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Extract from the Register of European Patents

EP About this file: EP3204733

EP3204733 - LOW PRESSURE FLUCTUATION FLOW CONTROL APPARATUS AND METHOD [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  17.03.2023
Database last updated on 25.09.2024
FormerThe patent has been granted
Status updated on  08.04.2022
FormerGrant of patent is intended
Status updated on  02.12.2021
FormerExamination is in progress
Status updated on  15.01.2021
FormerRequest for examination was made
Status updated on  14.07.2017
FormerThe international publication has been made
Status updated on  08.04.2017
Most recent event   Tooltip06.09.2024Lapse of the patent in a contracting state
New state(s): MT		published on 09.10.2024 [2024/41]
Applicant(s)For all designated states
Versum Materials US, LLC
8555 S. River Parkway
Tempe, AZ 85284 / US
[2017/33]
Inventor(s)01 / BAYER, Benjamin Patrick
7201 Hamilton Boulevard
Allentown, PA 18195 / US
02 / CHAN, Laura Suk Chong
7201 Hamilton Boulevard
Allentown, PA 18195 / US
03 / EREIFEJ, Fady Khalil
7201 Hamilton Boulevard
Allentown, PA 18195 / US
04 / ROYBAL, Daniel Valentin
7201 Hamilton Boulevard
Allentown, PA 18195 / US
 [2017/33]
Representative(s)Sommer, Andrea, et al
Andrea Sommer
Patentanwälte Partnerschaft mbB
Uhlandstraße 2
80336 München / DE
[N/P]
Former [2022/19]Sommer, Andrea, et al
Patentanwälte PartG mbB
Uhlandstraße 2
80336 München / DE
Former [2017/33]Andrae | Westendorp Patentanwälte Partnerschaft
Uhlandstraße 2
80336 München / DE
Application number, filing date15848899.908.10.2015
[2017/33]
WO2015US54698
Priority number, dateUS201462061538P08.10.2014         Original published format: US 201462061538 P
[2017/33]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016057797
Date:14.04.2016
Language:EN
[2016/15]
Type: A1 Application with search report 
No.:EP3204733
Date:16.08.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 14.04.2016 takes the place of the publication of the European patent application.
[2017/33]
Type: B1 Patent specification 
No.:EP3204733
Date:11.05.2022
Language:EN
[2022/19]
Search report(s)International search report - published on:KR14.04.2016
(Supplementary) European search report - dispatched on:EP22.06.2018
ClassificationIPC:B01F5/10, B01F3/04, G05D7/06, G05D11/13
[2021/51]
CPC:
G05D7/0635 (EP,CN,KR,US); G05D11/132 (EP,CN,KR,US); B01F25/53 (EP,CN,KR,US);
B01F23/29 (EP,CN,KR,US); B01F23/45 (US); B01F23/49 (US);
B01F35/187 (US); B01F35/21112 (US); B01F35/2213 (US);
G01F1/34 (US); G05D7/0647 (US); G05D7/0688 (US);
B01F2101/58 (US) (-)
Former IPC [2018/30]G01F1/34, G01F1/20, B24B57/02, G05D7/01
Former IPC [2017/33]G01F1/34, G01F1/20
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/33]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:FLUSSSTEUERUNGSVORRICHTUNG MIT GERINGER DRUCKSCHWANKUNG UND VERFAHREN[2017/33]
English:LOW PRESSURE FLUCTUATION FLOW CONTROL APPARATUS AND METHOD[2017/33]
French:APPAREIL RÉGULATEUR DE DÉBIT À FAIBLE FLUCTUATION DE PRESSION ET PROCÉDÉ[2017/33]
Entry into regional phase03.05.2017National basic fee paid 
03.05.2017Search fee paid 
03.05.2017Designation fee(s) paid 
03.05.2017Examination fee paid 
Examination procedure03.05.2017Examination requested  [2017/33]
03.05.2017Date on which the examining division has become responsible
21.01.2019Amendment by applicant (claims and/or description)
15.01.2021Despatch of a communication from the examining division (Time limit: M03)
22.04.2021Reply to a communication from the examining division
03.12.2021Communication of intention to grant the patent
31.03.2022Fee for grant paid
31.03.2022Fee for publishing/printing paid
31.03.2022Receipt of the translation of the claim(s)
Opposition(s)14.02.2023No opposition filed within time limit [2023/16]
Fees paidRenewal fee
25.10.2017Renewal fee patent year 03
11.10.2018Renewal fee patent year 04
15.10.2019Renewal fee patent year 05
14.10.2020Renewal fee patent year 06
29.09.2021Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU08.10.2015
AL11.05.2022
AT11.05.2022
CY11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
