EP3268987 - APPARATUS AND METHOD FOR CHUCKING WARPED WAFERS [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 16.09.2022 Database last updated on 24.08.2024 | |
Former | The patent has been granted Status updated on 08.10.2021 | ||
Former | Grant of patent is intended Status updated on 07.06.2021 | ||
Former | Request for examination was made Status updated on 15.12.2017 | ||
Former | The international publication has been made Status updated on 03.10.2017 | Most recent event Tooltip | 14.06.2024 | Lapse of the patent in a contracting state New state(s): TR | published on 17.07.2024 [2024/29] | Applicant(s) | For all designated states Kla-Tencor Corporation Legal Department One Technology Drive Milpitas, California 95035 / US | [2018/03] | Inventor(s) | 01 /
SUBRAHMANYAN, Pradeep 22117 Wallace Drive Cupertino, California 95014 / US | 02 /
HUANG, Luping 5586 N. Dublin Ranch Drive Dublin, California 94568 / US | 03 /
POHLHAMMER, Christopher 616 Sunflower Court San Ramon, California 94582 / US | [2018/03] | Representative(s) | FRKelly Waterways House Grand Canal Quay Dublin D02 PD39 / IE | [N/P] |
Former [2018/03] | FRKelly 27 Clyde Road Dublin D04 F838 / IE | Application number, filing date | 16762672.0 | 11.03.2016 | [2018/03] | WO2016US22188 | Priority number, date | US201562132473P | 12.03.2015 Original published format: US 201562132473 P | US201615065430 | 09.03.2016 Original published format: US201615065430 | [2018/03] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2016145404 | Date: | 15.09.2016 | Language: | EN | [2016/37] | Type: | A1 Application with search report | No.: | EP3268987 | Date: | 17.01.2018 | Language: | EN | The application published by WIPO in one of the EPO official languages on 15.09.2016 takes the place of the publication of the European patent application. | [2018/03] | Type: | B1 Patent specification | No.: | EP3268987 | Date: | 10.11.2021 | Language: | EN | [2021/45] | Search report(s) | International search report - published on: | KR | 15.09.2016 | (Supplementary) European search report - dispatched on: | EP | 20.09.2018 | Classification | IPC: | H01L21/683, H01L21/687, H01L21/67 | [2018/43] | CPC: |
H01L21/6838 (EP,CN,KR,US);
H01L21/67288 (EP,US);
H01L21/68742 (KR)
|
Former IPC [2018/03] | H01L21/683, H01L21/687 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/03] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | VORRICHTUNG UND VERFAHREN ZUM EINSPANNEN VERFORMTER WAFER | [2018/03] | English: | APPARATUS AND METHOD FOR CHUCKING WARPED WAFERS | [2018/03] | French: | APPAREIL ET PROCÉDÉ PERMETTANT DE SERRER DES PLAQUETTES GAUCHIES | [2018/03] | Entry into regional phase | 03.10.2017 | National basic fee paid | 03.10.2017 | Search fee paid | 03.10.2017 | Designation fee(s) paid | 03.10.2017 | Examination fee paid | Examination procedure | 03.10.2017 | Examination requested [2018/03] | 03.10.2017 | Date on which the examining division has become responsible | 17.04.2019 | Amendment by applicant (claims and/or description) | 08.06.2021 | Communication of intention to grant the patent | 30.09.2021 | Fee for grant paid | 30.09.2021 | Fee for publishing/printing paid | 30.09.2021 | Receipt of the translation of the claim(s) | Opposition(s) | 11.08.2022 | No opposition filed within time limit [2022/42] | Fees paid | Renewal fee | 27.03.2018 | Renewal fee patent year 03 | 27.03.2019 | Renewal fee patent year 04 | 27.03.2020 | Renewal fee patent year 05 | 29.03.2021 | Renewal fee patent year 06 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 11.03.2016 | AL | 10.11.2021 | AT | 10.11.2021 | CY | 10.11.2021 | CZ | 10.11.2021 | DK | 10.11.2021 | EE | 10.11.2021 | ES | 10.11.2021 | FI | 10.11.2021 | HR | 10.11.2021 | IT | 10.11.2021 | LT | 10.11.2021 | LV | 10.11.2021 | MC | 10.11.2021 | MK | 10.11.2021 | PL | 10.11.2021 | RO | 10.11.2021 | RS | 10.11.2021 | SE | 10.11.2021 | SI | 10.11.2021 | SK | 10.11.2021 | SM | 10.11.2021 | TR | 10.11.2021 | BG | 10.02.2022 | NO | 10.02.2022 | GR | 11.02.2022 | IS | 10.03.2022 | PT | 10.03.2022 | GB | 11.03.2022 | IE | 11.03.2022 | LU | 11.03.2022 | BE | 31.03.2022 | CH | 31.03.2022 | FR | 31.03.2022 | LI | 31.03.2022 | [2024/29] |
Former [2024/22] | HU | 11.03.2016 | |
AL | 10.11.2021 | ||
AT | 10.11.2021 | ||
CY | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
IT | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
MK | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
