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Extract from the Register of European Patents

EP About this file: EP3171397

EP3171397 - METHOD FOR EVALUATING QUALITY OF OXIDE SEMICONDUCTOR THIN FILM AND LAMINATED BODY HAVING PROTECTIVE FILM ON SURFACE OF OXIDE SEMICONDUCTOR THIN FILM, AND METHOD FOR MANAGING QUALITY OF OXIDE SEMICONDUCTOR THIN FILM [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  24.07.2020
Database last updated on 03.10.2024
FormerThe patent has been granted
Status updated on  16.08.2019
FormerGrant of patent is intended
Status updated on  05.04.2019
FormerRequest for examination was made
Status updated on  21.04.2017
FormerThe international publication has been made
Status updated on  12.12.2016
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
Kabushiki Kaisha Kobe Seiko Sho (Kobe Steel, Ltd.)
2-4, Wakinohama-Kaigandori 2-chome
Chuo-ku
Kobe-shi, Hyogo 651-8585 / JP
[2017/21]
Inventor(s)01 / KAWAKAMI, Nobuyuki
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Takatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
02 / HAYASHI, Kazushi
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Takatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
03 / KUGIMIYA, Toshihiro
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Takatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
04 / OCHI, Mototaka
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Takatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
 [2019/38]
Former [2017/21]01 / KAWAKAMI, Nobuyuki
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Tabatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
02 / HAYASHI, Kazushi
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Tabatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
03 / KUGIMIYA, Toshihiro
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Tabatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
04 / OCHI, Mototaka
c/o Kobe Corporate Research Laboratories
in Kobe Steel, Ltd.
5-5, Tabatsukadai 1-chome, Nishi-ku
Kobe-shi, Hyogo 651-2271 / JP
Representative(s)Müller-Boré & Partner Patentanwälte PartG mbB
Friedenheimer Brücke 21
80639 München / DE
[2017/21]
Application number, filing date15822449.306.07.2015
[2017/21]
WO2015JP69387
Priority number, dateJP2014014633716.07.2014         Original published format: JP 2014146337
[2017/21]
Filing languageJA
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016009868
Date:21.01.2016
Language:JA
[2016/03]
Type: A1 Application with search report 
No.:EP3171397
Date:24.05.2017
Language:EN
[2017/21]
Type: B1 Patent specification 
No.:EP3171397
Date:18.09.2019
Language:EN
[2019/38]
Search report(s)International search report - published on:JP21.01.2016
(Supplementary) European search report - dispatched on:EP02.05.2018
ClassificationIPC:G01R31/265, H01L29/66, H01L21/66, H01L29/786, H01L27/146
[2018/08]
CPC:
H01L22/12 (EP,KR,US); G01R31/2656 (EP,US); H01L22/14 (EP,KR,US);
H01L22/20 (KR); H01L29/66969 (EP,US); H01L29/7869 (EP,KR,US);
H01L27/14649 (EP,US); H01L27/1465 (EP,US); H01L29/41733 (US) (-)
Former IPC [2017/21]H01L21/66, H01L21/336, H01L29/786
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/21]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:VERFAHREN ZUR BEURTEILUNG DER QUALITÄT EINER OXIDHALBLEITERDÜNNSCHICHT UND LAMINIERTER KÖRPER MIT EINEM SCHUTZFILM AUF DER OBERFLÄCHE EINER OXIDHALBLEITERDÜNNSCHICHT UND VERFAHREN ZUR VERWALTUNG DER QUALITÄT EINER OXIDHALBLEITERDÜNNSCHICHT[2017/21]
English:METHOD FOR EVALUATING QUALITY OF OXIDE SEMICONDUCTOR THIN FILM AND LAMINATED BODY HAVING PROTECTIVE FILM ON SURFACE OF OXIDE SEMICONDUCTOR THIN FILM, AND METHOD FOR MANAGING QUALITY OF OXIDE SEMICONDUCTOR THIN FILM[2017/21]
French:PROCÉDÉ D'ÉVALUATION DE LA QUALITÉ D'UN FILM MINCE SEMI-CONDUCTEUR D'OXYDE ET D'UN CORPS STRATIFIÉ AYANT UN FILM PROTECTEUR SUR LA SURFACE D'UN FILM MINCE SEMI-CONDUCTEUR D'OXYDE, ET PROCÉDÉ DE GESTION DE LA QUALITÉ D'UN FILM MINCE SEMI-CONDUCTEUR D'OXYDE[2017/21]
Entry into regional phase05.12.2016Translation filed 
08.12.2016National basic fee paid 
08.12.2016Search fee paid 
08.12.2016Designation fee(s) paid 
08.12.2016Examination fee paid 
Examination procedure05.12.2016Date on which the examining division has become responsible
08.12.2016Examination requested  [2017/21]
08.11.2018Amendment by applicant (claims and/or description)
