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Extract from the Register of European Patents

EP About this file: EP3311400

EP3311400 - VERTICAL TRANSISTOR USING A THROUGH SILICON VIA GATE [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  12.05.2023
Database last updated on 28.03.2026
FormerThe patent has been granted
Status updated on  03.06.2022
FormerGrant of patent is intended
Status updated on  23.02.2022
FormerExamination is in progress
Status updated on  21.02.2020
FormerRequest for examination was made
Status updated on  23.03.2018
FormerThe international publication has been made
Status updated on  23.12.2016
Most recent event   Tooltip19.12.2025Lapse of the patent in a contracting state
New state(s): TR		published on 21.01.2026  [2026/04]
Applicant(s)For all designated states
Intel Corporation
2200 Mission College Boulevard
Santa Clara, CA 95054 / US
[2018/17]
Inventor(s)01 / YANG, Xiaodong
6554 NW Dingo Dr.
Portland, Oregon 97229 / US
02 / LIN, Jui-Yen
3120 NW John Olsen Ave.
Apt 22203
Portland, Oregon 97124 / US
03 / PHOA, Kinyip
17522 SW Kimmel Ct.
Beaverton, Oregon 97007 / US
04 / NIDHI, Nidhi
132 NE Greenridge Ter.
Hillsboro, Oregon 97124 / US
05 / CHEN, Yi Wei
110 NE Greenridge Ter.
Hillsboro, OR 97124 / US
06 / SHIH, Kun-huan
c/o Intel Corporation
2200 Mission College Boulevard
M/S: RNB4-150
Santa Clara, CA 95054 / US
07 / HAFEZ, Walid M.
4060 NW Carlton Ct.
Portland, Oregon 97229 / US
08 / TSAI, Curtis
15021 SW Telluride Ter.
Beaverton, Oregon 97007 / US
 [2018/28]
Former [2018/17]01 / YANG, Xiaodong
6554 NW Dingo Dr.
Portland, Oregon 97229 / US
02 / LIN, Jui-Yen
3120 NW John Olsen Ave.
Apt 22203
Portland, Oregon 97124 / US
03 / PHOA, Kinyip
17522 SW Kimmel Ct.
Beaverton, Oregon 97007 / US
04 / NIDHI, Nidhi
132 NE Greenridge Ter.
Hillsboro, Oregon 97124 / US
05 / CHEN, Yi Wei
c/o Intel Corporation
2200 Mission College Boulevard
M/S: RNB4-150
Santa Clara, CA 95054 / US
06 / SHIH, Kun-huan
c/o Intel Corporation
2200 Mission College Boulevard
M/S: RNB4-150
Santa Clara, CA 95054 / US
07 / HAFEZ, Walid M.
4060 NW Carlton Ct.
Portland, Oregon 97229 / US
08 / TSAI, Curtis
15021 SW Telluride Ter.
Beaverton, Oregon 97007 / US
Representative(s)Goddar, Heinz J.
Boehmert & Boehmert
Anwaltspartnerschaft mbB
Pettenkoferstrasse 22
80336 München / DE
[2018/17]
Application number, filing date15895835.519.06.2015
[2018/17]
WO2015US36797
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2016204794
Date:22.12.2016
Language:EN
[2016/51]
Type: A1 Application with search report 
No.:EP3311400
Date:25.04.2018
Language:EN
The application published by WIPO in one of the EPO official languages on 22.12.2016 takes the place of the publication of the European patent application.
