EP3391149 - A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES [Right-click to bookmark this link] | Status | No opposition filed within time limit Status updated on 06.11.2020 Database last updated on 24.08.2024 | |
Former | The patent has been granted Status updated on 05.12.2019 | ||
Former | Grant of patent is intended Status updated on 30.07.2019 | ||
Former | Request for examination was made Status updated on 21.09.2018 | ||
Former | The international publication has been made Status updated on 23.06.2017 | ||
Former | unknown Status updated on 16.11.2016 | Most recent event Tooltip | 08.07.2022 | Lapse of the patent in a contracting state New state(s): MK | published on 10.08.2022 [2022/32] | Applicant(s) | For all designated states ASML Netherlands B.V. P.O. Box 324 5500 AH Veldhoven / NL | [2018/43] | Inventor(s) | 01 /
NAKIBOGLU, Günes PO Box 324 5500 AH Veldhoven / NL | 02 /
BALTIS, Coen Hubertus Matheus PO Box 324 5500 AH Veldhoven / NL | 03 /
TROMP, Siegfried Alexander PO Box 324 5500 AH Veldhoven / NL | 04 /
VAN DE VIJVER, Yuri Johannes Gabriël PO Box 324 5500 AH Veldhoven / NL | 05 /
SCHOLTEN, Bert Dirk PO Box 324 5500 AH Veldhoven / NL | 06 /
VAN SOMMEREN, Daan Daniel Johannes Antonius PO Box 324 5500 AH Veldhoven / NL | 07 /
FRENCKEN, Mark Johannes Hermanus PO Box 324 5500 AH Veldhoven / NL | [2018/43] | Representative(s) | ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | [N/P] |
Former [2020/01] | Dung, Shiang-Lung ASML Netherlands B.V. Corporate Intellectual Property De Run 6501 P.O. Box 324 5500 AH Veldhoven / NL | ||
Former [2018/43] | Dung, Shiang-Lung ASML Netherlands B.V. Corporate Intellectual Property P.O. Box 324 5500 AH Veldhoven / NL | Application number, filing date | 16791368.0 | 02.11.2016 | [2018/43] | WO2016EP76357 | Priority number, date | EP20150200143 | 15.12.2015 Original published format: EP 15200143 | [2018/43] | Filing language | EN | Procedural language | EN | Publication | Type: | A1 Application with search report | No.: | WO2017102162 | Date: | 22.06.2017 | Language: | EN | [2017/25] | Type: | A1 Application with search report | No.: | EP3391149 | Date: | 24.10.2018 | Language: | EN | The application published by WIPO in one of the EPO official languages on 22.06.2017 takes the place of the publication of the European patent application. | [2018/43] | Type: | B1 Patent specification | No.: | EP3391149 | Date: | 01.01.2020 | Language: | EN | [2020/01] | Search report(s) | International search report - published on: | EP | 22.06.2017 | Classification | IPC: | G03F7/20, H01L21/683, H01L21/687 | [2019/27] | CPC: |
G03F7/707 (EP,CN);
G03F7/70341 (EP,CN,US);
G03F7/70716 (CN,US);
G03F7/70733 (US);
H01L21/0274 (US);
H01L21/68735 (EP);
|
Former IPC [2018/43] | G03F7/20, H01L21/683 | Designated contracting states | AL, AT, BE, BG, CH, CY, CZ, DE, DK, EE, ES, FI, FR, GB, GR, HR, HU, IE, IS, IT, LI, LT, LU, LV, MC, MK, MT, NL, NO, PL, PT, RO, RS, SE, SI, SK, SM, TR [2018/43] | Extension states | BA | Not yet paid | ME | Not yet paid | Validation states | MA | Not yet paid | MD | Not yet paid | Title | German: | SUBSTRATHALTER, LITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON VORRICHTUNGEN | [2018/43] | English: | A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES | [2018/43] | French: | SUPPORT DE SUBSTRAT, APPAREIL LITHOGRAPHIQUE ET PROCÉDÉ DE FABRICATION DE DISPOSITIFS | [2018/43] | Entry into regional phase | 04.04.2018 | National basic fee paid | 04.04.2018 | Designation fee(s) paid | 04.04.2018 | Examination fee paid | Examination procedure | 04.04.2018 | Amendment by applicant (claims and/or description) | 04.04.2018 | Examination requested [2018/43] | 04.04.2018 | Date on which the examining division has become responsible | 31.07.2019 | Communication of intention to grant the patent | 01.10.2019 | Fee for grant paid | 01.10.2019 | Fee for publishing/printing paid | 01.10.2019 | Receipt of the translation of the claim(s) | Opposition(s) | 02.10.2020 | No opposition filed within time limit [2020/50] | Fees paid | Renewal fee | 22.11.2018 | Renewal fee patent year 03 | 26.11.2019 | Renewal fee patent year 04 |
Opt-out from the exclusive Tooltip competence of the Unified Patent Court | See the Register of the Unified Patent Court for opt-out data | ||
