EP3231007 - ATOMIC LAYER DEPOSITION PASSIVATION FOR VIA [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 18.02.2022 Database last updated on 03.09.2024 | |
Former | The patent has been granted Status updated on 12.03.2021 | ||
Former | Grant of patent is intended Status updated on 11.01.2021 | ||
Former | Request for examination was made Status updated on 15.09.2017 | ||
Former | The international publication has been made Status updated on 14.07.2017 | Most recent event Tooltip | 27.04.2024 | Lapse of the patent in a contracting state New state(s): MK | published on 29.05.2024 [2024/22] | Applicant(s) | For all designated states Hewlett-Packard Development Company, L.P. 10300 Energy Drive Spring TX 77389 / US | [2019/20] |
Former [2017/42] | For all designated states Hewlett-Packard Development Company, L.P. 11445 Compaq Center Drive W. Houston, Texas 77070 / US | Inventor(s) | 01 /
CHEN, Zhizhang 1000 NE Circle Blvd. Corvallis, Oregon 97330 / US | 02 /
SHAARAWI, Mohammed Saad Mailstop 323C 1070 NE Circle Blvd. Corvallis, Oregon 97330 / US | 03 /
PUGLIESE, JR., Roberto A. M/S 323D 1070 NE Circle Blvd. Corvallis, Oregon 97330 / US | [2017/42] | Representative(s) | Haseltine Lake Kempner LLP One Portwall Square Portwall Lane Bristol BS1 6BH / GB | [N/P] |
Former [2021/15] | Haseltine Lake Kempner LLP Redcliff Quay 120 Redcliff Street Bristol BS1 6HU / GB | ||
Former [2017/42] | Haseltine Lake LLP Redcliff Quay 120 Redcliff Street Bristol BS1 6HU / GB | Application number, filing date | 15880477.3 | 30.01.2015 | [2017/42] | WO2015US13745 | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2016122584 | Date: | 04.08.2016 | Language: | EN | [2016/31] | Type: | A1 Application with search report | No.: | EP3231007 | Date: | 18.10.2017 | Language: | EN | The application published by WIPO in one of the EPO official languages on 04.08.2016 takes the place of the publication of the European patent application. | [2017/42] | Type: | B1 Patent specification | No.: | EP3231007 | Date: | 14.04.2021 | Language: | EN | [2021/15] | Search report(s) | International search report - published on: | KR | 04.08.2016 | (Supplementary) European search report - dispatched on: | EP | 20.07.2018 | Classification | IPC: | H01L21/205, B41J2/14, B41J2/16, C23C16/455, H01L21/768, C23C16/04 | [2018/34] | CPC: |
B41J2/14129 (EP,US);
B41J2/1603 (EP,US);
B41J2/1628 (EP,US);
B41J2/1629 (EP,US);
B41J2/1631 (EP,US);
B41J2/1642 (EP,US);
B41J2/1645 (EP,US);
B41J2/1646 (EP,US);
C23C16/045 (EP,US);
|
Former IPC [2017/42] | H01L21/205 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2017/42] | Extension states | BA | Not yet paid | ME | Not yet paid | Title | German: | ATOMLAGENABSCHEIDUNGSPASSIVIERUNG FÜR DURCHKONTAKTIERUNG | [2017/42] | English: | ATOMIC LAYER DEPOSITION PASSIVATION FOR VIA | [2017/42] | French: | PASSIVATION DE DÉPÔT DE COUCHES ATOMIQUES DESTINÉE À UN TROU D'INTERCONNEXION | [2017/42] | Entry into regional phase | 13.07.2017 | National basic fee paid | 13.07.2017 | Search fee paid | 13.07.2017 | Designation fee(s) paid | 13.07.2017 | Examination fee paid | Examination procedure | 13.07.2017 | Examination requested [2017/42] | 13.07.2017 | Date on which the examining division has become responsible | 07.02.2019 | Amendment by applicant (claims and/or description) | 12.01.2021 | Communication of intention to grant the patent | 08.03.2021 | Fee for grant paid | 08.03.2021 | Fee for publishing/printing paid | 08.03.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 17.01.2022 | No opposition filed within time limit [2022/12] | Fees paid | Renewal fee | 13.07.2017 | Renewal fee patent year 03 | 24.01.2018 | Renewal fee patent year 04 | 24.01.2019 | Renewal fee patent year 05 | 21.01.2020 | Renewal fee patent year 06 | 20.01.2021 | Renewal fee patent year 07 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 30.01.2015 | AL | 14.04.2021 | AT | 14.04.2021 | CY | 14.04.2021 | CZ | 14.04.2021 | DK | 14.04.2021 | EE | 14.04.2021 | ES | 14.04.2021 | FI | 14.04.2021 | HR | 14.04.2021 | IT | 14.04.2021 | LT | 14.04.2021 | LV | 14.04.2021 | MC | 14.04.2021 | MK | 14.04.2021 | NL | 14.04.2021 | PL | 14.04.2021 | RO | 14.04.2021 | RS | 14.04.2021 | SE | 14.04.2021 | SI | 14.04.2021 | SK | 14.04.2021 | SM | 14.04.2021 | BG | 14.07.2021 | NO | 14.07.2021 | GR | 15.07.2021 | IS | 14.08.2021 | PT | 16.08.2021 | [2024/22] |
Former [2024/20] | HU | 30.01.2015 | |
AL | 14.04.2021 | ||
AT | 14.04.2021 | ||
CY | 14.04.2021 | ||
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
IT | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
