry into regional phase21.12.2016National basic fee paid 
21.12.2016Search fee paid 
21.12.2016Designation fee(s) paid 
21.12.2016Examination fee paid 
Examination procedure21.12.2016Examination requested  [2017/19]
21.12.2016Date on which the examining division has become responsible
31.08.2018Amendment by applicant (claims and/or description)
02.04.2020Despatch of a communication from the examining division (Time limit: M04)
03.08.2020Reply to a communication from the examining division
04.02.2021Communication of intention to grant the patent
02.06.2021Fee for grant paid
02.06.2021Fee for publishing/printing paid
02.06.2021Receipt of the translation of the claim(s)
Opposition(s)27.05.2022No opposition filed within time limit [2022/31]
Fees paidRenewal fee
12.07.2017Renewal fee patent year 03
11.07.2018Renewal fee patent year 04
15.07.2019Renewal fee patent year 05
14.07.2020Renewal fee patent year 06
15.07.2021Renewal fee patent year 07
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See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU01.07.2015
AL25.08.2021
AT25.08.2021
CY25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
IT25.08.2021
LT25.08.2021
LV25.08.2021
MC25.08.2021
MK25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SI25.08.2021
SK25.08.2021
SM25.08.2021
TR25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
[2024/29]
Former [2024/22]HU01.07.2015
AL25.08.2021
AT25.08.2021
CY25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
IT25.08.2021
LT25.08.2021
LV25.08.2021
MC25.08.2021
MK25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SI25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2024/20]HU01.07.2015
AL25.08.2021
AT25.08.2021
CY25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
IT25.08.2021
LT25.08.2021
LV25.08.2021
MC25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SI25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2024/18]HU01.07.2015
AL25.08.2021
AT25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
IT25.08.2021
LT25.08.2021
LV25.08.2021
MC25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SI25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2023/11]AL25.08.2021
AT25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
IT25.08.2021
LT25.08.2021
LV25.08.2021
MC25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SI25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/36]AL25.08.2021
AT25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
IT25.08.2021
LT25.08.2021
LV25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SI25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/29]AL25.08.2021
AT25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
LT25.08.2021
LV25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/26]AT25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
LT25.08.2021
LV25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SK25.08.2021
SM25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/24]AT25.08.2021
CZ25.08.2021
DK25.08.2021
EE25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
LT25.08.2021
LV25.08.2021
PL25.08.2021
RO25.08.2021
RS25.08.2021
SE25.08.2021
SK25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/21]AT25.08.2021
DK25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
LT25.08.2021
LV25.08.2021
PL25.08.2021
RS25.08.2021
SE25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/10]AT25.08.2021
ES25.08.2021
FI25.08.2021
HR25.08.2021
LT25.08.2021
LV25.08.2021
PL25.08.2021
RS25.08.2021
SE25.08.2021
BG25.11.2021
NO25.11.2021
GR26.11.2021
IS25.12.2021
PT27.12.2021
Former [2022/09]AT25.08.2021
ES25.08.2021
FI25.08.2021
LT25.08.2021
RS25.08.2021
SE25.08.2021
BG25.11.2021
NO25.11.2021
PT27.12.2021
Former [2022/08]AT25.08.2021
ES25.08.2021
FI25.08.2021
LT25.08.2021
SE25.08.2021
BG25.11.2021
NO25.11.2021
Former [2022/07]AT25.08.2021
LT25.08.2021
NO25.11.2021
Documents cited:Search[I]US2009107962  (MUNROE MICHAEL J [US], et al) [I] 1-15* the whole document *
International search[XYA]US2007178674  (IMAI YUTAKA [JP], et al) [X] 13, 20 * See abstract, paragraphs [0032], [0066]-[0182], [0215] and figures 1-25. * [Y] 1-4, 11, 14-19 [A] 5-10, 12;
 [A]US2010272129  (HARTER DONALD J [US], et al) [A] 1-20* See abstract, paragraphs [0150]-[0153] and figures 1-2. *;
 [A]US2011086441  (KAWAGUCHI NORIHITO [JP], et al) [A] 1-20 * See abstract, paragraphs [0068]-[0092] and figures 1A-1B. *;
 [Y]US2011133129  (MURAKAMI MAKOTO [US], et al) [Y] 1-4, 11, 14-19 * See abstract, paragraphs [0036]-[0065] and figure 1C. *;
 [Y]US2014050234  (TER-MIKIRTYCHEV VALERI V [US]) [Y] 18-19 * See abstract, paragraph [0077] and figure 6. *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.