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Extract from the Register of European Patents

EP About this file: EP3559747

EP3559747 - DEVICE AND METHOD FOR EXPOSING A LIGHT-SENSITIVE LAYER [Right-click to bookmark this link]
StatusExamination is in progress
Status updated on  27.05.2022
Database last updated on 31.08.2024
FormerRequest for examination was made
Status updated on  27.09.2019
FormerThe international publication has been made
Status updated on  30.06.2018
Formerunknown
Status updated on  27.01.2017
Most recent event   Tooltip02.01.2024Change - representative 
Applicant(s)For all designated states
EV Group E. Thallner GmbH
DI Erich Thallner Strasse 1
St. Florian am Inn / AT
[2019/44]
Inventor(s)01 / THALLNER, Bernhard
43
Stocket
4782 St. Florian am Inn / AT
02 / POVAZAY, Boris
95
Kirschenallee
1220 Wien / AT
 [2019/44]
Representative(s)Schneider, Sascha, et al
Becker & Müller
Patentanwälte
Turmstraße 22
40878 Ratingen / DE
[N/P]
Former [2019/44]Schweiger, Johannes, et al
Patentanwälte
Becker & Müller
Turmstrasse 22
40878 Ratingen / DE
Application number, filing date16828721.720.12.2016
[2019/44]
WO2016EP81880
Filing languageDE
Procedural languageDE
PublicationType: A1 Application with search report
No.:WO2018113917
Date:28.06.2018
Language:DE
[2018/26]
Type: A1 Application with search report 
No.:EP3559747
Date:30.10.2019
Language:DE
The application published by WIPO in one of the EPO official languages on 28.06.2018 takes the place of the publication of the European patent application.
[2019/44]
Search report(s)International search report - published on:EP28.06.2018
ClassificationIPC:G03F7/20
[2019/44]
CPC:
G03F7/70558 (EP,KR); G03F7/2057 (EP,CN,KR,US); G03F7/2004 (CN);
G03F7/70008 (CN); G03F7/70116 (KR); G03F7/70291 (CN);
G03F7/70633 (KR,US) (-)
Designated contracting statesAL,   AT,   BE,   BG,   CH,   CY,   CZ,   DE,   DK,   EE,   ES,   FI,   FR,   GB,   GR,   HR,   HU,   IE,   IS,   IT,   LI,   LT,   LU,   LV,   MC,   MK,   MT,   NL,   NO,   PL,   PT,   RO,   RS,   SE,   SI,   SK,   SM,   TR [2019/44]
TitleGerman:VORRICHTUNG UND VERFAHREN ZUR BELICHTUNG EINER LICHTEMPFINDLICHEN SCHICHT[2019/44]
English:DEVICE AND METHOD FOR EXPOSING A LIGHT-SENSITIVE LAYER[2019/44]
French:DISPOSITIF ET PROCÉDÉ D'EXPOSITION D'UNE COUCHE PHOTOSENSIBLE[2019/44]
Entry into regional phase24.06.2019National basic fee paid 
24.06.2019Designation fee(s) paid 
24.06.2019Examination fee paid 
Examination procedure24.06.2019Examination requested  [2019/44]
24.06.2019Date on which the examining division has become responsible
09.01.2020Amendment by applicant (claims and/or description)
27.05.2022Despatch of a communication from the examining division (Time limit: M04)
06.09.2022Reply to a communication from the examining division
Fees paidRenewal fee
24.06.2019Renewal fee patent year 03
02.12.2019Renewal fee patent year 04
04.12.2020Renewal fee patent year 05
10.12.2021Renewal fee patent year 06
05.12.2022Renewal fee patent year 07
05.12.2023Renewal fee patent year 08
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Cited inInternational search[YA]EP0467076  (MICRONIC LASER SYSTEMS AB [SE]);
 [XY]DE102005054000  (CST GMBH [DE]);
 [YA]US2006269217  (SHIROTA HIROYUKI [JP], et al)
The EPO accepts no responsibility for the accuracy of data originating from other authorities; in particular, it does not guarantee that it is complete, up to date or fit for specific purposes.