[2018/17]
Type: B1 Patent specification 
No.:EP3311400
Date:06.07.2022
Language:EN
[2022/27]
Search report(s)International search report - published on:KR22.12.2016
(Supplementary) European search report - dispatched on:EP17.01.2019
ClassificationIPC:H01L21/60, H01L29/78, H01L21/336, H01L23/48, H01L29/06
[2022/11]
CPC:
H10D30/668 (EP,CN,KR,US); H10D30/663 (EP,CN,KR,US); H10D1/665 (US);
H10D30/0297 (EP,CN,KR,US); H10D62/116 (EP,CN,KR,US); H10W20/20 (EP,CN,KR,US)
Former IPC [2019/08]H01L21/60, H01L29/78, H01L21/336, H01L23/48
Former IPC [2018/17]H01L21/60
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/17]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
TitleGerman:VERTIKALER TRANSISTOR MIT EINEM SILIZIUM-DURCHKONTAKTIERUNGSGATE[2022/11]
English:VERTICAL TRANSISTOR USING A THROUGH SILICON VIA GATE[2018/17]
French:TRANSISTOR VERTICAL UTILISANT UNE GRILLE À TROU D'INTERCONNEXION TRAVERSANT LE SILICIUM[2022/11]
Former [2018/17]VERTIKALER TRANSISTOR MIT EINEM SILICIUMDURCHKONTAKTIERUNGSGATE
Former [2018/17]TRANSISTOR VERTICAL UTILISANT UNE GÂCHETTE À TROU D'INTERCONNEXION TRAVERSANT LE SILICIUM
Entry into regional phase16.11.2017National basic fee paid 
16.11.2017Search fee paid 
16.11.2017Designation fee(s) paid 
16.11.2017Examination fee paid 
Examination procedure16.11.2017Examination requested  [2018/17]
16.11.2017Date on which the examining division has become responsible
13.08.2019Amendment by applicant (claims and/or description)
25.02.2020Despatch of a communication from the examining division (Time limit: M06)
16.07.2020Reply to a communication from the examining division
03.03.2021Despatch of a communication from the examining division (Time limit: M04)
30.06.2021Reply to a communication from the examining division
24.02.2022Communication of intention to grant the patent
24.05.2022Fee for grant paid
24.05.2022Fee for publishing/printing paid
24.05.2022Receipt of the translation of the claim(s)
Opposition(s)11.04.2023No opposition filed within time limit [2023/24]
Fees paidRenewal fee
16.11.2017Renewal fee patent year 03
12.06.2018Renewal fee patent year 04
13.06.2019Renewal fee patent year 05
15.06.2020Renewal fee patent year 06
14.06.2021Renewal fee patent year 07
26.05.2022Renewal fee patent year 08
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipCY19.06.2015
HU19.06.2015
AL06.07.2022
AT06.07.2022
BG06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
HR06.07.2022
IT06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
TR06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
[2026/04]
Former [2025/39]CY19.06.2015
HU19.06.2015
AL06.07.2022
AT06.07.2022
BG06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
HR06.07.2022
IT06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2025/36]CY19.06.2015
AL06.07.2022
AT06.07.2022
BG06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
HR06.07.2022
IT06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2024/51]AL06.07.2022
AT06.07.2022
BG06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
HR06.07.2022
IT06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2024/38]AL06.07.2022
AT06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
HR06.07.2022
IT06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2024/11]AL06.07.2022
AT06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
IT06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2024/09]AL06.07.2022
AT06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
MC06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/37]AL06.07.2022
AT06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SI06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/29]AL06.07.2022
AT06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/23]AT06.07.2022
CZ06.07.2022
DK06.07.2022
EE06.07.2022
ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SK06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/22]AT06.07.2022
CZ06.07.2022
DK06.07.2022
ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RO06.07.2022
RS06.07.2022
SE06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/21]DK06.07.2022
ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RS06.07.2022
SE06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/20]ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RS06.07.2022
SE06.07.2022
SM06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/12]ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RS06.07.2022
SE06.07.2022
NO06.10.2022
GR07.10.2022
IS06.11.2022
PT07.11.2022
Former [2023/11]ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
PL06.07.2022
RS06.07.2022
SE06.07.2022
NO06.10.2022
GR07.10.2022
PT07.11.2022
Former [2023/10]ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
RS06.07.2022
SE06.07.2022
NO06.10.2022
GR07.10.2022
PT07.11.2022
Former [2023/09]ES06.07.2022
FI06.07.2022
LT06.07.2022
LV06.07.2022
RS06.07.2022
SE06.07.2022
NO06.10.2022
PT07.11.2022
Former [2023/08]ES06.07.2022
FI06.07.2022
LT06.07.2022
RS06.07.2022
SE06.07.2022
NO06.10.2022
Documents cited:Search[IA] US2009095999  (JANG BYUNG TAK et al.) [I] 1-8,14 * paragraph [0014] - paragraph [0024]; figures 1-10 *[A] 9-13,15
 [I] US2008258214  (JANG BYUNG TAK et al.) [I] 1-5 * paragraph [0027] - paragraph [0057]; figures 2-9 *
 [A] WO2012144951  (SILEX MICROSYSTEMS AB et al.) [A] 1-15 * page 5 - page 6; figure 2 *
International search[X] US2002093074  (BERTIN CLAUDE L et al.) [X] 1-20 * See abstract, paragraphs [0020]-[0056] and figures 1A-2B. *
 [A] US2005184326  (CHENG CHUN-WEN et al.) [A] 1-20 * See abstract, paragraphs [0024]-[0032] and figures 1-9. *
 [A] US2011037144  (CHEN XIANGDONG et al.) [A] 1-20 * See abstract, paragraphs [0023]-[0038] and figures 2A-2J. *
 [A] US2014319600  (KOTHANDARAMAN CHANDRASEKHARAN et al.) [A] 1-20 * See abstract, paragraphs [0045]-[0057] and figures 4A-10. *
 [A] US2002030210  (MATSUI YUICHI et al.) [A] 1-20 * See abstract, paragraphs [0081]-[0089] and figures 4a-4d. ** Dependent claim 5 refers to itself, thus this International Search Report has been established on the assumption that claim 5 refers to claim 4. *
by applicantUS2009095999
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.