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Extract from the Register of European Patents

EP About this file: EP3163374

EP3163374 - CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS [Right-click to bookmark this link]
Status	No opposition filed within time limit Status updated on 08.10.2021 Database last updated on 24.08.2024
Former	The patent has been granted Status updated on 30.10.2020
Former	Grant of patent is intended Status updated on 15.09.2020
Former	Examination is in progress Status updated on 03.07.2020
Former	Grant of patent is intended Status updated on 27.02.2020
Former	Examination is in progress Status updated on 14.06.2019
Former	Request for examination was made Status updated on 10.11.2017
Former	The application has been published Status updated on 31.03.2017
Most recent event Tooltip	27.04.2024	Lapse of the patent in a contracting state New state(s): MK	published on 29.05.2024 [2024/22]
Applicant(s)	For all designated states Shin-Etsu Chemical Co., Ltd. 6-1, Ohtemachi 2-chome Chiyoda-ku Tokyo / JP
	[2017/18]
Inventor(s)	01 / HIRANO, Yoshinori c/o Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Annaka-shi, Gunma / JP
	02 / YANAGISAWA, Hideyoshi c/o Silicone-Electronics Materials Research Center, Shin-Etsu Chemical Co., Ltd. 1-10, Hitomi, Matsuida-machi Joetsu-shi, Gunma / JP
	[2017/18]
Representative(s)	Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE
	[2020/49]
Former [2017/18]	Merkle, Gebhard Ter Meer Steinmeister & Partner Patentanwälte mbB Nymphenburger Straße 4 80335 München / DE
Application number, filing date	16195476.3	25.10.2016
	[2017/18]
Priority number, date	JP20150210328	27.10.2015 Original published format: JP 2015210328
	[2017/18]
Filing language	EN
Procedural language	EN
Publication	Type:	A2 Application without search report
	No.:	EP3163374
	Date:	03.05.2017
	Language:	EN
	[2017/45]
	Type:	A3 Search report
	No.:	EP3163374
	Date:	22.11.2017
	Language:	EN
	[2017/47]
	Type:	B1 Patent specification
	No.:	EP3163374
	Date:	02.12.2020
	Language:	EN
	[2020/49]
Search report(s)	(Supplementary) European search report - dispatched on:	EP	16.10.2017
Classification	IPC:	G03F7/039	[2017/18]
	CPC:	G03F7/0397 (EP,CN,US); G03F7/0392 (EP,KR,US); G03F7/00 (CN); G03F7/004 (CN); G03F7/0045 (US); G03F7/0048 (KR); (+) G03F7/039 (EP,US); G03F7/162 (US); G03F7/168 (KR,US); G03F7/2004 (KR,US); G03F7/32 (KR); G03F7/322 (US); G03F7/40 (US); G06F7/40 (US) (-)
Designated contracting states	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2017/50]
Former [2017/18]	AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR
Title	German:	CHEMISCH VERSTÄRKTE POSITIVE RESISTZUSAMMENSETZUNG UND MUSTERUNGSVERFAHREN	[2017/18]
	English:	CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION AND PATTERNING PROCESS	[2017/18]
	French:	COMPOSITION DE RÉSERVE POSITIVE AMPLIFIÉE CHIMIQUEMENT ET PROCÉDÉ DE FORMATION DE MOTIFS	[2017/18]
Examination procedure	25.10.2016	Date on which the examining division has become responsible
	02.11.2017	Examination requested [2017/50]
	08.05.2018	Amendment by applicant (claims and/or description)
	18.06.2019	Despatch of a communication from the examining division (Time limit: M04)
	08.10.2019	Reply to a communication from the examining division
	28.02.2020	Communication of intention to grant the patent
	01.07.2020	Disapproval of the communication of intention to grant the patent by the applicant or resumption of examination proceedings by the EPO
	01.07.2020	Fee for grant paid
	01.07.2020	Fee for publishing/printing paid
	15.09.2020	Information about intention to grant a patent
	15.09.2020	Receipt of the translation of the claim(s)
Opposition(s)	03.09.2021	No opposition filed within time limit [2021/45]
Fees paid	Renewal fee
	24.10.2018	Renewal fee patent year 03
	25.10.2019	Renewal fee patent year 04
	23.10.2020	Renewal fee patent year 05
Opt-out from the exclusive Tooltip competence of the Unified Patent Court	See the Register of the Unified Patent Court for opt-out data
	Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition Tooltip	HU	25.10.2016
	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	MK	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
	[2024/22]
Former [2023/30]	HU	25.10.2016
	AL	02.12.2020
	AT	02.12.2020
	CY	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2023/28]	HU	25.10.2016
	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2022/33]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	MC	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2022/23]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2022/10]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/51]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	ES	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/49]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	DK	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SI	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/48]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	IT	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/45]	AL	02.12.2020
	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/42]	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	IS	02.04.2021
	PT	05.04.2021
Former [2021/37]	AT	02.12.2020
	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/36]	CZ	02.12.2020
	EE	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/35]	CZ	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RO	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SK	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/34]	CZ	02.12.2020
	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/33]	FI	02.12.2020
	HR	02.12.2020
	LT	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
	PT	05.04.2021
Former [2021/32]	FI	02.12.2020
	HR	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	SM	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/30]	FI	02.12.2020
	HR	02.12.2020
	LV	02.12.2020
	NL	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/28]	FI	02.12.2020
	HR	02.12.2020
	LV	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/25]	FI	02.12.2020
	LV	02.12.2020
	PL	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/23]	FI	02.12.2020
	LV	02.12.2020
	RS	02.12.2020
	SE	02.12.2020
	BG	02.03.2021
	NO	02.03.2021
	GR	03.03.2021
Former [2021/22]	FI	02.12.2020
	RS	02.12.2020
	NO	02.03.2021
Former [2021/20]	FI	02.12.2020
Documents cited:	Search	[A]EP2360527 (SHINETSU CHEMICAL CO [JP]);
		[ID]US2012184101 (YASUDA HIROYUKI [JP], et al);
		[A]US2014065545 (HATAKEYAMA JUN [JP], et al)
	by applicant	JP2006267475
		JP2012163950
		JP2015210328

The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.

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