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court. | Lapses during opposition Tooltip | HU | 02.11.2016 | AL | 01.01.2020 | AT | 01.01.2020 | CY | 01.01.2020 | CZ | 01.01.2020 | DK | 01.01.2020 | EE | 01.01.2020 | ES | 01.01.2020 | FI | 01.01.2020 | HR | 01.01.2020 | IT | 01.01.2020 | LT | 01.01.2020 | LV | 01.01.2020 | MC | 01.01.2020 | MK | 01.01.2020 | MT | 01.01.2020 | NL | 01.01.2020 | PL | 01.01.2020 | RO | 01.01.2020 | RS | 01.01.2020 | SE | 01.01.2020 | SI | 01.01.2020 | SK | 01.01.2020 | SM | 01.01.2020 | TR | 01.01.2020 | BG | 01.04.2020 | NO | 01.04.2020 | GR | 02.04.2020 | IS | 01.05.2020 | PT | 27.05.2020 | [2022/31] |
Former [2022/30] | HU | 02.11.2016 | |
AL | 01.01.2020 | ||
AT | 01.01.2020 | ||
CY | 01.01.2020 | ||
CZ | 01.01.2020 | ||
DK | 01.01.2020 | ||
EE | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
IT | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
MC | 01.01.2020 | ||
MT | 01.01.2020 | ||
NL | 01.01.2020 | ||
PL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SI | 01.01.2020 | ||
SK | 01.01.2020 | ||
SM | 01.01.2020 | ||
TR | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2022/27] | HU | 02.11.2016 | |
AT | 01.01.2020 | ||
CY | 01.01.2020 | ||
CZ | 01.01.2020 | ||
DK | 01.01.2020 | ||
EE | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
IT | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
MC | 01.01.2020 | ||
MT | 01.01.2020 | ||
NL | 01.01.2020 | ||
PL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SI | 01.01.2020 | ||
SK | 01.01.2020 | ||
SM | 01.01.2020 | ||
TR | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2021/31] | AT | 01.01.2020 | |
CZ | 01.01.2020 | ||
DK | 01.01.2020 | ||
EE | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
IT | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
MC | 01.01.2020 | ||
NL | 01.01.2020 | ||
PL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SI | 01.01.2020 | ||
SK | 01.01.2020 | ||
SM | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2021/10] | AT | 01.01.2020 | |
CZ | 01.01.2020 | ||
DK | 01.01.2020 | ||
EE | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
IT | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
PL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SI | 01.01.2020 | ||
SK | 01.01.2020 | ||
SM | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2020/50] | CZ | 01.01.2020 | |
DK | 01.01.2020 | ||
EE | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SK | 01.01.2020 | ||
SM | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2020/49] | CZ | 01.01.2020 | |
DK | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SK | 01.01.2020 | ||
SM | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2020/48] | CZ | 01.01.2020 | |
DK | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RO | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
SM | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2020/47] | CZ | 01.01.2020 | |
DK | 01.01.2020 | ||
ES | 01.01.2020 | ||
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2020/40] | CZ | 01.01.2020 | |
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
IS | 01.05.2020 | ||
PT | 27.05.2020 | ||
Former [2020/39] | CZ | 01.01.2020 | |
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
BG | 01.04.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
PT | 27.05.2020 | ||
Former [2020/38] | CZ | 01.01.2020 | |
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
NO | 01.04.2020 | ||
GR | 02.04.2020 | ||
PT | 27.05.2020 | ||
Former [2020/37] | CZ | 01.01.2020 | |
FI | 01.01.2020 | ||
HR | 01.01.2020 | ||
LT | 01.01.2020 | ||
LV | 01.01.2020 | ||
NL | 01.01.2020 | ||
RS | 01.01.2020 | ||
SE | 01.01.2020 | ||
NO | 01.04.2020 | ||
PT | 27.05.2020 | ||
Former [2020/35] | CZ | 01.01.2020 | |
FI | 01.01.2020 | ||
LT | 01.01.2020 | ||
NL | 01.01.2020 | ||
NO | 01.04.2020 | ||
Former [2020/33] | NL | 01.01.2020 | Cited in | International search | [X]US2004160582 (LOF JOERI [NL], et al) [X] 8* paragraphs [0125] - [0134]; figures 7a-7d *; | [XAYI]US2007146666 (ANTONIUS LEENDERS MARTINUS H [NL], et al) [X] 8,11 * paragraph [0033]; figure 1 * * paragraphs [0047] - [0050]; figures 6,7 * [A] 2-5,7,9,10,13 [Y] 1,6 [I] 12; | [X]US2007146665 (OTTENS JOOST J [NL], et al) [X] 8,10 * paragraphs [0063] - [0066]; figures 6,7 * * figure 1 *; | [XAY]EP2738792 (NIKON CORP [JP]) [X] 8,11-15 * figures 1,3 * * paragraphs [0084] - [0097]; figures 6,7A-7C * [A] 9,10 [Y] 1,6 |