05.04.2019Communication of intention to grant the patent
05.08.2019Receipt of the translation of the claim(s)
08.08.2019Fee for grant paid
08.08.2019Fee for publishing/printing paid
Divisional application(s)EP18205189.6  / EP3462196
Opposition(s)19.06.2020No opposition filed within time limit [2020/35]
Fees paidRenewal fee
25.07.2017Renewal fee patent year 03
23.07.2018Renewal fee patent year 04
26.07.2019Renewal fee patent year 05
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipAL18.09.2019
AT18.09.2019
CY18.09.2019
CZ18.09.2019
DK18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
MC18.09.2019
MK18.09.2019
MT18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SI18.09.2019
SK18.09.2019
SM18.09.2019
TR18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
IS19.01.2020
PT20.01.2020
[2022/32]
Former [2022/27]AL18.09.2019
AT18.09.2019
CY18.09.2019
CZ18.09.2019
DK18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
MC18.09.2019
MT18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SI18.09.2019
SK18.09.2019
SM18.09.2019
TR18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
IS19.01.2020
PT20.01.2020
Former [2021/15]AL18.09.2019
AT18.09.2019
CZ18.09.2019
DK18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
MC18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SI18.09.2019
SK18.09.2019
SM18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
IS19.01.2020
PT20.01.2020
Former [2020/37]AL18.09.2019
AT18.09.2019
CZ18.09.2019
DK18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SI18.09.2019
SK18.09.2019
SM18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
IS19.01.2020
PT20.01.2020
Former [2020/36]AL18.09.2019
AT18.09.2019
CZ18.09.2019
DK18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SK18.09.2019
SM18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
IS19.01.2020
PT20.01.2020
Former [2020/27]AL18.09.2019
AT18.09.2019
CZ18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SK18.09.2019
SM18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
PT20.01.2020
IS24.02.2020
Former [2020/25]AL18.09.2019
AT18.09.2019
CZ18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
SK18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
PT20.01.2020
IS24.02.2020
Former [2020/24]AL18.09.2019
AT18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
PT20.01.2020
IS24.02.2020
Former [2020/23]AL18.09.2019
AT18.09.2019
EE18.09.2019
ES18.09.2019
FI18.09.2019
HR18.09.2019
IT18.09.2019
LT18.09.2019
LV18.09.2019
PL18.09.2019
RO18.09.2019
RS18.09.2019
SE18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
PT20.01.2020
Former [2020/22]AL18.09.2019
EE18.09.2019
FI18.09.2019
HR18.09.2019
LT18.09.2019
LV18.09.2019
RS18.09.2019
SE18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
PT20.01.2020
Former [2020/15]AL18.09.2019
FI18.09.2019
HR18.09.2019
LT18.09.2019
LV18.09.2019
RS18.09.2019
SE18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
Former [2020/12]FI18.09.2019
HR18.09.2019
LT18.09.2019
LV18.09.2019
RS18.09.2019
SE18.09.2019
BG18.12.2019
NO18.12.2019
GR19.12.2019
Former [2020/10]FI18.09.2019
LT18.09.2019
SE18.09.2019
BG18.12.2019
NO18.12.2019
Former [2020/09]FI18.09.2019
LT18.09.2019
NO18.12.2019
Former [2020/08]LT18.09.2019
NO18.12.2019
Documents cited:Search[Y]JP2012033857  (KOBE STEEL LTD) [Y] 8,9* paragraph [0061]; figures 1-5 *;
 [Y]JP2013168575  (UNIV TOKYO, et al) [Y] 2,5-7 * paragraph [0133]; figure 6 *;
 [IY]JP2013254948  (KOBE STEEL LTD) [I] 1,3,4 * paragraphs [0007] , [0053] , [0151] * [Y] 2,5-9
International search[A]JP2002098634  (TOCHIGI NIKON CORP, et al) [A] 1-14* , entire text; all drawings & US 2001/0029436 A1 & TW 571106 B & KR 10-2001-0091010 A *;
 [A]JP2011054863  (RIKAGAKU KENKYUSHO, et al) [A] 1-14 * , entire text; all drawings & US 2011/0058155 A1 *;
 [A]JP2011249788  (SEMICONDUCTOR ENERGY LAB CO LTD) [A] 1-14 * , entire text; all drawings & US 2011/0269266 A1 & WO 2011/135987 A1 & TW 201205684 A *;
 [A]JP2012033857  (KOBE STEEL LTD) [A] 1-14 * , entire text; all drawings & CN 102313849 A & KR 10-2012-0002459 A & TW 201226892 A *;
 [A]JP2013168575  (UNIV TOKYO, et al) [A] 1-14 * , paragraphs [0133] to [0135] (Family: none) *;
 [A]JP2013254948  (KOBE STEEL LTD) [A] 1-14 * , entire text; all drawings & US 2015/0091000 A1 & WO 2013/168748 A1 & CN 104272463 A & KR 10-2015-0005591 A & TW 201409718 A *
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.