EP3163374 - CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 08.10.2021 Database last updated on 24.08.2024 | |
Former | The patent has been granted Status updated on 30.10.2020 | ||
Former | Grant of patent is intended Status updated on 15.09.2020 | ||
Former | Examination is in progress Status updated on 03.07.2020 | ||
Former | Grant of patent is intended Status updated on 27.02.2020 | ||
Former | Examination is in progress Status updated on 14.06.2019 | ||
Former | Request for examination was made Status updated on 10.11.2017 | ||
Former | The application has been published Status updated on 31.03.2017 | Most recent event Tooltip | 27.04.2024 | Lapse of the patent in a contracting state New state(s): MK | published on 29.05.2024 [2024/22] | Applicant(s) | For all designated states Shin-Etsu Chemical Co., Ltd. 6-1, Ohtemachi 2-chome Chiyoda-ku Tokyo / JP | [2017/18] | Inventor(s) | 01 /
HIRANO, Yoshinori c/o Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP | 02 /
YANAGISAWA, Hideyoshi c/o Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Joetsu-shi, Gunma / JP | [2017/18] | Representative(s) | Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE | [2020/49] |
Former [2017/18] | Merkle, Gebhard Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE | Application number, filing date | 16195476.3 | 25.10.2016 | [2017/18] | Priority number, date | JP20150210328 | 27.10.2015 Original published format: JP 2015210328 | [2017/18] | Filing language | EN | Procedural language | EN | Publication | Type: | A2 Application without search report | No.: | EP3163374 | Date: | 03.05.2017 | Language: | EN | [2017/45] | Type: | A3 Search report | No.: | EP3163374 | Date: | 22.11.2017 | Language: | EN | [2017/47] | Type: | B1 Patent specification | No.: | EP3163374 | Date: | 02.12.2020 | Language: | EN | [2020/49] | Search report(s) | (Supplementary) European search report - dispatched on: | EP | 16.10.2017 | Classification | IPC: | G03F7/039 | [2017/18] | CPC: |
G03F7/0397 (EP,CN,US);
G03F7/0392 (EP,KR,US);
G03F7/00 (CN);
G03F7/004 (CN);
G03F7/0045 (US);
G03F7/0048 (KR);
G03F7/039 (EP,US);
G03F7/162 (US);
G03F7/168 (KR,US);
G03F7/2004 (KR,US);
G03F7/32 (KR);
G03F7/322 (US);
| Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2017/50] |
Former [2017/18] | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR | Title | German: | CHEMISCH VERSTÄRKTE POSITIVE RESISTZUSAMMENSETZUNG UND MUSTERUNGSVERFAHREN | [2017/18] | English: | CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS | [2017/18] | French: | COMPOSITION DE RÉSERVE POSITIVE AMPLIFIÉE CHIMIQUEMENT ET PROCÉDÉ DE FORMATION DE MOTIFS | [2017/18] | Examination procedure | 25.10.2016 | Date on which the examining division has become responsible | 02.11.2017 | Examination requested [2017/50] | 08.05.2018 | Amendment by applicant (claims and/or description) | 18.06.2019 | Despatch of a communication from the examining division (Time limit: M04) | 08.10.2019 | Reply to a communication from the examining division | 28.02.2020 | Communication of intention to grant the patent | 01.07.2020 | Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO | 01.07.2020 | Fee for grant paid | 01.07.2020 | Fee for publishing/printing paid | 15.09.2020 | Information about intention to grant a patent | 15.09.2020 | Receipt of the translation of the claim(s) | Opposition(s) | 03.09.2021 | No opposition filed within time limit [2021/45] | Fees paid | Renewal fee | 24.10.2018 | Renewal fee patent year 03 | 25.10.2019 | Renewal fee patent year 04 | 23.10.2020 | Renewal fee patent year 05 |
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Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 25.10.2016 | AL | 02.12.2020 | AT | 02.12.2020 | CY | 02.12.2020 | CZ | 02.12.2020 | DK | 02.12.2020 | EE | 02.12.2020 | ES | 02.12.2020 | FI | 02.12.2020 | HR | 02.12.2020 | IT | 02.12.2020 | LT | 02.12.2020 | LV | 02.12.2020 | MC | 02.12.2020 | MK | 02.12.2020 | NL | 02.12.2020 | PL | 02.12.2020 | RO | 02.12.2020 | RS | 02.12.2020 | SE | 02.12.2020 | SI | 02.12.2020 | SK | 02.12.2020 | SM | 02.12.2020 | BG | 02.03.2021 | NO | 02.03.2021 | GR | 03.03.2021 | IS | 02.04.2021 | PT | 05.04.2021 | [2024/22] |
Former [2023/30] | HU | 25.10.2016 | |
AL | 02.12.2020 | ||
AT | 02.12.2020 | ||
CY | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
ES | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
MC | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2023/28] | HU | 25.10.2016 | |
AL | 02.12.2020 | ||
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
ES | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
MC | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2022/33] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
ES | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
MC | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2022/23] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
ES | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2022/10] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
ES | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
PT | 05.04.2021 | ||
Former [2021/51] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
ES | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2021/49] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
DK | 02.12.2020 | ||
EE | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SI | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2021/48] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
EE | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
IT | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2021/45] | AL | 02.12.2020 | |
AT | 02.12.2020 | ||
CZ | 02.12.2020 | ||
EE | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2021/42] | AT | 02.12.2020 | |
CZ | 02.12.2020 | ||
EE | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
IS | 02.04.2021 | ||
PT | 05.04.2021 | ||
Former [2021/37] | AT | 02.12.2020 | |
CZ | 02.12.2020 | ||
EE | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
PT | 05.04.2021 | ||
Former [2021/36] | CZ | 02.12.2020 | |
EE | 02.12.2020 | ||
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
PT | 05.04.2021 | ||
Former [2021/35] | CZ | 02.12.2020 | |
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RO | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SK | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
PT | 05.04.2021 | ||
Former [2021/34] | CZ | 02.12.2020 | |
FI | 02.12.2020 | ||
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
PT | 05.04.2021 | ||
Former [2021/33] | FI | 02.12.2020 | |
HR | 02.12.2020 | ||
LT | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
PT | 05.04.2021 | ||
Former [2021/32] | FI | 02.12.2020 | |
HR | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
SM | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
Former [2021/30] | FI | 02.12.2020 | |
HR | 02.12.2020 | ||
LV | 02.12.2020 | ||
NL | 02.12.2020 | ||
PL | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
Former [2021/28] | FI | 02.12.2020 | |
HR | 02.12.2020 | ||
LV | 02.12.2020 | ||
PL | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
Former [2021/25] | FI | 02.12.2020 | |
LV | 02.12.2020 | ||
PL | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
Former [2021/23] | FI | 02.12.2020 | |
LV | 02.12.2020 | ||
RS | 02.12.2020 | ||
SE | 02.12.2020 | ||
BG | 02.03.2021 | ||
NO | 02.03.2021 | ||
GR | 03.03.2021 | ||
Former [2021/22] | FI | 02.12.2020 | |
RS | 02.12.2020 | ||
NO | 02.03.2021 | ||
Former [2021/20] | FI | 02.12.2020 | Documents cited: | Search | [A]EP2360527 (SHINETSU CHEMICAL CO [JP]); | [ID]US2012184101 (YASUDA HIROYUKI [JP], et al); | [A]US2014065545 (HATAKEYAMA JUN [JP], et al) | by applicant | JP2006267475 | JP2012163950 | JP2015210328 |