MC | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SI | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2024/18] | HU | 30.01.2015 | |
AL | 14.04.2021 | ||
AT | 14.04.2021 | ||
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
IT | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
MC | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SI | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/39] | AL | 14.04.2021 | |
AT | 14.04.2021 | ||
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
IT | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
MC | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SI | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/36] | AL | 14.04.2021 | |
AT | 14.04.2021 | ||
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
IT | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SI | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/29] | AL | 14.04.2021 | |
AT | 14.04.2021 | ||
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SI | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/26] | AL | 14.04.2021 | |
AT | 14.04.2021 | ||
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/23] | AT | 14.04.2021 | |
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/10] | AT | 14.04.2021 | |
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
EE | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
PT | 16.08.2021 | ||
IS | 22.12.2021 | ||
Former [2022/09] | AT | 14.04.2021 | |
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RO | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SK | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/08] | AT | 14.04.2021 | |
CZ | 14.04.2021 | ||
DK | 14.04.2021 | ||
ES | 14.04.2021 | ||
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2022/07] | AT | 14.04.2021 | |
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
SM | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2021/52] | AT | 14.04.2021 | |
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
PL | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
Former [2021/51] | AT | 14.04.2021 | |
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
RS | 14.04.2021 | ||
SE | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
IS | 14.08.2021 | ||
PT | 16.08.2021 | ||
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FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
SE | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
PT | 16.08.2021 | ||
Former [2021/49] | AT | 14.04.2021 | |
FI | 14.04.2021 | ||
HR | 14.04.2021 | ||
LT | 14.04.2021 | ||
LV | 14.04.2021 | ||
NL | 14.04.2021 | ||
SE | 14.04.2021 | ||
BG | 14.07.2021 | ||
NO | 14.07.2021 | ||
GR | 15.07.2021 | ||
Former [2021/47] | AT | 14.04.2021 | |
FI | 14.04.2021 | ||
LT | 14.04.2021 | ||
NL | 14.04.2021 | ||
BG | 14.07.2021 | ||
Former [2021/46] | AT | 14.04.2021 | |
FI | 14.04.2021 | ||
LT | 14.04.2021 | Documents cited: | Search | [XYI]US2004087126 (FARTASH ARJANG [US]) [X] 1 * paragraphs [0001] - [0003] - [0 18] - [0037] - [0042] - [0044]; figures 1-8,13 * [Y] 6,7,10-15 [I] 2-5,8,9; | [XI]US2011059558 (TAKEUCHI SOUTA [JP], et al) [X] 1 * paragraphs [0033] - [0049] - [0 57] - [0064]; figures 1,2,4,5,6 * [I] 2-5,8,9; | [A]US2013063525 (SIEBER KURT D [US]) [A] 2-5,8-15 * paragraphs [0014] , [0018] - [0020] - [0039] , [0050] , [0051] , [0053] , [0054] , [0055] , [0065]; figures 5-9 *; | [YA]US2006238576 (LEE FRANCIS C [TW], et al) [Y] 6,7 * paragraphs [0022] , [0038] , [0040]; figures 2-4 * [A] 1,10,14; | [YA]US7025894 (HESS ULRICH E [US], et al) [Y] 10-15 * the whole document * [A] 1-9; | [A]US2003035027 (VANDER PLAS HUBERT ALLEN [US], et al) [A] 1-15 * paragraphs [0052] , [0053]; figures 3-5 *; | [A]US2014144681 (PUSHPARAJ VICTOR LOUIS AROCKIARAJ [US], et al) [A] 1-15 * paragraphs [0006] , [0022] , [0 36] , [0041] , [0045] , [0046] , [0053] , [0058] - [0064] - [0 71] , [0072] , [0079]; figures 1,6,7 * | International search | [Y]US2004227791 (ANDERSON FRANK EDWARD [US], et al) [Y] 1-15 * See abstract, paragraphs [0022]-[0032], and figures 1-6. *; | [Y]US2012293587 (BAKKER CHRIS [US], et al) [Y] 1-15 * See abstract, paragraphs [0026]-[0037], and figure 4. *; | [Y]US2002122097 (BEERLING TIMOTHY E [US], et al) [Y] 2 * See abstract, paragraphs [0026]-[0032], and figures 4a-5b. *; | [Y]US2004023461 (AHN KIE Y [US], et al) [Y] 13 * See abstract, paragraph [0062], and figure 3. *; | [A]US2005012791 (ANDERSON FRANK E [US], et al) [A] 1-15 * See abstract, paragraphs [0049]-[0065], and figures 3-4. * | Examination | US2004017419 | EP2186641 |