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Extract from the Register of European Patents

EP About this file: EP3231007

EP3231007 - ATOMIC LAYER DEPOSITION PASSIVATION FOR VIA [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  18.02.2022
Database last updated on 03.09.2024
FormerThe patent has been granted
Status updated on  12.03.2021
FormerGrant of patent is intended
Status updated on  11.01.2021
FormerRequest for examination was made
Status updated on  15.09.2017
FormerThe international publication has been made
Status updated on  14.07.2017
Most recent event   Tooltip27.04.2024Lapse of the patent in a contracting state
New state(s): MK		published on 29.05.2024  [2024/22]
Applicant(s)For all designated states
Hewlett-Packard Development Company, L.P.
10300 Energy Drive
Spring TX 77389 / US
[2019/20]
Former [2017/42]For all designated states
Hewlett-Packard Development Company, L.P.
11445 Compaq Center Drive W.
Houston, Texas 77070 / US
Inventor(s)01 / CHEN, Zhizhang
1000 NE Circle Blvd.
Corvallis, Oregon 97330 / US
02 / SHAARAWI, Mohammed Saad
Mailstop 323C
1070 NE Circle Blvd.
Corvallis, Oregon 97330 / US
03 / PUGLIESE, JR., Roberto A.
M/S 323D
1070 NE Circle Blvd.
Corvallis, Oregon 97330 / US
 [2017/42]
Representative(s)Haseltine Lake Kempner LLP
One Portwall Square
Portwall Lane
Bristol BS1 6BH / GB
[N/P]
Former [2021/15]Haseltine Lake Kempner LLP
Redcliff Quay
120 Redcliff Street
Bristol BS1 6HU / GB
Former [2017/42]Haseltine Lake LLP
Redcliff Quay 120 Redcliff Street
Bristol BS1 6HU / GB
Application number, filing date15880477.330.01.2015
[2017/42]
WO2015US13745
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016122584
Date:04.08.2016
Language:EN
[2016/31]
Type: A1 Application with search report 
No.:EP3231007
Date:18.10.2017
Language:EN
The application published by WIPO in one of the EPO official languages on 04.08.2016 takes the place of the publication of the European patent application.
[2017/42]
Type: B1 Patent specification 
No.:EP3231007
Date:14.04.2021
Language:EN
[2021/15]
Search report(s)International search report - published on:KR04.08.2016
(Supplementary) European search report - dispatched on:EP20.07.2018
ClassificationIPC:H01L21/205, B41J2/14, B41J2/16, C23C16/455, H01L21/768, C23C16/04
[2018/34]
CPC:
B41J2/14129 (EP,US); B41J2/1603 (EP,US); B41J2/1628 (EP,US);
B41J2/1629 (EP,US); B41J2/1631 (EP,US); B41J2/1642 (EP,US);
B41J2/1645 (EP,US); B41J2/1646 (EP,US); C23C16/045 (EP,US);
C23C16/45525 (EP,US); H01L21/76832 (EP,US); H01L21/76834 (EP,US) (-)
Former IPC [2017/42]H01L21/205
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2017/42]
Extension statesBANot yet paid
MENot yet paid
TitleGerman:ATOMLAGENABSCHEIDUNGSPASSIVIERUNG FÜR DURCHKONTAKTIERUNG[2017/42]
English:ATOMIC LAYER DEPOSITION PASSIVATION FOR VIA[2017/42]
French:PASSIVATION DE DÉPÔT DE COUCHES ATOMIQUES DESTINÉE À UN TROU D'INTERCONNEXION[2017/42]
Entry into regional phase13.07.2017National basic fee paid 
13.07.2017Search fee paid 
13.07.2017Designation fee(s) paid 
13.07.2017Examination fee paid 
Examination procedure13.07.2017Examination requested  [2017/42]
13.07.2017Date on which the examining division has become responsible
07.02.2019Amendment by applicant (claims and/or description)
12.01.2021Communication of intention to grant the patent
08.03.2021Fee for grant paid
08.03.2021Fee for publishing/printing paid
08.03.2021Receipt of the translation of the claim(s)
Opposition(s)17.01.2022No opposition filed within time limit [2022/12]
Fees paidRenewal fee
13.07.2017Renewal fee patent year 03
24.01.2018Renewal fee patent year 04
24.01.2019Renewal fee patent year 05
21.01.2020Renewal fee patent year 06
20.01.2021Renewal fee patent year 07
Opt-out from the exclusive  Tooltip
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Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU30.01.2015
AL14.04.2021
AT14.04.2021
CY14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
IT14.04.2021
LT14.04.2021
LV14.04.2021
MC14.04.2021
MK14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SI14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
[2024/22]
Former [2024/20]HU30.01.2015
AL14.04.2021
AT14.04.2021