IT11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
MK11.05.2022
MT11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
TR11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
[2024/41]
Former [2024/29]HU08.10.2015
AL11.05.2022
AT11.05.2022
CY11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
IT11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
MK11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
TR11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2024/27]HU08.10.2015
AL11.05.2022
AT11.05.2022
CY11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
IT11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
MK11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2024/21]HU08.10.2015
AL11.05.2022
AT11.05.2022
CY11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
IT11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2024/18]HU08.10.2015
AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
IT11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2024/11]AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
IT11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2023/47]AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
GB08.10.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2023/35]AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
LU08.10.2022
CH31.10.2022
FR31.10.2022
LI31.10.2022
Former [2023/30]AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
LU08.10.2022
Former [2023/25]AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
MC11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SI11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
Former [2023/17]AL11.05.2022
AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
Former [2023/09]AT11.05.2022
CZ11.05.2022
DK11.05.2022
EE11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
NL11.05.2022
PL11.05.2022
RO11.05.2022
RS11.05.2022
SE11.05.2022
SK11.05.2022
SM11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
Former [2023/07]AT11.05.2022
DK11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
NL11.05.2022
PL11.05.2022
RS11.05.2022
SE11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
Former [2022/51]AT11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
NL11.05.2022
PL11.05.2022
RS11.05.2022
SE11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
IS11.09.2022
PT12.09.2022
Former [2022/50]AT11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
NL11.05.2022
PL11.05.2022
RS11.05.2022
SE11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
PT12.09.2022
Former [2022/49]AT11.05.2022
ES11.05.2022
FI11.05.2022
HR11.05.2022
LT11.05.2022
LV11.05.2022
NL11.05.2022
SE11.05.2022
BG11.08.2022
NO11.08.2022
GR12.08.2022
PT12.09.2022
Former [2022/48]AT11.05.2022
ES11.05.2022
FI11.05.2022
LT11.05.2022
NL11.05.2022
SE11.05.2022
NO11.08.2022
PT12.09.2022
Former [2022/47]AT11.05.2022
ES11.05.2022
FI11.05.2022
LT11.05.2022
SE11.05.2022
NO11.08.2022
PT12.09.2022
Documents cited:Search[Y]US2002034122  (LEMKE TRAVIS A [US]) [Y] 1-21 * the whole document *;
 [Y]US2002085447  (SNYDER DAVID L [US], et al) [Y] 1-21 * the whole document *;
 [Y]US2004071555  (CHEN PING-HSU [TW], et al) [Y] 1-21* the whole document *;
 [XYI]US2014261824  (BYERS GARY ALLEN [US], et al) [X] 1 * the whole document * [Y] 5-21 [I] 2-4
International search[A]US2002034122  (LEMKE TRAVIS A [US]) [A] 1-4, 25-26, 28-29 * See paragraphs [0028]-[0034], [0086]-[0094] and figures 1, 9. *;
 [A]US2002085447  (SNYDER DAVID L [US], et al) [A] 1-4, 25-26, 28-29* See paragraphs [0024]-[0034] and figure 1. *;
 [A]WO03071369  (LAM RES CORP [US]) [A] 1-4, 25-26, 28-29 * See paragraphs [0035]-[0048], [0056]-[0059] and figures 2A-2B, 3, 6. *;
 [A]US2004071555  (CHEN PING-HSU [TW], et al) [A] 1-4, 25-26, 28-29 * See paragraphs [0029]-[0033] and figures 2-3. *;
 [X]US2014261824  (BYERS GARY ALLEN [US], et al) [X] 1-4, 25-26, 28-29 * See paragraphs [0011], [0033], [0090]-[0108], [0200]-[0217] and figures 1A-1C, 7-8, 19. *
by applicantUS5573385
 US5983926
 US6095194
 US6168048
 US6364640
 US6889706
 US7108241
 US7292945
 US7447600
 US7650903
 US7885773
 US8155896
 US2014261824
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.