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Extract from the Register of European Patents

EP About this file: EP3391149

EP3391149 - A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES [Right-click to bookmark this link]
StatusNo opposition filed within time limit
Status updated on  06.11.2020
Database last updated on 24.08.2024
FormerThe patent has been granted
Status updated on  05.12.2019
FormerGrant of patent is intended
Status updated on  30.07.2019
FormerRequest for examination was made
Status updated on  21.09.2018
FormerThe international publication has been made
Status updated on  23.06.2017
Formerunknown
Status updated on  16.11.2016
Most recent event   Tooltip08.07.2022Lapse of the patent in a contracting state
New state(s): MK		published on 10.08.2022  [2022/32]
Applicant(s)For all designated states
ASML Netherlands B.V.
P.O. Box 324
5500 AH Veldhoven / NL
[2018/43]
Inventor(s)01 / NAKIBOGLU, Günes
PO Box 324
5500 AH Veldhoven / NL
02 / BALTIS, Coen Hubertus Matheus
PO Box 324
5500 AH Veldhoven / NL
03 / TROMP, Siegfried Alexander
PO Box 324
5500 AH Veldhoven / NL
04 / VAN DE VIJVER, Yuri Johannes Gabriël
PO Box 324
5500 AH Veldhoven / NL
05 / SCHOLTEN, Bert Dirk
PO Box 324
5500 AH Veldhoven / NL
06 / VAN SOMMEREN, Daan Daniel Johannes Antonius
PO Box 324
5500 AH Veldhoven / NL
07 / FRENCKEN, Mark Johannes Hermanus
PO Box 324
5500 AH Veldhoven / NL
 [2018/43]
Representative(s)ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
[N/P]
Former [2020/01]Dung, Shiang-Lung
ASML Netherlands B.V.
Corporate Intellectual Property
De Run 6501
P.O. Box 324
5500 AH Veldhoven / NL
Former [2018/43]Dung, Shiang-Lung
ASML Netherlands B.V.
Corporate Intellectual Property
P.O. Box 324
5500 AH Veldhoven / NL
Application number, filing date16791368.002.11.2016
[2018/43]
WO2016EP76357
Priority number, dateEP2015020014315.12.2015         Original published format: EP 15200143
[2018/43]
Filing languageEN
Procedural languageEN
PublicationType: A1 Application with search report
No.:WO2017102162
Date:22.06.2017
Language:EN
[2017/25]
Type: A1 Application with search report 
No.:EP3391149
Date:24.10.2018
Language:EN
The application published by WIPO in one of the EPO official languages on 22.06.2017 takes the place of the publication of the European patent application.
[2018/43]
Type: B1 Patent specification 
No.:EP3391149
Date:01.01.2020
Language:EN
[2020/01]
Search report(s)International search report - published on:EP22.06.2017
ClassificationIPC:G03F7/20, H01L21/683, H01L21/687
[2019/27]
CPC:
G03F7/707 (EP,CN); G03F7/70341 (EP,CN,US); G03F7/70716 (CN,US);
G03F7/70733 (US); H01L21/0274 (US); H01L21/68735 (EP);
H01L21/6875 (EP,US); G03F7/70858 (US) (-)
Former IPC [2018/43]G03F7/20, H01L21/683
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2018/43]
Extension statesBANot yet paid
MENot yet paid
Validation statesMANot yet paid
MDNot yet paid
TitleGerman:SUBSTRATHALTER, LITHOGRAFISCHE VORRICHTUNG UND VERFAHREN ZUR HERSTELLUNG VON VORRICHTUNGEN[2018/43]
English:A SUBSTRATE HOLDER, A LITHOGRAPHIC APPARATUS AND METHOD OF MANUFACTURING DEVICES[2018/43]
French:SUPPORT DE SUBSTRAT, APPAREIL LITHOGRAPHIQUE ET PROCÉDÉ DE FABRICATION DE DISPOSITIFS[2018/43]
Entry into regional phase04.04.2018National basic fee paid 
04.04.2018Designation fee(s) paid 
04.04.2018Examination fee paid 
Examination procedure04.04.2018Amendment by applicant (claims and/or description)
04.04.2018Examination requested  [2018/43]
04.04.2018Date on which the examining division has become responsible
31.07.2019Communication of intention to grant the patent
01.10.2019Fee for grant paid
01.10.2019Fee for publishing/printing paid
01.10.2019Receipt of the translation of the claim(s)
Opposition(s)02.10.2020No opposition filed within time limit [2020/50]
Fees paidRenewal fee
22.11.2018Renewal fee patent year 03
26.11.2019Renewal fee patent year 04
Opt-out from the exclusive  Tooltip
competence of the Unified
Patent Court		 See the Register of the Unified Patent Court for opt-out data
Responsibility for the accuracy, completeness or quality of the data displayed under the link provided lies entirely with the Unified Patent Court.