CY14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
IT14.04.2021
LT14.04.2021
LV14.04.2021
MC14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SI14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2024/18]HU30.01.2015
AL14.04.2021
AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
IT14.04.2021
LT14.04.2021
LV14.04.2021
MC14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SI14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/39]AL14.04.2021
AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
IT14.04.2021
LT14.04.2021
LV14.04.2021
MC14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SI14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/36]AL14.04.2021
AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
IT14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SI14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/29]AL14.04.2021
AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SI14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/26]AL14.04.2021
AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/23]AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/10]AT14.04.2021
CZ14.04.2021
DK14.04.2021
EE14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
PT16.08.2021
IS22.12.2021
Former [2022/09]AT14.04.2021
CZ14.04.2021
DK14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RO14.04.2021
RS14.04.2021
SE14.04.2021
SK14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/08]AT14.04.2021
CZ14.04.2021
DK14.04.2021
ES14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RS14.04.2021
SE14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2022/07]AT14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RS14.04.2021
SE14.04.2021
SM14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2021/52]AT14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
PL14.04.2021
RS14.04.2021
SE14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2021/51]AT14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
RS14.04.2021
SE14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
IS14.08.2021
PT16.08.2021
Former [2021/50]AT14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
SE14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
PT16.08.2021
Former [2021/49]AT14.04.2021
FI14.04.2021
HR14.04.2021
LT14.04.2021
LV14.04.2021
NL14.04.2021
SE14.04.2021
BG14.07.2021
NO14.07.2021
GR15.07.2021
Former [2021/47]AT14.04.2021
FI14.04.2021
LT14.04.2021
NL14.04.2021
BG14.07.2021
Former [2021/46]AT14.04.2021
FI14.04.2021
LT14.04.2021
Documents cited:Search[XYI]US2004087126  (FARTASH ARJANG [US]) [X] 1 * paragraphs [0001] - [0003] - [0 18] - [0037] - [0042] - [0044]; figures 1-8,13 * [Y] 6,7,10-15 [I] 2-5,8,9;
 [XI]US2011059558  (TAKEUCHI SOUTA [JP], et al) [X] 1 * paragraphs [0033] - [0049] - [0 57] - [0064]; figures 1,2,4,5,6 * [I] 2-5,8,9;
 [A]US2013063525  (SIEBER KURT D [US]) [A] 2-5,8-15 * paragraphs [0014] , [0018] - [0020] - [0039] , [0050] , [0051] , [0053] , [0054] , [0055] , [0065]; figures 5-9 *;
 [YA]US2006238576  (LEE FRANCIS C [TW], et al) [Y] 6,7 * paragraphs [0022] , [0038] , [0040]; figures 2-4 * [A] 1,10,14;
 [YA]US7025894  (HESS ULRICH E [US], et al) [Y] 10-15 * the whole document * [A] 1-9;
 [A]US2003035027  (VANDER PLAS HUBERT ALLEN [US], et al) [A] 1-15 * paragraphs [0052] , [0053]; figures 3-5 *;
 [A]US2014144681  (PUSHPARAJ VICTOR LOUIS AROCKIARAJ [US], et al) [A] 1-15 * paragraphs [0006] , [0022] , [0 36] , [0041] , [0045] , [0046] , [0053] , [0058] - [0064] - [0 71] , [0072] , [0079]; figures 1,6,7 *
International search[Y]US2004227791  (ANDERSON FRANK EDWARD [US], et al) [Y] 1-15 * See abstract, paragraphs [0022]-[0032], and figures 1-6. *;
 [Y]US2012293587  (BAKKER CHRIS [US], et al) [Y] 1-15 * See abstract, paragraphs [0026]-[0037], and figure 4. *;
 [Y]US2002122097  (BEERLING TIMOTHY E [US], et al) [Y] 2 * See abstract, paragraphs [0026]-[0032], and figures 4a-5b. *;
 [Y]US2004023461  (AHN KIE Y [US], et al) [Y] 13 * See abstract, paragraph [0062], and figure 3. *;
 [A]US2005012791  (ANDERSON FRANK E [US], et al) [A] 1-15 * See abstract, paragraphs [0049]-[0065], and figures 3-4. *
ExaminationUS2004017419
 EP2186641
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.