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Extract from the Register of European Patents

EP About this file: EP3314638

EP3314638 - MULTI-HEIGHT FINFET DEVICE BY SELECTIVE OXIDATION [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  10.09.2021
Database last updated on 03.10.2024
FormerRequest for examination was made
Status updated on  30.03.2018
FormerThe international publication has been made
Status updated on  06.01.2017
Most recent event   Tooltip01.06.2024New entry: Renewal fee paid 
Applicant(s)For all designated states
Intel Corporation
2200 Mission College Boulevard
MS: RNB-4-150
Santa Clara, California 95054 / US
[2018/18]
Inventor(s)01 / KIM, Seiyon
13062 NW Corso Lane
Portland, Oregon 97229 / US
02 / BHIMARASETTI, Gopinath
14802 NW Deerfoot Lane
Portland, Oregon 97229 / US
03 / RIOS, Rafael
7713 Lenape Trail
Austin, Texas 78736 / US
04 / KAVALIEROS, Jack T.
3734 NW Bronson Crest Loop
Portland, Oregon 97229 / US
05 / GHANI, Tahir
14191 NW Stonebridge Drive
Portland, Oregon 97229 / US
06 / MURTHY, Anand S.
10934 NW Lucerne Court
Portland, Oregon 97229 / US
07 / MEHANDRU, Rishabh
4606 SW 42nd Place
Portland, Oregon 97221 / US
 [2018/18]
Representative(s)2SPL Patentanwälte PartG mbB
Landaubogen 3
81373 München / DE
[N/P]
Former [2018/18]2SPL Patentanwälte PartG mbB
Postfach 15 17 23
80050 München / DE
Application number, filing date15897302.427.06.2015
[2018/18]
WO2015US38194
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2017003411
Date:05.01.2017
Language:EN
[2017/01]
Type: A1 Application with search report 
No.:EP3314638
Date:02.05.2018
Language:EN
The application published by WIPO in one of the EPO official languages on 05.01.2017 takes the place of the publication of the European patent application.
[2018/18]
Search report(s)International search report - published on:KR05.01.2017
(Supplementary) European search report - dispatched on:EP30.04.2019
ClassificationIPC:H01L21/336, H01L29/78, H01L27/12
[2019/09]
CPC:
H01L29/66795 (EP,CN,KR,US); H01L29/78 (EP,CN,US); H01L21/02233 (US);
H01L27/0886 (US); H01L27/1211 (EP,CN,KR,US); H01L29/1037 (US);
H01L29/1083 (US); H01L29/66545 (US); H01L29/7831 (KR);
H01L29/785 (EP,CN,US); H01L29/7851 (US); H01L29/7855 (KR);
H01L21/02546 (US); H01L2224/16225 (EP); H01L23/49827 (US);
H01L23/49838 (US); H01L29/0847 (US) (-)
Former IPC [2018/18]H01L21/336, H01L29/78
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/18]
TitleGerman:MEHRHÖHEN-FINFET-VORRICHTUNG DURCH SELEKTIVE OXIDATION[2018/18]
English:MULTI-HEIGHT FINFET DEVICE BY SELECTIVE OXIDATION[2018/18]
French:DISPOSITIF DE TRANSISTOR À EFFET DE CHAMP À AILETTE (FINFET) À HAUTEURS MULTIPLES OBTENU PAR OXYDATION SÉLECTIVE[2018/18]
Entry into regional phase22.11.2017National basic fee paid 
22.11.2017Search fee paid 
22.11.2017Designation fee(s) paid 
22.11.2017Examination fee paid 
Examination procedure22.11.2017Examination requested  [2018/18]
22.11.2017Date on which the examining division has become responsible
17.10.2019Amendment by applicant (claims and/or description)
14.09.2021Despatch of a communication from the examining division (Time limit: M04)
11.01.2022Reply to a communication from the examining division
02.08.2023Despatch of a communication from the examining division (Time limit: M04)
28.11.2023Reply to a communication from the examining division
Fees paidRenewal fee
22.11.2017Renewal fee patent year 03
12.06.2018Renewal fee patent year 04
13.06.2019Renewal fee patent year 05
15.06.2020Renewal fee patent year 06
14.06.2021Renewal fee patent year 07
26.05.2022Renewal fee patent year 08
29.05.2023Renewal fee patent year 09
30.05.2024Renewal fee patent year 10
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Documents cited:Search[Y]US4806505  (FRANCIOSI ALFONSO [US]) [Y] 2-7 * the whole document *;
 [A]EP0757379  (MATSUSHITA ELECTRONICS CORP [JP], et al) [A] 1-9* the whole document *;
 [X]US6642090  (FRIED DAVID M [US], et al) [X] 10-12,14,15 * column 6, line 40 - column 7, line 17 * * column 8, line 60 - column 9, line 2 *;
 [XY]US2013181263  (CAI XIUYU [US], et al) [X] 1,8-12,14,15 * paragraph [0027] - paragraph [0028] * [Y] 2-7;
 [XI]US2015162436  (TOH ENG HUAT [SG], et al) [X] 1,8-10,12,14,15 * paragraph [0073] * [I] 11;
 [E]WO2015199705  (INTEL CORP [US]) [E] 1-5,7-12,14,15 * paragraph [0030] * * paragraph [0039] - paragraph [0040] *
International search[A]KR20080071822  (SEOUL NAT UNIV IND FOUNDATION [KR]) [A] 1-22* See paragraphs [0028]-[0059], claims 1-11 and figures 1-9. *;
 [A]KR20100026423  (HYNIX SEMICONDUCTOR INC [KR]) [A] 1-22 * See paragraphs [0015]-[0074], claims 1-36 and figures la-3d. *;
 [XA]US2014264592  (OXLAND RICHARD KENNETH [BE], et al) [X] 1, 8-10, 15-22 * See paragraphs [0015]-[0022], claims 1-21 and figures 1, 2. * [A] 2-7, 11-14;
 [A]US2015102411  (CHING KUO-CHENG [TW], et al) [A] 1-22 * See paragraphs [0012]-[0039], claims 10-21 and figures 1-2. *;
 [A]US2015137237  (JACOB AJEY POOVANNUMMOOTTIL [US], et al) [A] 1-22 * See paragraphs [0026]-[0037], claims 1-20 and figures 2a-4. *
by applicantUS6642090
 US2013181263
 US2015162436
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.