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Extract from the Register of European Patents

EP About this file: EP3402908

EP3402908 - HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  05.03.2021
Database last updated on 13.11.2024
FormerRequest for examination was made
Status updated on  19.10.2018
FormerThe international publication has been made
Status updated on  21.07.2017
Most recent event   Tooltip08.07.2024New entry: Reply to examination report 
Applicant(s)For all designated states
Applied Materials, Inc.
3050 Bowers Avenue
Santa Clara, CA 95054 / US
[2018/47]
Inventor(s)01 / LAU, Simon
Lerchenrain 6
63755 Alzenau / DE
 [2018/47]
Representative(s)Zimmermann & Partner Patentanwälte mbB
Postfach 330 920
80069 München / DE
[2018/47]
Application number, filing date16700371.413.01.2016
[2018/47]
WO2016EP50525
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2017121467
Date:20.07.2017
Language:EN
[2017/29]
Type: A1 Application with search report 
No.:EP3402908
Date:21.11.2018
Language:EN
The application published by WIPO in one of the EPO official languages on 20.07.2017 takes the place of the publication of the European patent application.
[2018/47]
Search report(s)International search report - published on:EP20.07.2017
ClassificationIPC:C23C14/50, B23Q3/08, B65G49/06, C03C17/00
[2018/47]
CPC:
C23C14/50 (EP,KR,US); B23Q3/084 (KR); B65G49/062 (EP,KR);
C23C16/4581 (US); C23C16/4583 (US); C23C16/4586 (US);
H01L21/6838 (EP,KR,US); H01L21/6875 (EP,US); H01L21/68757 (US);
H01L21/68785 (US); B65G2201/022 (KR); B65G2249/045 (EP,KR);
C23C14/228 (US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/47]
TitleGerman:HALTEANORDNUNG ZUM HALTEN EINES SUBSTRATS, TRÄGER ZUM TRAGEN EINES SUBSTRATS, VAKUUMBEHANDLUNGSANLAGE, VERFAHREN ZUM HALTEN EINES SUBSTRATS UND VERFAHREN ZUR FREISETZUNG EINES SUBSTRATS[2018/47]
English:HOLDING ARRANGEMENT FOR HOLDING A SUBSTRATE, CARRIER FOR SUPPORTING A SUBSTRATE, VACUUM PROCESSING SYSTEM, METHOD FOR HOLDING A SUBSTRATE, AND METHOD FOR RELEASING A SUBSTRATE[2018/47]
French:AGENCEMENT DE MAINTIEN POUR MAINTENIR UN SUBSTRAT, SUPPORT POUR SOUTENIR UN SUBSTRAT, SYSTÈME DE TRAITEMENT SOUS VIDE, PROCÉDÉ DE MAINTIEN D'UN SUBSTRAT, ET PROCÉDÉ DE LIBÉRATION D'UN SUBSTRAT[2018/47]
Entry into regional phase07.05.2018National basic fee paid 
07.05.2018Designation fee(s) paid 
07.05.2018Examination fee paid 
Examination procedure07.05.2018Examination requested  [2018/47]
07.05.2018Date on which the examining division has become responsible
19.02.2019Amendment by applicant (claims and/or description)
09.03.2021Despatch of a communication from the examining division (Time limit: M04)
25.06.2021Reply to a communication from the examining division
04.04.2024Despatch of a communication from the examining division (Time limit: M04)
08.07.2024Reply to a communication from the examining division
Fees paidRenewal fee
07.05.2018Renewal fee patent year 03
22.01.2019Renewal fee patent year 04
23.01.2020Renewal fee patent year 05
25.01.2021Renewal fee patent year 06
25.01.2022Renewal fee patent year 07
25.01.2023Renewal fee patent year 08
25.01.2024Renewal fee patent year 09
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Cited inInternational search[A]US2009011232  (DAI LIMING [US], et al) [A] 1-15* paragraphs [0023] - [0034] *;
 [XI]JP2014205205  (CREATIVE TECH CORP) [X] 1,2,6-10 * paragraphs [0014] , [0023] - [0024]; figures 1,2 * [I] 3-5,11-15
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.