Lapses during opposition  TooltipHU02.11.2016
AL01.01.2020
AT01.01.2020
CY01.01.2020
CZ01.01.2020
DK01.01.2020
EE01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
IT01.01.2020
LT01.01.2020
LV01.01.2020
MC01.01.2020
MK01.01.2020
MT01.01.2020
NL01.01.2020
PL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SI01.01.2020
SK01.01.2020
SM01.01.2020
TR01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
[2022/31]
Former [2022/30]HU02.11.2016
AL01.01.2020
AT01.01.2020
CY01.01.2020
CZ01.01.2020
DK01.01.2020
EE01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
IT01.01.2020
LT01.01.2020
LV01.01.2020
MC01.01.2020
MT01.01.2020
NL01.01.2020
PL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SI01.01.2020
SK01.01.2020
SM01.01.2020
TR01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2022/27]HU02.11.2016
AT01.01.2020
CY01.01.2020
CZ01.01.2020
DK01.01.2020
EE01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
IT01.01.2020
LT01.01.2020
LV01.01.2020
MC01.01.2020
MT01.01.2020
NL01.01.2020
PL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SI01.01.2020
SK01.01.2020
SM01.01.2020
TR01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2021/31]AT01.01.2020
CZ01.01.2020
DK01.01.2020
EE01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
IT01.01.2020
LT01.01.2020
LV01.01.2020
MC01.01.2020
NL01.01.2020
PL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SI01.01.2020
SK01.01.2020
SM01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2021/10]AT01.01.2020
CZ01.01.2020
DK01.01.2020
EE01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
IT01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
PL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SI01.01.2020
SK01.01.2020
SM01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2020/50]CZ01.01.2020
DK01.01.2020
EE01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SK01.01.2020
SM01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2020/49]CZ01.01.2020
DK01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SK01.01.2020
SM01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2020/48]CZ01.01.2020
DK01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RO01.01.2020
RS01.01.2020
SE01.01.2020
SM01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2020/47]CZ01.01.2020
DK01.01.2020
ES01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RS01.01.2020
SE01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2020/40]CZ01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RS01.01.2020
SE01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
IS01.05.2020
PT27.05.2020
Former [2020/39]CZ01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RS01.01.2020
SE01.01.2020
BG01.04.2020
NO01.04.2020
GR02.04.2020
PT27.05.2020
Former [2020/38]CZ01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RS01.01.2020
SE01.01.2020
NO01.04.2020
GR02.04.2020
PT27.05.2020
Former [2020/37]CZ01.01.2020
FI01.01.2020
HR01.01.2020
LT01.01.2020
LV01.01.2020
NL01.01.2020
RS01.01.2020
SE01.01.2020
NO01.04.2020
PT27.05.2020
Former [2020/35]CZ01.01.2020
FI01.01.2020
LT01.01.2020
NL01.01.2020
NO01.04.2020
Former [2020/33]NL01.01.2020
Cited inInternational search[X]US2004160582  (LOF JOERI [NL], et al) [X] 8* paragraphs [0125] - [0134]; figures 7a-7d *;
 [XAYI]US2007146666  (ANTONIUS LEENDERS MARTINUS H [NL], et al) [X] 8,11 * paragraph [0033]; figure 1 * * paragraphs [0047] - [0050]; figures 6,7 * [A] 2-5,7,9,10,13 [Y] 1,6 [I] 12;
 [X]US2007146665  (OTTENS JOOST J [NL], et al) [X] 8,10 * paragraphs [0063] - [0066]; figures 6,7 * * figure 1 *;
 [XAY]EP2738792  (NIKON CORP [JP]) [X] 8,11-15 * figures 1,3 * * paragraphs [0084] - [0097]; figures 6,7A-7C * [A] 9,10 [Y] 1,6
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.