BE | 31.03.2022 | ||
CH | 31.03.2022 | ||
FR | 31.03.2022 | ||
LI | 31.03.2022 | ||
Former [2024/20] | HU | 11.03.2016 | |
AL | 10.11.2021 | ||
AT | 10.11.2021 | ||
CY | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
IT | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
BE | 31.03.2022 | ||
CH | 31.03.2022 | ||
FR | 31.03.2022 | ||
LI | 31.03.2022 | ||
Former [2024/18] | HU | 11.03.2016 | |
AL | 10.11.2021 | ||
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
IT | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
BE | 31.03.2022 | ||
CH | 31.03.2022 | ||
FR | 31.03.2022 | ||
LI | 31.03.2022 | ||
Former [2023/27] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
IT | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
BE | 31.03.2022 | ||
CH | 31.03.2022 | ||
FR | 31.03.2022 | ||
LI | 31.03.2022 | ||
Former [2023/10] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
BE | 31.03.2022 | ||
CH | 31.03.2022 | ||
FR | 31.03.2022 | ||
LI | 31.03.2022 | ||
Former [2023/09] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
CH | 31.03.2022 | ||
FR | 31.03.2022 | ||
LI | 31.03.2022 | ||
Former [2023/08] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
GB | 11.03.2022 | ||
IE | 11.03.2022 | ||
LU | 11.03.2022 | ||
FR | 31.03.2022 | ||
Former [2023/06] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
FR | 31.03.2022 | ||
Former [2023/01] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SI | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/49] | AL | 10.11.2021 | |
AT | 10.11.2021 | ||
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/47] | AT | 10.11.2021 | |
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
MC | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/35] | AT | 10.11.2021 | |
CZ | 10.11.2021 | ||
DK | 10.11.2021 | ||
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SK | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/34] | AT | 10.11.2021 | |
EE | 10.11.2021 | ||
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
PL | 10.11.2021 | ||
RO | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/33] | AT | 10.11.2021 | |
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
PL | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
SM | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/25] | AT | 10.11.2021 | |
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
PL | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
BG | 10.02.2022 | ||
NO | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/24] | AT | 10.11.2021 | |
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
PL | 10.11.2021 | ||
RS | 10.11.2021 | ||
SE | 10.11.2021 | ||
BG | 10.02.2022 | ||
GR | 11.02.2022 | ||
IS | 10.03.2022 | ||
PT | 10.03.2022 | ||
Former [2022/23] | AT | 10.11.2021 | |
ES | 10.11.2021 | ||
FI | 10.11.2021 | ||
HR | 10.11.2021 | ||
LT | 10.11.2021 | ||
LV | 10.11.2021 | ||
PL | 10.11.2021 | ||
RS | 10.11.2021 | ||
BG | 10.02.2022 | ||
PT | 10.03.2022 | ||
Former [2022/22] | AT | 10.11.2021 | |
FI | 10.11.2021 | ||
LT | 10.11.2021 | ||
RS | 10.11.2021 | ||
BG | 10.02.2022 | ||
Former [2022/21] | AT | 10.11.2021 | |
RS | 10.11.2021 | ||
BG | 10.02.2022 | ||
Former [2022/19] | BG | 10.02.2022 | Documents cited: | Search | [XA]US2005011460 (TANIGUCHI YOSHIHISA [JP]) [X] 1-3,9 * abstract * * paragraph [0098] * [A] 10; | [XY]EP1685930 (MITSUBOSHI DIAMOND IND CO LTD [JP]) [X] 1,2,7-14 * paragraphs [0068] , [0077] , [0079]; figure 14 * [Y] 4-6; | [XA]US7292427 (MURDOCH STEVEN [US], et al) [X] 1,2,9 * abstract * [A] 10; | [XAY]DE102011001879 (JENOPTIK AUTOMATISIERUNGSTECH [DE]) [X] 1-3,9 * abstract * [A] 10 [Y] 4-6; | [XA]JP2013243203 (LINTEC CORP) [X] 1-3,9 * abstract * [A] 10; | [XA]WO2014101795 (SHANGHAI MICROELECTRONICS EQUI [CN]) [X] 1,2,9 * abstract *[A] 10 | International search | [A]JPH056931 (HITACHI LTD, et al) [A] 1-15 * See abstract; paragraphs [0013]-[0014], [0016]-[0017]; and figures 1-2C. *; | [Y]KR101018909B (TOKYO ELECTRON LTD.) [Y] 1-15 * See abstract; paragraphs [0080]-[0085], [0087]-[0089]; and figures 3-7. *; | [A]WO2012004002 (CENTROTHERM THERMAL SOLUTIONS GMBH & CO KG [DE], et al) [A] 1-15* See abstract; page 12, line 17 - page 13, line 31; and figures 3-9. *; | [Y]US2012311848 (PARK YONMOOK [KR]) [Y] 6 * See abstract; paragraphs [0032]-[0035]; and figures 1-2. *; | [Y]CN103904011 (SHANGHAI MICROELECTRONICS EQUI) [Y] 1-15 * See abstract; paragraphs [0031]-[0033]; claim 10; and figures 1-7. * |